Strain sensor unit and skin sensor module comprising the same

US10952642B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-10952642-B2
Application numberUS-201715808416-A
CountryUS
Kind codeB2
Filing dateNov 9, 2017
Priority dateNov 9, 2017
Publication dateMar 23, 2021
Grant dateMar 23, 2021

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A strain sensor unit and a skin sensor module comprising the same are provided. The strain sensor unit according to an embodiment of the present disclosure includes a substrate having a through-hole, and including a first electrode and a second electrode formed at one side and the other side of the through-hole on one surface of the substrate, a piezoelectric device drawn from the first electrode and extending inward the through-hole, and a piezoresistor drawn from the second electrode and extending inward the through-hole, wherein the piezoresistor overlaps with a whole or part of the piezoelectric device.

First claim

Opening claim text (preview).

What is claimed is: 1. A strain sensor unit comprising: a substrate having a through-hole; a piezoelectric device located at one side of the through-hole on the substrate, and extending toward another side of the through-hole; a piezoresistor located at another side of the through-hole on the substrate, and extending toward one side of the through-hole; a first electrode located on the piezoelectric device; and a second electrode located on the piezoresistor, wherein the piezoresistor overlaps with a whole or part of the piezoelectric device, and wherein the piezoresistor is a nanocrack-control based metal piezoresistive device. 2. The strain sensor unit according to claim 1 , wherein the piezoelectric device is a piezoelectric semiconductor. 3. The strain sensor unit according to claim 1 , wherein an interfacial layer made of amorphous oxide semiconductor is further formed on a contact surface between the piezoelectric device and the piezoresistor. 4. The strain sensor unit according to claim 1 , wherein the substrate has a plurality of air permeable holes having the diameter of 50 to 150 μm. 5. The strain sensor unit according to claim 4 , wherein a distance between the plurality of air permeable holes is 50 to 150 μm. 6. The strain sensor unit according to claim 4 , wherein the plurality of air permeable holes comprises the through-hole. 7. The strain sensor unit according to claim 1 , wherein the substrate is made of a material including polydimethylsiloxane (PDMS). 8. The strain sensor unit according to claim 1 , wherein a plurality of micro suction cups is patterned on a surface opposite to one surface of the substrate to be attached to the skin.

Assignees

Inventors

Classifications

  • using piezoelectric means · CPC title

  • of piezoresistors · CPC title

  • using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material · CPC title

  • using properties of piezoelectric devices · CPC title

  • Details of sensor housings or probes; Details of structural supports for sensors (A61B2560/0462 takes precedence) · CPC title

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What does patent US10952642B2 cover?
A strain sensor unit and a skin sensor module comprising the same are provided. The strain sensor unit according to an embodiment of the present disclosure includes a substrate having a through-hole, and including a first electrode and a second electrode formed at one side and the other side of the through-hole on one surface of the substrate, a piezoelectric device drawn from the first electro…
Who is the assignee on this patent?
Amorepacific Corp, Massachusetts Inst Technology
What technology area does this patent fall under?
Primary CPC classification A61B5/443. Mapped technology areas include Human Necessities.
When was this patent published?
Publication date Tue Mar 23 2021 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 7 related publications on this page (citations in our corpus or others sharing the same primary CPC).