Heterojunction solar cell and manufacturing method thereof
US-2018212083-A1 · Jul 26, 2018 · US
US10950740B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10950740-B2 |
| Application number | US-201816199783-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 26, 2018 |
| Priority date | Dec 19, 2016 |
| Publication date | Mar 16, 2021 |
| Grant date | Mar 16, 2021 |
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Methods of fabricating solar cell emitter regions with differentiated P-type and N-type region architectures, and the resulting solar cells, are described herein. In an example, a solar cell includes an N-type semiconductor substrate having a light-receiving surface and a back surface. A plurality of N-type polycrystalline silicon regions is disposed on a first thin dielectric layer disposed on the back surface of the N-type semiconductor substrate. A plurality of P-type polycrystalline silicon regions is disposed on a second thin dielectric layer disposed in a corresponding one of a plurality of trenches interleaving the plurality of N-type polycrystalline silicon regions in the back surface of the N-type semiconductor substrate.
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What is claimed is: 1. A solar cell, comprising: an N-type substrate having a light-receiving surface and a back surface; a first dielectric layer disposed on the back surface of the substrate; an N-type polycrystalline silicon emitter region disposed on the first dielectric layer; a P-type polycrystalline silicon emitter region disposed on a second dielectric layer, wherein a total area of the N-type polycrystalline silicon emitter region is greater than a total area of the P-type polycrystalline silicon emitter region by a ratio of 15:1 or more; a third dielectric layer disposed laterally directly between the N-type and P-type polycrystalline silicon emitter regions; a first conductive contact structure disposed on the N-type polycrystalline silicon emitter region; and a second conductive contact structure disposed on the P-type polycrystalline silicon emitter region, wherein the P-type polycrystalline silicon emitter region overlaps the N-type polycrystalline silicon emitter region. 2. The solar cell of claim 1 , wherein the N-type polycrystalline silicon emitter region has a width greater than a width of each of the P-type polycrystalline silicon emitter region by a ratio of 5:1 or more. 3. The solar cell of claim 1 , wherein the N-type polycrystalline silicon emitter region has a thickness relative to a thickness of the P-type polycrystalline silicon emitter region by a ratio of 3:1 or less. 4. A solar cell, comprising: an N-type substrate having a light-receiving surface and a back surface; a first dielectric layer disposed on the back surface of the substrate; an N-type polycrystalline silicon emitter region of a first conductivity type disposed on the first dielectric layer; a second dielectric layer disposed on the back surface of the substrate; a P-type polycrystalline silicon emitter region disposed on the second dielectric layer, wherein a total area of the N-type polycrystalline silicon emitter region is greater than a total area of the P-type polycrystalline silicon emitter region by a ratio of 15:1 or more; a third dielectric layer disposed directly between the N-type polycrystalline silicon emitter region and the P-type polycrystalline silicon emitter region; an insulator layer disposed on the N-type polycrystalline silicon emitter region, wherein at least a portion of the P-type polycrystalline silicon emitter region is disposed on the insulator layer; a first conductive contact structure disposed on the N-type polycrystalline silicon emitter region; and a second conductive contact structure disposed on the P-type polycrystalline silicon emitter region, wherein the P-type polycrystalline silicon emitter region overlaps the N-type polycrystalline silicon emitter region. 5. The solar cell of claim 4 , wherein the N-type polycrystalline silicon emitter region has a width greater than a width of the P-type polycrystalline silicon emitter region by a ratio of 5:1 or more. 6. The solar cell of claim 4 , wherein the plurality of N-type polycrystalline silicon emitter region has a thickness relative to a thickness of the P-type polycrystalline silicon emitter region by a ratio of 3:1 or less. 7. A solar cell, comprising: an N-type substrate having a light-receiving surface and a back surface; a first dielectric layer disposed on the back surface of the substrate; an N-type polycrystalline silicon emitter region disposed on the first dielectric layer; a P-type polycrystalline silicon emitter region disposed on a second dielectric layer, wherein a total area of the N-type polycrystalline silicon emitter region is greater than a total area of the P-type polycrystalline silicon emitter region, and wherein the N-type polycrystalline silicon emitter region has a width greater than a width of each of the P-type polycrystalline silicon emitter region by a ratio of 5:1 or more; a third dielectric layer disposed laterally directly between the N-type and P-type polycrystalline silicon emitter regions; a first conductive contact structure disposed on the N-type polycrystalline silicon emitter region; and a second conductive contact structure disposed on the P-type polycrystalline silicon emitter region, wherein the P-type polycrystalline silicon emitter region overlaps the N-type polycrystalline silicon emitter region. 8. The solar cell of claim 7 , wherein the N-type polycrystalline silicon emitter region has a thickness relative to a thickness of the P-type polycrystalline silicon emitter region by a ratio of 3:1 or less. 9. The solar cell of claim 7 , wherein the first dielectric layer comprises silicon and oxygen. 10. The solar cell of claim 7 , wherein the second dielectric layer comprises silicon and oxygen. 11. A solar cell, comprising: an N-type substrate having a light-receiving surface and a back surface; a first dielectric layer disposed on the back surface of the substrate; an N-type polycrystalline silicon emitter region of a first conductivity type disposed on the first dielectric layer; a second dielectric layer disposed on the back surface of the substrate; a P-type polycrystalline silicon emitter region disposed on the second dielectric layer, wherein a total area of the N-type polycrystalline silicon emitter region is greater than a total area of the P-type polycrystalline silicon emitter region, and wherein the N-type polycrystalline silicon emitter region has a width greater than a width of the P-type polycrystalline silicon emitter region by a ratio of 5:1 or more; a third dielectric layer disposed directly between the N-type polycrystalline silicon emitter region and the P-type polycrystalline silicon emitter region; an insulator layer disposed on the N-type polycrystalline silicon emitter region, wherein at least a portion of the P-type polycrystalline silicon emitter region is disposed on the insulator layer; a first conductive contact structure disposed on the N-type polycrystalline silicon emitter region; and a second conductive contact structure disposed on the P-type polycrystalline silicon emitter region, wherein the P-type polycrystalline silicon emitter region overlaps the N-type polycrystalline silicon emitter region. 12. The solar cell of claim 11 , wherein the plurality of N-type polycrystalline silicon emitter region has a thickness relative to a thickness of the P-type polycrystalline silicon emitter region by a ratio of 3:1 or less. 13. The solar cell of claim 11 , wherein the first dielectric layer comprises silicon and oxygen. 14. The solar cell of claim 11 , wherein the second dielectric layer comprises silicon and oxygen. 15. The solar cell of claim 1 , wherein the N-type polycrystalline silicon emitter region has a width greater than a width of each of the P-type polycrystalline silicon emitter region by a ratio of 5:1 or more, and wherein the N-type polycrystalline silicon emitter region has a thickness relative to a thickness of the P-type polycrystalline silicon emitter region by a ratio of 3:1 or less. 16. The solar cell of claim 1 , wherein the first dielectric layer comprises silicon and oxygen. 17. The solar cell of claim 1 , wherein the second dielectric layer comprises silicon and oxygen. 18. The solar cell of claim 4 , wherein the N-type polycrystalline silicon emitter region has a width greater than a width of the P-type polycrystalline silicon emitter region by a ratio of 5:1 or more, and wherein the plurality of N-type polycrystalline silicon emitter region has a thickness relative to a thickness of the P-type polycrystalline silicon emitter region by a ratio of 3:1 or
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