Photoresist stripper

Patent metadata

Field	Value
Publication number	US-10948826-B2
Application number	US-201916286808-A
Country	US
Kind code	B2
Filing date	Feb 27, 2019
Priority date	Mar 7, 2018
Publication date	Mar 16, 2021
Grant date	Mar 16, 2021

Abstract

Improved stripper solutions for removing photoresists from substrates are provided that typically have flash points above about 95° C. and high loading capacities. The stripper solutions comprise diethylene glycol butyl ether, quaternary ammonium hydroxide, and an alkanolamine having at least two carbon atoms, at least one amino substituent and at least one hydroxyl substituent, the amino and hydroxyl substituents attached to two different carbon atoms. Some formulations can additionally contain a secondary solvent. The formulations do not contain DMSO. Methods for use of the stripping solutions are additionally provided.

First claim

What is claimed is:

1. A stripper solution for removing photoresist from substrates comprising:
about 30 weight percent to about 97 weight percent diethylene glycol butyl ether;
about 1 weight percent to about 7 weight percent of quaternary ammonium hydroxide;
about 1 weight percent to about 75 weight percent of (2-(2-aminoethoxy)ethanol) or (2-(2-aminoethoxy)ethanol) and secondary solvent;
about 0.001 weight percent to about 7 weight percent of at least one corrosion inhibitor; and
about 0.1 weight percent to about 20 weight percent water;
wherein said at least one corrosion inhibitor is selected from the group consisting of resorcinol, glycerol, sorbitol, and copper (II) nitrate hemi(pentahydrate), and
wherein the solution is essentially free of DMSO.

2. The solution of claim 1 , wherein the quaternary ammonium hydroxide has substituents that are (C 1 -C 8 ) alkyl, arylalkyl, benzyl, (C 1 -C 5 ) alcohol, and combinations thereof.

3. The solution of claim 2 , wherein the quaternary ammonium hydroxide includes at least one of tetramethylammonium hydroxide, tetraethylammonium hydroxide, ethyltrimethylammonium hydroxide, dimethyldipropylammonium hydroxide, or choline hydroxide.

4. The solution of claim 1 , wherein the (2-(2-aminoethoxy)ethanol) is present in the amount of about 3 weight percent to about 50 weight percent.

5. The solution of claim 1 , wherein the corrosion inhibitor is present in an amount of about 0.001 wt % to about 0.1 wt %.

6. The solution of claim 1 , wherein the secondary solvent is present in the amount of about 5 weight percent to about 30 weight percent.

7. The solution of claim 6 , wherein the secondary solvent includes 3-methoxy-3-methyl-1-butanol or propylene glycol.

8. The solution of claim 1 ,
wherein the diethylene glycol butyl ether is present in the amount of about 50 weight percent to about 97 weight percent;
wherein the quaternary ammonium hydroxide is present in the amount of about 1 weight percent to about 6 weight percent;
wherein the (2-(2-aminoethoxy)ethanol) is present in the amount of about 3 weight percent to about 40 weight percent;
wherein the water is present in the amount of about 0.1 weight percent to about 7 weight percent; and
wherein said at least one corrosion inhibitor comprises a first corrosion inhibitor, said first corrosion inhibitor is present in the amount of about 0.001 weight percent to about 3 weight percent.

9. The solution of claim 8 , wherein the first corrosion inhibitor is copper (II) nitrate hemi(pentahydrate).

10. The solution of claim 9 , wherein the at least one corrosion inhibitor further comprises a second corrosion inhibitor that is selected from the group consisting of resorcinol, glycerol, and sorbitol.

11. The solution of claim 10 , wherein the first corrosion inhibitor is present in an amount between about 0.001 weight percent to about 0.1 weight percent.

12. The solution of claim 1 , wherein the corrosion inhibitor includes a first and a second corrosion inhibitor selected from the group consisting of resorcinol, glycerol, sorbitol, and copper (II) nitrate derivatives wherein said second corrosion inhibitor is different from said first corrosion inhibitor.

13. The solution of claim 12 , further comprising about 0.05 weight percent to about 7 weight percent of said second corrosion inhibitor.

14. The solution of claim 1 , wherein a ratio of the amount of the diethylene glycol butyl ether to the amount of the water is greater than about 10.

15. The solution of claim 1 , wherein the freezing point is below about −15 degrees Celsius and the flashpoint is above about 97 degrees Celsius.

16. The solution of claim 1 , wherein the freezing point is below about −19 degrees Celsius.

17. A stripper solution for removing photoresist from substrates comprising:
about 50 weight percent to about 97 weight percent diethylene glycol butyl ether;
about 1 weight percent to about 5 weight percent of quaternary ammonium hydroxide;
about 3 weight percent to about 40 weight percent of (2-(2-aminoethoxy)ethanol);
about 0.001 weight percent to about 1 weight percent of corrosion inhibitor; and
about 1 weight percent to about 10 weight percent of water;
wherein a ratio of the amount of diethylene glycol butyl ether to the amount of water is greater than about 5;
wherein the solution exhibits a flash point above about 95 degrees Celsius; and
wherein the solution is essentially free of DMSO.

18. The method of removing at least one photoresist layer comprising the steps of:
contacting a substrate comprising at least one photoresist layer with a stripper solution at a temperature and for a time to at least partially remove said at least one photoresist layer; and
rinsing said substrate after said contacting step;
wherein said stripper solution comprises about 30 weight percent to about 97 weight percent diethylene glycol butyl ether;
about 1 weight percent to about 7 weight percent of quaternary ammonium hydroxide;
about 1 weight percent to about 75 weight percent of (2-(2-aminoethoxy)ethanol) or (2-(2-aminoethoxy)ethanol) and secondary solvent;
about 0.001 weight percent to about 7 weight percent of corrosion inhibitor; and
about 0.1 weight percent to about 20 weight percent water; and

wherein the solution is essentially free of DMSO.

19. The solution of claim 5 , wherein a ratio of the weight percent of the diethylene glycol butyl ether to the weight percent of the water is greater than about 15.

20. The solution of claim 19 , wherein a sum of the weight percent of the diethylene glycol butyl ether and the weight percent of the (2-(2-aminoethoxy)ethanol) is from about 70 to about 97 weight percent.

21. The solution of claim 20 , wherein said solution is free of secondary solvent.

Assignees

• Versum Mat Us Llc

Inventors

• Cao Yuanmei
• Phenis Michael
• Peters Richard

Classifications

• H10P50/287 Primary

  by chemical means · CPC title

• C11D7/3218

  Alkanolamines or alkanolimines · CPC title

• C11D7/5022

  containing oxygen · CPC title

• G03F7/425 Primary

  containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen · CPC title

• C11D7/263

  Ethers · CPC title