Magnetic field sensor and magnetoresistance element structure having at least two magnetoresistance elements disposed in a proximate arrangement

Patent metadata

Field	Value
Publication number	US-10948555-B2
Application number	US-201916420470-A
Country	US
Kind code	B2
Filing date	May 23, 2019
Priority date	May 23, 2019
Publication date	Mar 16, 2021
Grant date	Mar 16, 2021

Abstract

A magnetoresistance element structure disposed parallel to an x-y plane defined by an x-axis and a y-axis orthogonal to the x-axis can include a first magnetoresistance element having a plurality of first shapes coupled in series to result in the first magnetoresistance element having a first serpentine shape parallel to the x-y plane; and a second magnetoresistance element having a plurality of second shapes coupled in series to result in the second magnetoresistance element having a second serpentine shape parallel to the x-y plane, wherein the plurality of first shapes and the plurality of second shapes are disposed in an interdigitated pattern. A magnetic field sensor can use the above magnetoresistance element structure. Nested magnetoresistance elements and magnetic field sensors are also described.

First claim

What is claimed is:

1. A magnetoresistance element structure disposed parallel to an x-y plane defined by an x-axis and a y-axis orthogonal to the x-axis, comprising:
a first magnetoresistance element having a plurality of first shapes coupled in series to result in the first magnetoresistance element having a first serpentine shape parallel to the x-y plane; and
a second magnetoresistance element having a plurality of second shapes coupled in series to result in the second magnetoresistance element having a second serpentine shape parallel to the x-y plane, wherein the plurality of first shapes and the plurality of second shapes are disposed in an interdigitated pattern, wherein the plurality of first shapes each comprise:
a first shape one hundred eighty degree bend about a first axis orthogonal to the x and y axes to form a first shape pair of parallel legs, wherein two ends of the first shape pair of parallel legs distal from the first shape one hundred eighty bend have first shape opposing ninety degree bends;
a first shape length dimension along the first shape pair of parallel legs parallel to the y-axis, and a first shape width dimension across the first shape pair of parallel legs parallel to the x-axis, the first shape width dimension less than the first shape length dimension, wherein the plurality of second shapes each comprise;
a second shape one hundred eighty degree bend about a second axis orthogonal to the x and y axes to form a second shape pair of parallel legs axis, wherein two ends of the second shape pair of parallel legs distal from the second shape one hundred eighty bend have opposing second shape ninety degree bends; and
a second shape length dimension along the second shape pair of parallel legs parallel to the y-axis, and a second shape width dimension across the second shape pair of parallel legs parallel to the x-axis, the second shape width dimension less than the second shape length dimension, wherein ones of the plurality of first shapes are coupled together at ones of the first shape opposing ninety degree bends; and wherein ones of the plurality of second shapes are coupled together at ones of the second shape opposing ninety degree bends, wherein the magnetic field sensor further comprises:
a first plurality of conductive vias coupled between a portion of a first metal layer and ones of the first shapes proximate to respective ones of the first shape one hundred eighty degree bends;
a second plurality of conductive vias coupled between portion of a second metal layer and ones of the second shapes proximate to respective ones of the second shape one hundred eighty degree bends;
a third plurality of conductive vias coupled between a portion of a third metal layer and ones of the first shapes proximate to respective ones of the first shape opposing ninety degree bends; and
a fourth plurality of conductive vias coupled between a portion of a fourth metal layer and ones of the second shapes proximate to respective ones of the second shape opposing ninety degree bends.

2. The magnetoresistance element structure of claim 1 , wherein the first, second, third, and fourth metal layers are the same metal layer.

3. A magnetic field sensor, comprising:
a back-biasing magnet for generating a back-biasing magnetic field;
a substrate disposed proximate to the back-biasing magnet, the substrate having a largest surface parallel to an x-y plane;
a first magnetoresistance element disposed upon the substrate and having a plurality of first shapes coupled in series to result in a first serpentine shape parallel to the x-y plane; and
a second magnetoresistance element disposed upon the substrate and having a plurality of second shapes coupled in series to result in a second serpentine shape parallel to the x-y plane, wherein the plurality of first shapes and the plurality of second shapes are disposed in an interdigitated pattern,
wherein the first magnetoresistance element and the second magnetoresistance element experience the back-biasing magnetic field, wherein the plurality of first shapes each comprise:
a first shape one hundred eighty degree bend about a first axis orthogonal to the x and y axes to form a first shape pair of parallel legs, wherein two ends of the first shape pair of parallel legs distal from the first shape one hundred eighty bend have first shape opposing ninety degree bends;
a first shape length dimension along the first shape pair of parallel legs parallel to the y-axis, and a first shape width dimension across the first shape pair of parallel legs parallel to the x-axis, the first shape width dimension less than the first shape length dimension, wherein the plurality of second shapes each comprise;
a second shape one hundred eighty degree bend about a second axis orthogonal to the x and y axes to form a second shape pair of parallel legs axis, wherein two ends of the second shape pair of parallel legs distal from the second shape one hundred eighty bend have opposing second shape ninety degree bends; and
a second shape length dimension along the second shape pair of parallel legs parallel to the y-axis, and a second shape width dimension across the second shape pair of parallel legs parallel to the x-axis, the second shape width dimension less than the second shape length dimension, wherein ones of the plurality of first shapes are coupled together at ones of the first shape opposing ninety degree bends; and wherein ones of the plurality of second shapes are coupled together at ones of the second shape opposing ninety degree bends, wherein the magnetic field sensor further comprises:
a first plurality of conductive vias coupled between a portion of a first metal layer and ones of the first shapes proximate to respective ones of the first shape one hundred eighty degree bends;
a second plurality of conductive vias coupled between portion of a second metal layer and ones of the second shapes proximate to respective ones of the second shape one hundred eighty degree bends;
a third plurality of conductive vias coupled between a portion of a third metal layer and ones of the first shapes proximate to respective ones of the first shape opposing ninety degree bends; and
a fourth plurality of conductive vias coupled between a portion of a fourth metal layer and ones of the second shapes proximate to respective ones of the second shape opposing ninety degree bends.

4. The magnetic field sensor of claim 3 , wherein the back-biasing magnet comprises:
a solid member having a largest surface parallel to the x-y plane; and
two solid parallel legs extending in a direction perpendicular to the x-y plane, each coupled to a different end of the solid member, wherein the substrate is disposed proximate to the largest surface of the solid member and between the two solid parallel legs.

5. The magnetic field sensor of claim 3 , wherein the first, second, third, and fourth metal layers are the same metal layer.

6. A magnetoresistance element structure disposed parallel to an x-y plane defined by an x-axis and a y-axis orthogonal to the x-axis, comprising:
a first plurality of magnetoresistance elements, each having a respective yoke shape and each having a different respective length dimension parallel to the x-y plane, at least one of the first plurality of magnetoresistance elements being nested to fit inside another one of the first plurality of magnetoresistance elements; and
a second plurality of magnetoresistance elements, each having a respective yoke shape and each having a different respective length dimension parallel to the x-y plane, at least one of the second plurality of magnetoresistance elements being nested to fit inside another one of the second plurality of magnetoresistance elements, the first plurality of magnetoresistance elements dispos

Assignees

• Allegro Microsystems Llc

Inventors

• Tran Sam
• Lassalle-Balier Rémy

Classifications

• G01P13/045

  with speed indication · CPC title

• G01P3/488

  delivered by variable reluctance detectors · CPC title

• G01R33/093

  using multilayer structures, e.g. giant magnetoresistance sensors (thin magnetic films H01F10/00) · CPC title

• G01R33/091 Primary

  Constructional adaptation of the sensor to specific applications · CPC title

• G01R33/0017

  Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields · CPC title