Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US10947339B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10947339-B2 |
| Application number | US-201615762085-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 20, 2016 |
| Priority date | Sep 22, 2015 |
| Publication date | Mar 16, 2021 |
| Grant date | Mar 16, 2021 |
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For example, the anion exchange resin is obtained by reacting a hydrophobic monomer with an aminoalkyl group-containing monomer, in which the hydrophobic monomer is composed of one aromatic ring or a plurality of aromatic rings to which two halogen atoms are bonded, and the aminoalkyl group-containing monomer is composed of one aromatic ring or a plurality of aromatic rings to which two halogen atoms are bonded and an aminoalkyl group is introduced; and by quaternizing the amino group. In the anion exchange resin, a divalent hydrophobic group formed by the residue of the hydrophobic monomer, and a divalent hydrophilic group formed by the residue of the quaternized aminoalkyl group-containing monomer are bonded via direct bond.
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What is claimed is: 1. A method for producing an anion exchange resin, comprising: (A) preparing a hydrophobic monomer or a hydrophobic oligomer, wherein the hydrophobic monomer is composed of one aromatic ring, or is composed of a plurality of aromatic rings which are bonded to each other via a divalent hydrocarbon group, a divalent silicon-containing group, a divalent nitrogen-containing group, a divalent phosphorus-containing group, a divalent oxygen-containing group, a divalent sulfur-containing group, or a carbon-carbon bond, and wherein the aromatic ring(s) are substituted with two halogen atoms, pseudohalides or boronate groups; and wherein the hydrophobic oligomer is composed of a plurality of aromatic rings which are bonded to each other via a divalent hydrocarbon group, a divalent silicon-containing group, a divalent nitrogen-containing group, a divalent phosphorus-containing group, a divalent oxygen-containing group, a divalent sulfur-containing group, or a carbon-carbon bond, wherein the plurality of aromatic rings are bonded repeatedly via a divalent hydrocarbon group, a divalent silicon-containing group, a divalent nitrogen-containing group, a divalent phosphorus-containing group, a divalent oxygen-containing group, a divalent sulfur-containing group, or a carbon-carbon bond, and wherein the aromatic rings are substituted at both terminals with two halogen atoms, pseudohalides or boronate groups; (B) preparing an aminoalkyl group-containing monomer, wherein the aminoalkyl group-containing monomer is composed of one aromatic ring, or is composed of a plurality of aromatic rings which are bonded to each other via a divalent hydrocarbon group, a divalent silicon-containing group, a divalent nitrogen-containing group, a divalent phosphorus-containing group, a divalent oxygen-containing group, a divalent sulfur-containing group, or a carbon-carbon bond, and wherein the aromatic ring(s) are substituted with two halogen atoms, pseudohalides or boronate groups, and wherein at least one aromatic ring has an aminoalkyl group; (C) reacting the hydrophobic monomer or the hydrophobic oligomer with the aminoalkyl group-containing monomer to synthesize a polymer; and (D) quaternizing the amino group in the polymer; in the anion exchange resin, wherein the residue of the hydrophobic monomer or the hydrophobic oligomer forms a divalent hydrophobic group; wherein the quaternized amino group forms an anion exchange group; wherein the residue of the quaternized aminoalkyl group-containing monomer forms a divalent hydrophilic group; and wherein the divalent hydrophobic group and the divalent hydrophilic group are bonded via a carbon-carbon bond.
(I) or (II) containing elements other than carbon, oxygen, hydrogen or halogen as leaving group (X) · CPC title
Side-chains containing halogens · CPC title
Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule · CPC title
Polysulfones; Polyethersulfones · CPC title
Manufacturing or production processes characterised by the final manufactured product · CPC title
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