Drive for an xy-table and xy-table
US-2015381023-A1 · Dec 31, 2015 · US
US10944312B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10944312-B2 |
| Application number | US-201916260592-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 29, 2019 |
| Priority date | Jan 31, 2018 |
| Publication date | Mar 9, 2021 |
| Grant date | Mar 9, 2021 |
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Official abstract text for this publication.
An actuator may include a supporting body; a movable body shiftable relative to the supporting body; a first magnetic drive circuit comprising a first coil and a first magnet; a second magnetic drive circuit comprising a second coil and a second magnet adjacent to each other; a first coil holder supporting the first coil; and a second coil holder holding the second coil and aligned with the first coil holder in the first direction. The first coil holder and the second coil holder each may include a plurality of bottomed holes having openings in regions where the first coil holder and the second coil holder are disposed adjacent to each other. The first coil holder and the second coil holder may be positioned with pins fit to the holes.
Opening claim text (preview).
What is claimed is: 1. An actuator comprising: a supporting body; a movable body shiftable relative to the supporting body; a first magnetic drive circuit comprising a first coil and a first magnet adjacent to each other in a first direction and structured to drive the movable body in a second direction orthogonal to the first direction; a second magnetic drive circuit comprising a second coil and a second magnet adjacent to each other in the first direction and structured to drive the movable body in a third direction orthogonal to the first direction and intersecting the second direction, the second coil and the second magnet being aligned with the first magnetic drive circuit in the first direction; a first coil holder supporting the first coil; and a second coil holder holding the second coil and aligned with the first coil holder in the first direction, wherein, the first coil holder and the second coil holder each comprises a plurality of bottomed holes having openings in regions where the first coil holder and the second coil holder are disposed adjacent to each other in the first direction, the first coil holder and the second coil holder are positioned with pins fit to the holes, the first coil holder comprises a plurality of first columns protruding toward the second coil holder, the second coil holder comprises a plurality of second columns protruding toward the respective first columns such that end faces of the second columns come into contact with end surfaces of the respective first columns, and the first coil holder and the second coil holder come into contact only by the end surfaces of the first columns and the second columns. 2. The actuator according to claim 1 , wherein, among the first columns and the second columns, the holes are formed in at least two of the first columns and at least of two the second columns in contact with each other. 3. The actuator according to claim 2 , wherein, the first coil holder comprises a first frame holding the first coil inside the first frame, the second coil holder comprises a second frame holding the second coil inside the second frame, the first columns are disposed at edge portions of the first frame, and the second columns are disposed at edge portions of the second frame. 4. The actuator according to claim 3 , wherein, the first frame and the second frame each has a quadrangular shape, the plurality of first columns comprises four first columns disposed at the four corners of the first frame, and the plurality of second columns comprise four second columns disposed at the four corners of the second frame. 5. The actuator according to claim 4 , wherein the pins comprise metal. 6. The actuator according to claim 5 , wherein, the first magnet is disposed adjacent to a first effective side portion in the first direction, the first effective side portion being disposed on the first coil and extending in the third direction, the second magnet is disposed adjacent to a second effective side portion in the first direction, the second effective side portion being disposed on the second coil and extending in the second direction, the first coil holder comprises a first stopper defining a first movable range of the movable body in the third direction, and the second coil holder comprises a second stopper defining a second movable range of the movable body in the second direction. 7. The actuator according to claim 6 , wherein, the first coil and the second coil are disposed on the supporting body, and the first magnet and the second magnet are disposed on the movable body. 8. The actuator according to claim 7 wherein, a first elastic member having elasticity or viscoelasticity is disposed in contact with both the movable body and the supporting body, the first elastic member being disposed between the movable body and a portion of the supporting body adjacent to a side of the first coil on the movable body, the side of the first coil being remote from the second coil, and a second elastic member having elasticity or viscoelasticity is disposed in contact with both the movable body and the supporting body, the second elastic member being disposed between the movable body and a portion of the supporting body adjacent to a side of the second coil on the movable body, the side of the second coil being remote from the first coil. 9. The actuator according to claim 5 , wherein, the first coil and the second coil are disposed on the supporting body, and the first magnet and the second magnet are disposed on the movable body. 10. The actuator according to claim 5 , wherein, a first elastic member having elasticity or viscoelasticity is disposed in contact with both the movable body and the supporting body, the first elastic member being disposed between the movable body and a portion of the supporting body adjacent to a side of the first coil on the movable body, the side of the first coil being remote from the second coil, and a second elastic member having elasticity or viscoelasticity is disposed in contact with both the movable body and the supporting body, the second elastic member being disposed between the movable body and a portion of the supporting body adjacent to a side of the second coil on the movable body, the side of the second coil being remote from the first coil. 11. The actuator according to claim 1 , wherein the pins comprise metal. 12. The actuator according to claim 1 , wherein, the first magnet is disposed adjacent to a first effective side portion in the first direction, the first effective side portion being disposed on the first coil and extending in the third direction, the second magnet is disposed adjacent to a second effective side portion in the first direction, the second effective side portion being disposed on the second coil and extending in the second direction, the first coil holder comprises a first stopper defining a first movable range of the movable body in the third direction, and the second coil holder comprises a second stopper defining a second movable range of the movable body in the second direction. 13. The actuator according to claim 1 , wherein, the first coil and the second coil are disposed on the supporting body, and the first magnet and the second magnet are disposed on the movable body. 14. The actuator according to claim 1 , wherein, a first elastic member having elasticity or viscoelasticity is disposed in contact with both the movable body and the supporting body, the first elastic member being disposed between the movable body and a portion of the supporting body adjacent to a side of the first coil on the movable body, the side of the first coil being remote from the second coil, and a second elastic member having elasticity or viscoelasticity is disposed in contact with both the movable body and the supporting body, the second elastic member being disposed between the movable body and a portion of the supporting body adjacent to a side of the second coil on the movable body, the side of the second coil being remote from the first coil. 15. The actuator according to claim 12 , wherein, the first coil and the second coil are disposed on the supporting body, and the first magnet and the second magnet are disposed on the movable body. 16. The actuator according to claim 12 , wherein, a first elastic member having elasticity or viscoelasticity is disposed in contact with both the movable body and the supporting body, the first elastic member being disposed between the movable body and a portion of the supporting body adjacent to
moving along a straight path · CPC title
with armatures moved one way by energisation of a single coil system and returned by mechanical force, e.g. by springs · CPC title
with armatures moving in alternate directions by alternate energisation of two coil systems · CPC title
operating with electromagnetism (dynamo-electric motors with vibrating magnet, armature or coil system H02K33/00) · CPC title
using vibrating magnet, armature or coil system · CPC title
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