Film frame, display substrate-manufacturing system, and display substrate-manufacturing method

Patent metadata

Field	Value
Publication number	US-10942447-B2
Application number	US-201815869976-A
Country	US
Kind code	B2
Filing date	Jan 12, 2018
Priority date	Aug 11, 2017
Publication date	Mar 9, 2021
Grant date	Mar 9, 2021

Abstract

A film frame, a system for manufacturing a display substrate, and a method of manufacturing a display substrate, the film frame including a pair of frame edges extending lengthwise in a first direction and arranged opposite to each other; a fixed end clamp connected to the pair of frame edges and extending lengthwise in a second direction perpendicular to the first direction; and a free end clamp between the pair of frame edges, the free end clamp extending lengthwise in the second direction and configured to be detachably coupled with the pair of frame edges, wherein the fixed end clamp includes a first magnetic fixer extending lengthwise in the second direction and a second magnetic fixer on the first magnetic fixer, and the free end clamp includes a third magnetic fixer extending lengthwise in the second direction and a fourth magnetic fixer on the third magnetic fixer.

First claim

What is claimed is:

1. A film frame configured to be loaded with an imprint film, the film frame comprising:
a pair of frame edges extending lengthwise in a first direction and arranged opposite to each other;
a fixed end clamp connected to the pair of frame edges and extending lengthwise in a second direction perpendicular to the first direction; and
a free end clamp between the pair of frame edges, the free end clamp extending lengthwise in the second direction and configured to be detachably coupled with the pair of frame edges,
wherein:
the fixed end clamp includes a first magnetic fixer extending lengthwise in the second direction and a second magnetic fixer on the first magnetic fixer,
the free end clamp includes a third magnetic fixer extending lengthwise in the second direction and a fourth magnetic fixer on the third magnetic fixer,
the first and second magnetic fixers are configured apply normal contact force on a first end of the imprint film to fix the first end of the imprint film,
the third and fourth magnetic fixers are configured apply normal contact force on a second end of the imprint film opposite to the first end of the imprint film to fix the second end of the imprint film,
the first magnetic fixer includes a first magnetic device and a first cover covering the first magnetic device,
the second magnetic fixer includes a second magnetic device and a second cover covering the second magnetic device,
the third magnetic fixer includes a third magnetic device and a third cover covering the third magnetic device,
the fourth magnetic fixer includes a fourth magnetic device and a fourth cover covering the fourth magnetic device,
the first cover and the second cover respectively have complementary opposite surfaces,
the third cover and the fourth cover respectively have complementary opposite surfaces, and
cross-sectional areas of the first cover and the third cover increase in a third direction orthogonal to the first and second directions.

2. The film frame as claimed in claim 1 , wherein:
the pair of frame edges includes a free end combination groove depressed from an upper surface of the frame edges, and
the third magnetic fixer includes a free end shaft protruding in the second direction.

3. The film frame as claimed in claim 1 , wherein:
one of the first and second magnetic devices includes a magnet, and the other includes one of a magnetic material and a magnet, and
one of the third and fourth magnetic devices includes a magnet, and the other includes one of a magnetic material and a magnet.

4. The film frame as claimed in claim 1 , wherein at least one of the first to fourth magnetic devices includes a plurality of magnets having pole directions alternately arranged in the second direction.

5. The film frame as claimed in claim 1 , wherein the first and third covers have inclined surfaces facing each other.

6. The film frame as claimed in claim 1 , wherein cross-sectional areas of the first to fourth covers horizontal continuously change with respect to the first and second directions.

7. A system for manufacturing a display substrate, the system comprising:
a film loading stage;
the film frame as claimed in claim 1 at the film loading stage;
an imprint stage configured to perform an imprinting process on the display substrate by using the imprint film; and
a transporter configured to move the film frame between the film loading stage and the imprint stage,
wherein the film loading stage includes:
a flat film loading chuck having at least two pairs of opposite edges; and
an adhesive roll and a mold adjacent to first edges which are one pair of the at least two pairs of opposite edges of the film loading chuck.

8. The system as claimed in claim 7 , wherein the film loading chuck includes:
second edges, which are one pair of the at least two pairs of opposite edges of the film loading chuck, the second edges being different from the first edges;
a reference end connected to one of the second edges;
an alignment ruler driver connected to the other one of the second edges; and
an alignment ruler connected to the alignment ruler driver,
wherein the film loading chuck includes a plurality of gas outlets and is configured to cause the imprint film that is disposed on the film loading chuck to float and be spaced apart from the film loading chuck.

9. The system as claimed in claim 7 , wherein the adhesive roll and the mold have complementary profiles.

10. The system as claimed in claim 7 , wherein the adhesive roll is cylindrical.

11. The system as claimed in claim 7 , wherein:
at least one of the first to fourth magnetic devices a plurality of magnets having pole directions alternately arranged in the second direction.

12. A method of manufacturing a display substrate, the method comprising:
providing the film frame as claimed in claim 1 to a film loading stage;
providing an imprint film to the film loading stage;
aligning the imprint film with the film frame;
fixing the imprint film to the film frame; and
imprinting the imprint film on the display substrate,
wherein providing the imprint film includes separating a protection film from the imprint film by using an elastic force.

13. The method as claimed in claim 12 , wherein aligning the imprint film with the film frame includes:
providing the imprint film onto a film loading chuck of the film loading stage;
causing the imprint film to float above the film loading chuck; and
aligning the imprint film with a reference end that is on the film loading chuck.

14. The method as claimed in claim 12 , wherein fixing the imprint film to the film frame includes:
disposing at least one portion of the imprint film at the free end clamp and the fixed end clamp of the film frame; and
fixing the at least one portion of the imprint film by applying a magnetic force to the free end clamp and the fixed end clamp.

15. The method as claimed in claim 12 , wherein separating the protection film from the imprint film includes:
attaching the protection film and an adhesive roll to each other; and
elastically deforming the protection film and the imprint film.

16. The method as claimed in claim 15 , wherein:
the adhesive roll has a predetermined profile, and
elastically deforming the protection film and the imprint film includes:
providing the imprint film between the adhesive roll and a mold having a profile complementary to the profile of the adhesive roll; and
causing the adhesive roll and the mold to approach each other so that the adhesive roll and the mold are engaged with each other with the imprint film therebetween.

17. The method as claimed in claim 15 , wherein:
attaching the protection film and the adhesive roll to each other includes attaching the adhesive roll to one end of the protection film, and
elastically deforming the protection film and the imprint film includes moving the attached adhesive roll from the one end of the protection film to the other end thereof.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kim Dong-Wook
• Lee Ju-Hyun
• Kim Byeong-Sang
• Park Kyung-Bin
• Sohn Ki-Ju
• Yu Ho

Classifications

• G03F1/64

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• G03F7/0002 Primary

  Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping · CPC title

• G03F7/70825 Primary

  Mounting of individual elements, e.g. mounts, holders or supports (workpiece or mask holders G03F7/707) · CPC title

• G03F7/70716

  Stages · CPC title