Piezoelectric actuator and liquid discharging head
US-2024334834-A1 · Oct 3, 2024 · US
US10940688B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10940688-B2 |
| Application number | US-201916560284-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 4, 2019 |
| Priority date | Dec 19, 2016 |
| Publication date | Mar 9, 2021 |
| Grant date | Mar 9, 2021 |
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An apparatus includes a reservoir and a printhead. The printhead includes a support structure including a deformable portion defining at least a top surface of a pumping chamber, a flow path extending from the reservoir to the pumping chamber to transfer fluid from the reservoir to the pumping chamber, and an actuator disposed on the deformable portion of the support structure. A trench is defined in a top surface of the actuator. Application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion of the support structure to eject a drop of fluid from the pumping chamber.
Opening claim text (preview).
What is claimed is: 1. A printhead comprising: a support structure comprising a deformable portion, an outer perimeter of the deformable portion defining an outer perimeter of a top surface of a pumping chamber; and an actuator disposed on the deformable portion of the support structure, wherein a trench is defined in a top surface of the actuator, the trench defining at least a portion of a loop offset inwardly from the outer perimeter of the deformable portion, wherein an entirety of the trench is within the outer perimeter of the deformable portion. 2. The printhead of claim 1 , wherein application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion to eject a drop of fluid from the pumping chamber. 3. The printhead of claim 1 , comprising multiple radial trenches each extending radially outward away from a central region of the top surface of the actuator. 4. The printhead of claim 3 , wherein each of the radial trenches is oriented perpendicular to the trench at a point where the radial trench meets the trench. 5. The printhead of claim 1 , wherein a distance between the trench and the outer perimeter of the deformable portion is greater than a distance between the trench and a central region of the top surface of the deformable portion. 6. The printhead of claim 1 , wherein a distance between the trench and the outer perimeter of the deformable portion is less than a distance between the trench and a central region of the top surface of the deformable portion. 7. The printhead of claim 1 , wherein the trench is a first trench, and further comprising a second trench defined in the top surface of the actuator, the second trench extending radially outward from the first trench. 8. The printhead of claim 7 , wherein a first end of the second trench is connected to the first trench and a second end of the second trench is connected to a third trench defined in the top surface of the actuator, wherein the third trench has a rounded shape. 9. The printhead of claim 1 , wherein a width of the trench is between 0.1 micrometers and 10 micrometers. 10. The printhead of claim 1 , wherein the trench extends through a thickness of the actuator from the top surface of the actuator to a top surface of the deformable portion of the support structure. 11. The printhead of claim 1 , wherein the trench is a first trench, and the loop is a first loop, and wherein a second trench is formed in the top surface of the actuator, the second trench defining at least a portion of a second loop separated from the first loop. 12. The printhead of claim 1 , wherein the trench is a first trench, and wherein a second trench is formed in the top surface of the actuator further, the first trench and the second trench extending radially outward away from a central region of the top surface of the actuator and being parallel to one another. 13. An apparatus comprising: a reservoir; and a printhead comprising a support structure comprising a deformable portion, an outer perimeter of the deformable portion defining an outer perimeter of a top surface of a pumping chamber, a flow path extending from the reservoir to the pumping chamber to transfer fluid from the reservoir to the pumping chamber, and an actuator disposed on the deformable portion of the support structure, wherein a trench is defined in a top surface of the actuator, the trench defining at least a portion of a loop offset inwardly from the outer perimeter of the deformable portion, wherein an entirety of the trench is within the outer perimeter of the deformable portion, wherein application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion of the support structure to eject a drop of fluid from the pumping chamber. 14. A printhead comprising: a support structure comprising a deformable portion, an outer perimeter of the deformable portion defining an outer perimeter of a top surface of a pumping chamber; and an actuator disposed on the deformable portion of the support structure, where the outer perimeter of the deformable portion is aligned with the outer perimeter of the pumping chamber, and wherein a trench is defined in a top surface of the actuator, wherein an entirety of the trench is within the outer perimeter of the deformable portion. 15. The printhead of claim 14 , wherein application of a voltage to the actuator causes the actuator to deform along the trench, thereby causing deformation of the deformable portion to eject a drop of fluid from the pumping chamber. 16. The printhead of claim 14 , wherein the trench extends radially outwardly away from a central region of the top surface of the actuator. 17. The printhead of claim 14 , comprising multiple radial trenches each extending radially outward away from a central region of the top surface of the actuator. 18. The printhead of claim 17 , wherein each of the radial trenches is oriented perpendicular to the trench at a point where the radial trench meets the trench. 19. The printhead of claim 14 , wherein a distance between the trench and the outer perimeter of the deformable portion is greater than a distance between the trench and a central region of the top surface of the deformable portion. 20. The printhead of claim 14 , wherein a distance between the trench and the outer perimeter of the deformable portion is less than a distance between the trench and a central region of the top surface of the deformable portion. 21. The printhead of claim 14 , wherein the trench defines at least a portion of a loop offset inwardly from a portion of the outer perimeter of the deformable portion. 22. The printhead of claim 14 , wherein the trench is a first trench, and further comprising a second trench defined in the top surface of the actuator, the second trench extending radially outward from the first trench. 23. The printhead of claim 22 , wherein a first end of the second trench is connected to the first trench and a second end of the second trench is connected to a third trench defined in the top surface of the actuator, wherein the third trench has a rounded shape. 24. The printhead of claim 14 , wherein a width of the trench is between 0.1 micrometers and 10 micrometers. 25. The printhead of claim 14 , wherein the trench extends through a thickness of the actuator from the top surface of the actuator to a top surface of the deformable portion of the support structure. 26. The printhead of claim 14 , wherein the trench overlaps with at least a portion of the outer perimeter of the deformable portion. 27. The printhead of claim 14 , wherein the trench is a first trench defining at least a portion of a first loop, and wherein a second trench is formed in the top surface of the actuator, the second trench defining at least a portion of a second loop separated from the first loop.
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