Multi-light beam energy delivery with rotating polygon for additive manufacturing

Patent metadata

Field	Value
Publication number	US-10940641-B2
Application number	US-201815960478-A
Country	US
Kind code	B2
Filing date	Apr 23, 2018
Priority date	May 26, 2017
Publication date	Mar 9, 2021
Grant date	Mar 9, 2021

Abstract

An additive manufacturing apparatus includes a platform, a dispenser to dispense a plurality of layers of feed material on a top surface of the platform, and an energy delivery system. The energy delivery system has one or more light sources configured to emit a first light beam and a second light beam, and one or more reflective members each having reflective facets to redirect the first light beam or the second light beam toward an uppermost layer of feed material to deliver energy to the uppermost layer. The one or more reflective members are each rotatable such that motion of each sequential facet of the reflective facets of each of the one or more reflective members sweeps the first light beam along a first path on the uppermost layer or sweeps the second light beam along a second path on the uppermost layer.

First claim

What is claimed is:

1. An additive manufacturing apparatus comprising:
a platform to support an object being fabricated;
a dispenser to dispense a plurality of layers of feed material on a top surface of the platform; and
an energy delivery system comprising
one or more light sources configured to emit a first light beam and a second light beam,
one or more polygon beam scanners each including a rotatable mirror to provide one or more rotatable mirrors, the one or more rotatable mirrors having a multiplicity of reflective facets to redirect the first light beam and the second light beam toward the platform to deliver energy to an uppermost layer of feed material, with each of the one or more rotatable mirrors having a plurality of reflective facets, the one or more rotatable mirrors being positioned and rotatable such that motion of the multiplicity of reflective facets causes a first spot of impingement of the first light beam on the uppermost layer to sweep along a first path on the uppermost layer and causes a second spot of impingement of the second light beam to sweep along a different second path on the uppermost layer, wherein the first path and the second path are linear and extend in a same scanning direction and are offset along the scanning direction such that and wherein the first path extends along a first portion of a width of the uppermost layer of feed material in the scanning direction and the second path extends along a different second portion of the width of the uppermost layer of feed material in the scanning direction.

2. The additive manufacturing apparatus of claim 1 , wherein the one or more rotatable mirrors comprises a common rotatable mirror to receive the first light beam and the second light beam, the one or more rotatable mirrors positioned and configured such that motion of each sequential facet of the plurality of reflective facets of the common rotatable mirror sweeps the first spot of impingement of the first light beam along the first path and sweeps the second spot of impingement of the second light beam along the second path.

3. The apparatus of claim 2 , wherein the common rotatable mirror is positioned and configured such that the first light beam and the second light beam impinge a common facet of the plurality of facets.

4. The apparatus of claim 3 , wherein the common rotatable mirror is positioned and configured such the first light beam and the second light beam impinge the common facet at different angles of incidence.

5. The apparatus of claim 2 , wherein the common rotatable mirror is positioned and configured such the first light beam is received at a first reflective facet when the second light beam is received at a second reflective facet.

6. The apparatus of claim 1 , wherein the one or more polygon beam scanners comprise a first polygon beam scanner including a first rotatable mirror having a first plurality of reflective facets to receive the first light beam and a second polygon beam scanner including a second rotatable mirror having a second plurality of reflective facets to receive the second light beam, wherein the first rotatable mirror is rotatable such that motion of each sequential facet of the first plurality of reflective facets sweeps the first spot of impingement of the first light beam along the first path, and wherein the second rotatable mirror is rotatable such motion of each sequential facet of reflective facets of the second plurality of reflective facets sweeps the second spot of impingement of the second light beam along the second path.

7. The apparatus of claim 1 , wherein the first path and the second path are collinear.

8. The apparatus of claim 7 , wherein the first path and the second path are partially overlapping along the scanning direction.

9. The apparatus of claim 8 , wherein the first path overlaps the second path by 5% to 15% of a length of the first path.

10. An additive manufacturing apparatus comprising:
a platform to support an object being fabricated;
a dispenser to dispense a plurality of layers of feed material on a top surface of the platform;
an energy delivery system comprising
one or more light sources configured to emit a first light beam and a second light beam, and
one or more polygon beam scanners each including a rotatable mirror to provide one or more rotatable mirrors, the one or more rotatable mirrors having a multiplicity of reflective facets to redirect the first light beam and the second light beam toward the platform to deliver energy to an uppermost layer of feed material, with each of the one or more rotatable mirrors having a plurality of reflective facets, the one or more rotatable mirrors being positioned and rotatable such that motion of the multiplicity of reflective facets causes a first spot of impingement of the first light beam on the uppermost layer to sweep along a first path on the uppermost layer and causes a second spot of impingement of the second light beam to sweep along a different second path on the uppermost layer, wherein the first path and the second path each extend along an entire width of the uppermost layer of feed material, and wherein the first path and the second path are offset from one another along a horizontal direction perpendicular to the first path and second path another by at least half of a length of the uppermost layer; and

a support movable relative to the platform along a horizontal axis that is at a non-zero angle relative to the first path and the second path, and wherein the one or more polygon beam scanners are mounted to the support such that motion of the support along the horizontal axis causes a sequence of sweeps along the first path by the first spot of impingement of first light beam to create a raster scan of the first spot of impingement of the first light beam across a first area on the uppermost layer and a sequence of sweeps along the second path by the second light beam to create a raster scan of the second spot of impingement of the second light beam across a second area on the uppermost layer.

11. The apparatus of any of claim 10 , wherein the first path and the second path are linear.

12. The apparatus of claim 1 , comprising a support movable relative to the platform along a horizontal axis that is at a non-zero angle relative to the first path and the second path, and wherein the one or more polygon beam scanners are mounted to the support such that motion of the support along the horizontal axis causes a sequence of sweeps along the first path by the first spot of impingement of the first light beam to create a raster scan of the first spot of impingement of the first light beam across a first area on the uppermost layer and a sequence of sweeps along the second path by the second light beam to create a raster scan of the second spot of impingement of the second light beam across a second area on the uppermost layer.

13. The apparatus of claim 12 , wherein the horizontal axis is perpendicular to the first path.

14. An additive manufacturing apparatus comprising:
a platform;
a dispenser to dispense a plurality of layers of feed material on a top surface of the platform; and
an energy delivery system comprising
one or more light sources configured to emit a first light beam and a second light beam, and
a reflective member having a multiplicity of reflective facets to redirect the first light beam and the second light beam toward an uppermost layer of feed material to deliver energy to the uppermost layer, the reflective member being rotatable such that motion of the multiplicity of facets sweeps a first spot of impingement of the first light beam along a first pa

Assignees

• Applied Materials Inc

Inventors

• Franklin Jeffrey L
• Ng Hou T
• Patibandla Nag B

Classifications

• B22F12/90

  Means for process control, e.g. cameras or sensors · CPC title

• B22F12/67

  Blades · CPC title

• B22F12/55

  Two or more means for feeding material · CPC title

• B22F12/45

  Two or more · CPC title

• B22F12/44

  characterised by the configuration of the radiation means · CPC title