Toroidal plasma channel with varying cross-section areas along the channel

Patent metadata

Field	Value
Publication number	US-10930474-B2
Application number	US-201715646017-A
Country	US
Kind code	B2
Filing date	Jul 10, 2017
Priority date	Nov 15, 2011
Publication date	Feb 23, 2021
Grant date	Feb 23, 2021

Abstract

An assembly for adjusting gas flow patterns and gas-plasma interactions including a toroidal plasma chamber. The toroidal plasma chamber has an injection member, an output member, a first side member and a second side member that are all connected. The first side member has a first inner cross-sectional area in at least a portion of the first side member and a second inner cross-sectional area in at least another portion of the first side member, where the first inner cross-sectional area and the second inner-cross-sectional area being different. The second side member has a third inner cross-sectional area in at least a portion of the second side member and a fourth inner cross-sectional area in at least another portion of the second side member, where the third inner cross-sectional area and the fourth inner-cross-sectional area being different.

First claim

What is claimed is:

1. A method for adjusting gas flow patterns and gas-plasma interactions, the method comprising:
providing a toroidal plasma chamber comprising an injection member, an output member, a first side member and a second side member, the first side member connecting a first end of the injection member and the output member, and the second side member connecting a second end of the injection member and the output member,
wherein the injection member, the output member, the first side member and the second side member form a toroidal plasma channel; and

injecting, via a first gas injector, a first gas into the first side member of the toroidal plasma chamber through the first end of the injection member, wherein the first side member has an inner cross-sectional area selected to substantially match a size of a plasma formed using the first gas; and
injecting, via a second gas injector, a second gas into the second side member of the toroidal plasma chamber through the second end of the injection member, wherein the second side member has an inner cross-sectional area selected to substantially match a size of a plasma formed using the second gas; and
forming a plasma within the toroidal plasma chamber based on a flow of gas caused by the injection of the first and second gases, wherein a plasma current circulates continuously in the toroidal plasma channel,
wherein the first gas and the second gas are different gases, and the inner cross-sectional area of the first side member is different from the inner cross-sectional area of the second side member.

2. The method of claim 1 wherein the first side member and the second side member have a complementary shape.

3. The method of claim 2 wherein the first side member and the second side member are parallel.

4. The method of claim 1 wherein both the first side member and the second side member are connected to the injection member and the output member with connectors that create a vacuum seal to prevent leakage of gas and plasma and an electric break.

5. The method of claim 4 further comprising fluid-cooling the connectors.

6. The method of claim 5 wherein the fluid is water.

7. The method of claim 1 wherein the first side member and the second side member are removable.

8. The method of claim 1 wherein forming a plasma within the toroidal plasma chamber further comprises:
exciting the first gas in the first side member of the toroidal plasma chamber; and
exciting the second gas in the second side member of the toroidal plasma chamber.

9. The method of claim 1 wherein the inner cross-sectional area of the first side member is selected based on one or more of a resistivity, an electron life time, and a plasma diffusion length of the plasma formed using the first gas.

10. The method of claim 1 wherein the inner cross-sectional area of the first side member is further selected based on one or more of a flow rate, a temperature, a pressure, and a chemical property of the first gas.

11. The method of claim 1 wherein the inner cross-sectional area of the second side member is selected based on one or more of a resistivity, an electron life time, and a plasma diffusion length of the plasma formed using the second gas.

12. The method of claim 1 wherein the inner cross-sectional area of the second side member is further selected based on one or more of a flow rate, a temperature, a pressure, and a chemical property of the second gas.

13. A method for adjusting gas flow patterns and gas-plasma interactions, the method comprising:
providing a toroidal plasma chamber comprising an injection member, an output member, a first side member and a second side member, the first side member connecting a first end of the injection member and the output member, and the second side member connecting a second end of the injection member and the output member,
wherein the injection member, the output member, the first side member and the second side member form a toroidal plasma channel; and

injecting, via a first gas injector, a first gas into the first side member of the toroidal plasma chamber through the first end of the injection member, wherein the first side member has an inner cross-sectional area selected to substantially match a size of a plasma formed using the first gas; and
injecting, via a second gas injector, a second gas into the second side member of the toroidal plasma chamber through the second end of the injection member, wherein the second side member has an inner cross-sectional area selected to substantially match a size of a plasma formed using the second gas;
forming a plasma within the toroidal plasma chamber based on a flow of gas caused by the injection of the first and second gases, wherein a plasma current circulates continuously in the toroidal plasma channel,
wherein the first gas and the second gas are different gases, and the inner cross-sectional area of the first side member is different from the inner cross-sectional area of the second side member; and

controlling the flow of gas caused by the injection of the first and second gases such that the plasma current flows substantially down a center of the toroidal plasma channel.

14. The method of claim 13 , wherein controlling the flow of gas prevents the plasma current from contacting the toroidal plasma channel.

15. The method of claim 13 , further comprising replacing the first side member with a third side member, wherein the inner cross-sectional area of the first side member is the same as an inner cross-sectional area of the third side member.

16. The method of claim 13 , further comprising replacing the first side member with a third side member, wherein the inner cross-sectional area of the first side member is different from an inner cross-sectional area of the third side member.

17. The method of claim 13 , further comprising replacing the second side member with a third side member, wherein the inner cross-sectional area of the second side member is the same as an inner cross-sectional area of the third side member.

18. The method of claim 13 , further comprising replacing the second side member with a third side member, wherein the inner cross-sectional area of the second side member is different from an inner cross-sectional area of the third side member.

19. The method of claim 13 , wherein the toroidal plasma chamber further comprises a first connector and a second connector, the first connector connecting the first side member and the first end of the injection member, and the second connector connecting the second side member and the second end of the injection member.

20. The method of claim 19 , wherein the first connector comprises first segments and the second connector comprises second segments, wherein the first segments and the second segments distribute an electric potential along the toroidal plasma channel.

Assignees

• Mks Instr Inc

Inventors

• Hu Chaolin
• Chen Xing

Classifications

• G21B1/17

  Vacuum chambers; Vacuum systems · CPC title

• H05H1/12

  wherein the containment vessel forms a closed or nearly closed loop {(G21B1/05 takes precedence)} · CPC title

• Y10T137/0318

  Processes · CPC title

• Y10T137/8376

  Combined · CPC title

• H01J37/321

  the radio frequency energy being inductively coupled to the plasma · CPC title