Extension of PVD chamber with multiple reaction gases, high bias power, and high power impulse source for deposition, implantation, and treatment

Patent metadata

Field	Value
Publication number	US-10927449-B2
Application number	US-201715857384-A
Country	US
Kind code	B2
Filing date	Dec 28, 2017
Priority date	Jan 25, 2017
Publication date	Feb 23, 2021
Grant date	Feb 23, 2021

Abstract

Embodiments of the present disclosure provide a sputtering chamber with in-situ ion implantation capability. In one embodiment, the sputtering chamber comprises a target, an RF and a DC power supplies coupled to the target, a support body comprising a flat substrate receiving surface, a bias power source coupled to the support body, a pulse controller coupled to the bias power source, wherein the pulse controller applies a pulse control signal to the bias power source such that the bias power is delivered either in a regular pulsed mode having a pulse duration of about 100-200 microseconds and a pulse repetition frequency of about 1-200 Hz, or a high frequency pulsed mode having a pulse duration of about 100-300 microseconds and a pulse repetition frequency of about 200 Hz to about 20 KHz, and an exhaust assembly having a concentric pumping port formed through a bottom of the processing chamber.

First claim

The invention claimed is:

1. A processing chamber for processing a substrate, comprising:
a target having a first surface disposed in a processing region of the processing chamber and a second surface that is opposite the first surface;
an RF power supply configured to generate a plasma, the RF power supply coupled to the target;
a DC power supply coupled to the target;
a substrate support comprising a support body, the support body having an electrode embedded therein, and a substrate receiving surface across an entire diameter of the substrate support, the DC power supply configured to energize ions from the target for forming a film layer on a surface of the substrate;
a bias power source coupled to the substrate support;
a pulse controller coupled to the bias power source, the pulse controller configured to apply a pulse control signal to the bias power source such that bias power is delivered either in a regular pulsed mode having a pulse duration of about 100 microseconds to about 200 microseconds and a pulse repetition frequency of about 1 Hz to about 200 Hz, and a high frequency pulsed mode having a pulse duration of about 100 microseconds to about 300 microseconds and a pulse repetition frequency of about 200 Hz to about 20 KHz, wherein the bias power source is configured to implant ions into the substrate;
a probe coupled to the electrode and bias power source, the probe configured collect data for estimating an ion dose rate, the bias power source electrically coupled between the probe and the pulse controller; and
an exhaust assembly having a concentric pumping port formed through a bottom of the processing chamber.

2. The processing chamber of claim 1 , further comprising:
a rotatable magnetron disposed adjacent to the second surface of the target.

3. The processing chamber of claim 1 , wherein the RF power supply and the DC power supply are configured to operate at a pulse duration of about 300 microseconds to about 800 microseconds and a pulse repetition frequency of about 1 Hz to about 200 Hz.

4. The processing chamber of claim 3 , wherein the RF power supply and the DC power supply are configured to operate at a duty cycle of 50% to 90%.

5. The processing chamber of claim 1 , wherein the RF power supply and the DC power supply are configured to operate at a pulse duration of about 100 microseconds to about 300 microseconds and a pulse repetition frequency of about 200 Hz to about 20 KHz.

6. The processing chamber of claim 5 , wherein the RF power supply and the DC power supply are configured to operate at a duty cycle of 1% to 10%.

7. The processing chamber of claim 1 , wherein the bias power source is configured to provide a negative bias voltage of about 1 kW to about 25 kW.

8. The processing chamber of claim 7 , wherein the bias power source is configured to operate in a regular pulsed mode running at a duty cycle of 1% to 10%.

9. The processing chamber of claim 7 , wherein the bias power source is configured to operate in a high frequency pulsed mode running at a duty cycle of 1% to 20%.

10. The processing chamber of claim 1 , wherein the support body is an electrostatic chuck, a ceramic body, a aluminum body, a heater, a chiller, or any combination thereof.

11. The processing chamber of claim 1 , wherein the substrate support is mounted cantilevered from a sidewall of the processing chamber.

12. A plasma processing chamber, comprising:
a sputtering target;
a rotating magnetron disposed adjacent to a surface of the sputtering target;
an RF power supply configured to generate a plasma, the RF power supply coupled to the sputtering target;
a DC power supply coupled to the sputtering target;
a support body configured to support a substrate, the support body comprising an electrode embedded therein, and a substrate receiving surface, wherein at least a portion immediately below the substrate receiving surface has a uniform thickness across a diameter of the substrate receiving surface, the DC power supply configured to energize ions from the sputtering target for forming a film layer on a surface of the substrate;
a bias power source coupled to the support body;
a pulse controller coupled to the bias power source, the pulse controller applying a pulse control signal to the bias power source such that bias power is delivered either in a regular pulsed mode having a pulse duration of about 100 microseconds to about 200 microseconds and a pulse repetition frequency of about 1 Hz to about 200 Hz, and a high frequency pulsed mode having a pulse duration of about 100 microseconds to about 300 microseconds and a pulse repetition frequency of about 200 Hz to about 20 KHz, wherein the bias power source is configured to implant ions into the substrate;
a probe coupled to the electrode and bias power source, the probe configured collect data for estimating an ion dose rate, the bias power source electrically coupled between the probe and the pulse controller;
a gas conduit disposed at a sidewall of the plasma processing chamber;
a shield coupled to the sidewall of the plasma processing chamber, wherein the shield extends downwardly to at least partially confine a portion of a processing region; and
an exhaust assembly having a pumping port formed through a bottom of the plasma processing chamber, wherein the pumping port is disposed symmetrically about a central axis passing through the center of the plasma processing chamber.

13. The plasma processing chamber of claim 12 , wherein the RF power supply and the DC power supply are configured to operate synchronized with the bias power source.

14. The plasma processing chamber of claim 12 , wherein the RF power supply and the DC power supply are configured to operate asynchronously from the bias power source.

15. The plasma processing chamber of claim 12 , wherein the RF power supply and the DC power supply are configured to operate at a duty cycle of 50% to 90%.

16. The plasma processing chamber of claim 12 , wherein the RF power supply and the DC power supply are configured to operate at a duty cycle of 1% to 10%.

17. The plasma processing chamber of claim 12 , wherein the bias power source is configured to provide a negative bias voltage of about 1 kW to about 25 kW.

Assignees

• Applied Materials Inc

Inventors

• Liu Jingjing
• Godet Ludovic
• Nemani Srinivas D
• Chen Yongmei
• Subramani Anantha K

Classifications

• H10P32/1204

  from a plasma phase · CPC title

• H10P30/204

  into Group IV semiconductors · CPC title

• H10P30/21

  of electrically active species · CPC title

• H01J37/3458

  Electromagnets in particular for cathodic sputtering apparatus (electromagnets in general H01F7/06) · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title