Load port module

Patent metadata

Field	Value
Publication number	US-10923375-B2
Application number	US-201916692359-A
Country	US
Kind code	B2
Filing date	Nov 22, 2019
Priority date	Nov 28, 2018
Publication date	Feb 16, 2021
Grant date	Feb 16, 2021

Abstract

A substrate loading device including a frame adapted to connect to a substrate processing apparatus, the frame having a transport opening through which substrates are transported to the processing apparatus, a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container, and the cassette support has a predetermined continuous steady state differential pressure plenum region, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the support between the predetermined access locations of the container and another predetermined section of the support isolating the other predetermined section from the predetermined access locations.

First claim

What is claimed is:

1. A substrate loading device comprising:
a frame adapted to connect the substrate loading device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the substrate loading device and processing apparatus;
a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the cassette support being configured so that a sealed internal atmosphere of the at least one substrate cassette container is accessed from the cassette support at predetermined access locations of the at least one substrate cassette container; and
the cassette support has a predetermined continuous steady state differential pressure plenum region disposed on the cassette support, determined at least in part by boundaries of fluid flow generating differential pressure, so that the predetermined continuous steady state differential pressure plenum region defines a continuously steady state fluidic flow isolation barrier disposed on the carrier support between the predetermined access locations of the at least one substrate cassette container and another predetermined section of the cassette support isolating the other predetermined section from the predetermined access locations.

2. The substrate loading device of claim 1 , wherein fluid edges of the fluid flow of the continuous steady state fluidic flow isolation barrier seal the other predetermined section from the predetermined access locations.

3. The substrate loading device of claim 1 , wherein fluid edges of the fluid flow of the continuous steady state fluidic flow isolation barrier seal the other predetermined section from escapement of venting gas from the sealed internal atmosphere of the at least one substrate cassette container at the predetermined access locations.

4. The substrate loading device of claim 1 , wherein the differential pressure is a positive pressure relative to atmosphere.

5. The substrate loading device of claim 1 , wherein the differential pressure is a positive pressure relative to a pressure of escapement gas from the sealed internal atmosphere of the at least one substrate cassette container at the predetermined access locations.

6. The substrate loading device of claim 1 , wherein the differential pressure is a negative pressure relative to atmosphere.

7. The substrate loading device of claim 1 , wherein the differential pressure is a negative pressure relative to pressure of an escapement gas from the sealed internal atmosphere of the at least one substrate cassette container at the predetermined access locations.

8. The substrate loading device of claim 1 , wherein the predetermined continuous steady state differential pressure plenum region is bounded at least on one side by a surface of the cassette support defining the predetermined continuous steady state differential pressure plenum region at least in part.

9. The substrate loading device of claim 8 , wherein the surface is a guide surface for the fluid flow generating the differential pressure of the predetermined continuous steady state differential pressure plenum region.

10. The substrate loading device of claim 1 , wherein the continuously steady state fluidic flow isolation barrier of the continuous steady state differential pressure plenum region is generated to provide a predetermined offset from the other predetermined section of the cassette support isolated by the continuously steady state fluidic flow isolation barrier, and the predetermined offset is set by the fluid flow generating the differential pressure of the continuous steady state differential pressure plenum region.

11. The substrate loading device of claim 1 , wherein the substrate loading device includes a controller that controls the predetermined continuous steady state differential pressure plenum region depending on a configuration of the at least one substrate cassette container.

12. A substrate loading device comprising:
a frame adapted to connect the device to a substrate processing apparatus, the frame having a transport opening through which substrates are transported between the device and processing apparatus;
a cassette support connected to the frame for holding at least one substrate cassette container proximate the transport opening, the support being configured so that a sealed internal atmosphere of the container is accessed from the support at predetermined access locations of the container; and
the cassette support has a predetermined continuous steady state fluid mass flow plenum region disposed on the support, determined at least in part by boundaries of fluid mass flow, so that the continuous steady state fluid mass flow plenum region defines a continuous steady state isolation barrier of fluid flow disposed on the support between the predetermined access locations of the container and another predetermined section of the cassette support isolating the other predetermined section from the predetermined access locations.

13. The substrate loading device of claim 12 , wherein fluid edges of the fluid flow of the continuous steady state isolation barrier of fluid flow seal the other predetermined section from the predetermined access locations.

14. The substrate loading device of claim 12 , wherein fluid edges of the fluid flow of the continuous steady state isolation barrier of fluid flow seal the other predetermined section from escapement of venting gas from the sealed internal atmosphere of the at least one substrate cassette container at the predetermined access locations.

15. The substrate loading device of claim 12 , wherein the differential pressure is a positive pressure relative to atmosphere.

16. The substrate loading device of claim 12 , wherein the fluid mass flow has a positive pressure relative to a pressure of escapement gas from the sealed internal atmosphere of the at least one substrate cassette container at the predetermined access locations.

17. The substrate loading device of claim 12 , wherein the fluid mass flow has a negative pressure relative to atmosphere.

18. The substrate loading device of claim 12 , wherein the fluid mass flow has a negative pressure relative to pressure of an escapement gas from the sealed internal atmosphere of the at least one substrate cassette container at the predetermined access locations.

19. The substrate loading device of claim 12 , wherein the predetermined continuous steady state fluid mass flow plenum region is bounded at least on one side by a surface of the cassette support defining the predetermined continuous steady state fluid mass flow plenum region at least in part.

20. The substrate loading device of claim 19 , wherein the surface is a guide surface for the fluid mass flow of the predetermined continuous steady state fluid mass flow plenum region.

21. The substrate loading device of claim 12 , wherein the continuously steady state isolation barrier of fluid flow of the continuous steady state fluid mass flow plenum region is generated to provide a predetermined offset from the other predetermined section of the cassette support isolated by the continuously steady state isolation barrier of fluid flow, and the predetermined offset is set by the fluid mass flow of the continuous steady state fluid mass flow plenum region.

22. The substrate loading device of claim 12 , wherein the substrate loading device includes a controller that controls the predetermined continuous steady

Assignees

• Brooks Automation Inc

Inventors

• Sunugatov Radik
• Carlson Robert
• Krolak Mike

Classifications

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/3406

  involving removal of lid, door or cover · CPC title

• H10P72/1926

  characterised by the presence of atmosphere modifying elements inside or attached to the closed carrier · CPC title

• H10P72/1918

  characterised by coupling elements, kinematic members, handles or elements to be externally gripped · CPC title

• H10P72/0606

  Position monitoring, e.g. misposition detection or presence detection · CPC title