Phosphor screen for MEMS image intensifiers

Patent metadata

Field	Value
Publication number	US-10923244-B2
Application number	US-201715827956-A
Country	US
Kind code	B2
Filing date	Nov 30, 2017
Priority date	Nov 30, 2017
Publication date	Feb 16, 2021
Grant date	Feb 16, 2021

Abstract

A phosphor screen for a Micro-Electro-Mechanical-Systems (MEMS) image intensifier includes a wafer structure, a lattice of interior walls, a thin film phosphor layer, and a reflective metal layer. The wafer structure has a naturally opaque top layer and an active area defined within the naturally opaque top layer. The lattice of interior walls is formed, within the active area, from the naturally opaque top layer. The thin film phosphor layer is disposed in the active area, between the lattice of interior walls. The reflective metal layer that is disposed atop the thin film phosphor layer. In at least some instances, the thin film phosphor layer is a non-particle phosphor layer.

First claim

What is claimed:

1. A phosphor screen for a microelectromechanical image intensifier, comprising:
a wafer structure with a naturally opaque top layer and an active area defined within the naturally opaque top layer;
a lattice of interior walls formed from the naturally opaque top layer to define a plurality of pixels within the active area;
a thin film phosphor layer that is disposed directly on a bottom of each pixel of the plurality of pixels, between the lattice of interior walls; and
a reflective metal layer that is disposed atop the thin film phosphor layer, wherein the phosphor screen is configured to receive a plurality of electrons from a component spaced apart from the phosphor screen and the interior walls extend above the reflective metal layer so that the interior walls can absorb or reflect one or more electrons, of the plurality of electrons, that backscatter in one of the plurality of pixels, thereby preventing the one or more electrons from traveling laterally into another pixel of the plurality of pixels,
wherein the thin film phosphor layer has a thickness in the range of approximately 200-300 nanometers,
wherein the thin film phosphor layer is annealed at a temperature in a range of 600° C. to 900° C.

2. The phosphor screen of claim 1 , wherein the thin film phosphor layer is a non-particle phosphor layer.

3. The phosphor screen of claim 1 , wherein the bottom of each pixel is a planar surface bounded by approximately vertical sidewalls.

4. The phosphor screen of claim 1 , wherein the wafer structure comprises:
a glass wafer; and
a silicon layer bonded to a top surface of the glass wafer, the silicon layer forming the naturally opaque top layer.

5. The phosphor screen of claim 4 , wherein the silicon layer is removed from the bottom of each pixel of the plurality of pixels.

6. The phosphor screen of claim 5 , wherein the plurality of pixels is provided in a regular, repeating pattern.

7. The phosphor screen of claim 1 , wherein the lattice of interior walls creates an open area ratio in the range of approximately 80-95%.

8. The phosphor screen of claim 1 , wherein the thin film phosphor layer defines a planar top surface and the reflective metal layer is deposited directly onto the planar top surface without an evaporation operation.

9. The phosphor screen of claim 1 , wherein the interior walls are uncoated interior walls.

10. A method of forming a phosphor screen for a microelectromechanical image intensifier, comprising:
creating a pattern of pixels by forming a lattice of interior walls in an active area of a naturally opaque top layer of a wafer;
growing a phosphor layer directly on a bottom of each pixel of the pattern of pixels;
annealing the phosphor layer; and
depositing a reflective metal over the phosphor layer, wherein the phosphor screen is configured to receive a plurality of electrons from a component spaced apart from the phosphor screen and the interior walls extend above the reflective metal layer so that the interior walls can absorb or reflect one or more electrons, of the plurality of electrons, that backscatter in one of the pattern of pixels, thereby preventing the one or more electrons from traveling laterally into another pixel of the pattern of pixels,
wherein the phosphor layer has a thickness in the range of approximately 200-300 nanometers,
wherein the phosphor layer is annealed at a temperature in a range of 600° C. to 900° C.

11. The method of claim 10 , wherein the phosphor layer is a non-particle phosphor layer.

12. The method of claim 10 , wherein the naturally opaque top layer is a silicon layer.

13. The method of claim 12 , wherein creating the pattern of pixels further comprises:
etching the silicon layer to remove material from the silicon layer and define the lattice of interior walls.

14. The method of claim 10 , further comprising:
depositing the phosphor layer atop the lattice of interior walls.

15. The method of claim 10 , wherein depositing the reflective metal layer further comprises:
depositing the reflective metal layer directly onto a planar top surface of the phosphor layer without an evaporation operation.

16. The method of claim 10 , wherein the interior walls are uncoated walls.

17. A phosphor screen for a microelectromechanical image intensifier, comprising:
a wafer structure with an active area;
a lattice of depressions formed in a naturally opaque top layer of the wafer within the active area so that the naturally opaque layer defines a plurality of pixels, wherein each depression in the lattice of depressions includes a bottom and a plurality of side walls;
a non-particle phosphor layer that is disposed directly on the bottom of each of the depressions; and
a reflective metal layer that is disposed atop the phosphor layer, wherein the phosphor screen is configured to receive a plurality of electrons from a component spaced apart from the phosphor screen and the plurality of side walls extend above the reflective metal layer so that the plurality of side walls can absorb or reflect one or more electrons, of the plurality of electrons, that backscatter in one of the plurality of pixels, thereby preventing the one or more electrons from traveling laterally into another pixel of the plurality of pixels,
wherein the non-particle phosphor layer has a thickness in the range of approximately 200-300 nanometers,
wherein the non-particle phosphor layer is annealed at a temperature in a range of 600° C. to 900° C.

18. The phosphor screen of claim 17 , wherein the non-particle phosphor layer is deposited onto the plurality of side walls of each depression.

19. The phosphor screen of claim 17 , wherein the side walls are uncoated walls.

Assignees

• Elbit Systems America Llc

Inventors

• Smith Arlynn W
• Chilcott Dan

Classifications

• G21K4/00 Primary

  Conversion screens for the conversion of the spatial distribution of X-rays or particle radiation into visible images, e.g. fluoroscopic screens (photographic processes using X-ray intensifiers G03C5/17; discharge tubes comprising luminescent screens H01J1/62; cathode ray tubes for X-ray conversion with optical output H01J31/50) · CPC title

• G02B23/12

  with means for image conversion or intensification · CPC title

• H01J31/50

  Image-conversion or image-amplification tubes, i.e. having optical, X-ray, or analogous input, and optical output · CPC title

• C23C16/04

  Coating on selected surface areas, e.g. using masks · CPC title

• H01J2231/5016

  Michrochannel plates [MCP] · CPC title