Determining the arrangement of a sample object by means of angle-selective illumination

Patent metadata

Field	Value
Publication number	US-10921573-B2
Application number	US-201716465016-A
Country	US
Kind code	B2
Filing date	Oct 20, 2017
Priority date	Nov 30, 2016
Publication date	Feb 16, 2021
Grant date	Feb 16, 2021

Abstract

A method for determining an arrangement of a sample object in an optical device comprises illuminating the sample object from at least one first illumination direction and illuminating the sample object from at least one second illumination direction. The method also comprises carrying out a correlation between data which are indicative of at least one section of an image of the sample object under illumination from the at least one first illumination direction and data which are indicative of at least one section of an image of the sample object under illumination from the at least one second illumination direction. The method also comprises determining the arrangement of the sample object in relation to a focal plane of the optical device based on the correlation.

First claim

The invention claimed is:

1. A method for determining an arrangement of a sample object in an optical device, comprising:
illuminating the sample object from at least one first illumination direction and capturing an image of the sample object under illumination from the at least one first illumination direction,
illuminating the sample object from at least one second illumination direction and capturing an image of the sample object under illumination from the at least one second illumination direction,
carrying out a correlation between data which are indicative of at least one section of the image of the sample object under illumination from the at least one first illumination direction and data which are indicative of at least one section of the image of the sample object under illumination from the at least one second illumination direction,
determining a distance between the image of the sample object under illumination from the at least one first illumination direction and the image of the sample object under illumination from the at least one second illumination direction, and
calculating the arrangement of the sample object in relation to a focal plane of the optical device based on the correlation and based on a first angle associated with the at least one first illumination direction and a second angle associated with the at least one second illumination direction.

2. The method of claim 1 ,
wherein said illuminating the sample object from the at least one first illumination direction and said illuminating the sample object from the at least one second illumination direction are carried out in parallel in time domain, and
wherein the correlation comprises an autocorrelation of data which are indicative of at least one section of an image of the sample object under joint illumination from the first illumination direction and the second illumination direction.

3. The method of claim 1 ,
wherein said illuminating the sample object from the at least one first illumination direction and said illuminating the sample object from the at least one second illumination direction are carried out sequentially in time domain, and
wherein the correlation comprises a cross-correlation between first data, which are indicative of at least one section of a first image of the sample object under illumination from the first illumination direction, and second data, which are indicative of at least one section of a second image of the sample object under illumination from the second illumination direction.

4. The method of claim 1 ,
wherein the sample object is illuminated in parallel in time domain with a first plurality of illumination directions,
wherein the first plurality of illumination directions is arranged in a first pattern and comprises the first illumination direction,
wherein the sample object is illuminated in parallel in time domain with a second plurality of illumination directions, wherein the second plurality of illumination directions is arranged in a second pattern and comprises the second illumination direction, and
wherein the first pattern is configured to be mapped onto the second pattern by a translation.

5. The method of claim 4 ,
wherein the first pattern has an extent perpendicular to a direction of the translation which has a magnitude at least double a magnitude of the extent of the first pattern parallel to the direction of the translation.

6. The method of claim 4 , further comprising:
determining the respective data which are indicative of at least one section of a corresponding image based on a combination of pixels of the corresponding image along a lateral direction perpendicular to the translation.

7. The method of claim 1 , furthermore comprising:
determining the data based on a contrast image of a corresponding image.

8. The method of claim 1 ,
wherein the correlation comprises a one-dimensional correlation along a connecting line between the at least one first illumination direction and the at least one second illumination direction.

9. The method of claim 1 , further comprising:
carrying out a long-term measurement by the optical device, wherein illuminating the sample object from the at least one first illumination direction and illuminating the sample object from the at least one second illumination direction, carrying out the correlation and determining the arrangement of the sample object are performed repeatedly as a navigator measurement embedded into the long-term measurement by frequency division multiplexing and/or time division multiplexing.

10. The method of claim 1 , further comprising:
determining whether a priori knowledge of the arrangement of the sample object in relation to the focal plane is present, and
selecting the at least one first illumination direction and the at least second illumination direction from a plurality of candidate illumination directions based on the determining whether a priori knowledge is present.

11. The method of claim 10 ,
wherein, if a priori knowledge is not present, the first illumination direction and the second illumination direction are selected at a first distance with respect to one another,
wherein, if a priori knowledge is present, the first illumination direction and the second illumination direction are selected at a second distance with respect to one another, and
wherein the first distance is less than the second distance.

12. The method of claim 10 ,
wherein the a priori knowledge is present in a context of a focus tracking application.

13. The method of claim 1 , further comprising:
driving a motorized sample holder by a control loop which takes account of the arrangement of the sample object in relation to the focal plane as a controlled variable, and
selecting the at least one first illumination direction and the at least one second illumination direction from a plurality of candidate illumination directions based on a control deviation of the control loop.

14. The method of claim 1 , further comprising:
determining an extent of the sample object perpendicular to the focal plane based on carrying out the correlation,
carrying out a layer-resolved measurement of a position of the sample object for a plurality of layers of the sample object by the optical device, and
determining the position and/or number of the layers based on the extent of the sample object perpendicular to the focal plane that has been determined.

15. The method of claim 1 , further comprising:
determining an extent of the sample object perpendicular to the focal plane based on the carrying out the correlation, and
driving a user interface of the optical device in order to limit a positioning range of a sample holder of the optical device to the extent that has been determined.

16. The method of claim 1 , further comprising:
determining an extent of the sample object perpendicular to the focal plane based on the carrying out the correlation,
determining an extent of the sample object parallel to the focal plane, and
determining a volume of the sample object to the extent of the sample object parallel and perpendicular to the focal plane.

17. The method of claim 1 , further comprising:
determining a width of a maximum of the correlation,
wherein the arrangement of the sample object in relation to the focal plane is determined based on the width of the maximum of the correlation.

18. The method of claim 1 , further comprising:
based on a priori knowledge of the position of the sample object in relation to the focal plane, defocusing the sam

Assignees

• Zeiss Carl Microscopy Gmbh

Inventors

• Stoppe Lars
• Ohrt Thomas
• Sticker Markus

Classifications

• G02B21/241 Primary

  Devices for focusing (focusing in general G02B7/28) · CPC title

• G01B11/14

  for measuring distance or clearance between spaced objects or spaced apertures (G01B11/26 takes precedence; rangefinders G01C3/00) · CPC title

• G01B11/0608 Primary

  Height gauges · CPC title

• G02B21/245

  using auxiliary sources, detectors · CPC title

• G02B21/367

  providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison · CPC title