Shower plate, semiconductor manufacturing apparatus, and method for manufacturing shower plate

Patent metadata

Field	Value
Publication number	US-10920318-B2
Application number	US-201615771525-A
Country	US
Kind code	B2
Filing date	Oct 27, 2016
Priority date	Oct 30, 2015
Publication date	Feb 16, 2021
Grant date	Feb 16, 2021

Abstract

A shower plate according to the present disclosure includes a ceramic sintered body, the ceramic sintered body comprising a first surface, a second surface facing the first surface, and a through hole positioned between the first surface and the second surface. An inner surface of the through hole includes a protruding crystal grain which protrudes more than an exposed part of a grain boundary phase existing between crystal grains. In addition, a semiconductor manufacturing apparatus according to the present disclosure includes the shower plate mentioned above.

First claim

What is claimed is:

1. A shower plate, comprising:
a ceramic sintered body comprising:
a first surface;
a second surface facing the first surface; and
a through hole positioned between the first surface and the second surface,

wherein
an inner surface of the through hole comprising a protruding crystal grain which protrudes more than an exposed part of a grain boundary phase existing between crystal grains, and
the inner surface of the through hole comprises an arithmetic average roughness in an axial direction of the through hole in a range from 0.3 μm to 0.6 μm.

2. The shower plate according to claim 1 , wherein
a flow passage is provided between the first surface and the second surface, and
the through hole is positioned between the first surface and the flow passage.

3. The shower plate according to claim 1 , wherein
a portion of the protruding crystal grain which is close to a center of the through hole has a larger diameter than that of a portion of the protruding crystal grain which portion corresponds to the exposed part.

4. The shower plate according to claim 1 , wherein
a part of a contour of the protruding crystal grain which part is close to a center of the through hole, is convexly curved.

5. The shower plate according to claim 1 , wherein
an average crystal grain diameter in a middle region of the inner surface of the through hole which middle region corresponds to a middle part in an axial direction of the through hole, is larger than an average crystal grain diameter in an opening region of the inner surface of the through hole which opening region corresponds to a part opened in the first surface and a middle region of the inner surface of the through hole.

6. A semiconductor manufacturing apparatus, comprising:
the shower plate according to claim 1 .

7. A method for manufacturing the shower plate according to claim 1 , comprising:
obtaining granules by granulating a slurry containing ceramic powder;
obtaining a first molded body by using the granules, the first molded body having an A surface which becomes the first surface, a B surface which faces the A surface and becomes the second surface, and a through hole formed between the A surface and the B surface; and
obtaining a ceramic sintered body by firing the first molded body,
the inner surface of the through hole being not mechanically machined after the firing.

8. A method for manufacturing the shower plate according to claim 2 , comprising:
obtaining granules by granulating a slurry containing ceramic powder;
obtaining a second molded body by using the granules, the second molded body having a C surface which becomes the first surface and a third molded body having a D surface which becomes the second surface;
forming a groove in a surface opposite to the C surface of the second molded body and forming a through hole between the groove and the C surface of the second molded body;
obtaining a bonded body by bonding the surface opposite to the C surface of the second molded body to a surface opposite to the D surface of the third molded body via a paste containing the ceramic powder as a main component;
obtaining a ceramic sintered body by firing the bonded body,
the inner surface of the through hole being not mechanically machined after the firing.

Assignees

• Kyocera Corp

Inventors

• Noguchi Yukio
• Kawase Yuuji
• Matsufuji Hiromasa
• Teramoto Kouji

Classifications

• H10P72/0421

  for drying etching · CPC title

• B28B11/12

  for removing parts of the articles by cutting · CPC title

• C04B2235/945

  Products containing grooves, cuts, recesses or protusions · CPC title

• C04B35/111

  Fine ceramics · CPC title

• C04B2235/5472

  Bimodal, multi-modal or multi-fraction · CPC title