Apparatus of reactive cathodic arc evaporator for plating lithium-compound thin film and method thereof

Patent metadata

Field	Value
Publication number	US-10916800-B2
Application number	US-201916241314-A
Country	US
Kind code	B2
Filing date	Jan 7, 2019
Priority date	Jan 7, 2019
Publication date	Feb 9, 2021
Grant date	Feb 9, 2021

Abstract

An apparatus is provided for plating a lithium (Li)-compound thin film. In the thin film, Li is obtained through thermal evaporation, and titanium (Ti) or other metal by using arc plasma. The elements converted into gas phase are co-deposited in a plasma environment with a reaction gas (oxygen) to be activated as excited atoms or molecules for reaction. In the end, all of the constituent elements are deposited on a substrate to form the Li-compound thin film. Thus, reaction efficiency is high with a fast deposition rate. The composition ratio of each element is independently determined to control its yield according to the requirement. Hence, the present invention greatly enhances the fabrication rate with lowered production cost for applications in the thin-film battery industries.

First claim

What is claimed is:

1. A method of plating said Li-compound thin film employing an apparatus of reactive cathodic arc evaporator for plating a lithium (Li)-compound thin film, the apparatus integrating thermal evaporation and arc plasma deposition, the apparatus comprising:
a deposition chamber comprising a first shutter, a placing plate, and a second shutter located within the deposition chamber; said first shutter corresponding to said placing plate; a substrate is placed on said placing plate; and chemical vapor deposition is processed in said deposition chamber to deposit a Li-compound thin film on said substrate;
a vacuum-system piping coupled to said deposition chamber to maintain a vacuum pressure required in said deposition chamber and gases and byproducts are discharged from said deposition chamber after deposition is finished;
an arc plasma source disposed in said deposition chamber corresponding to said substrate; and said arc plasma source has a metal target and is externally connected with a plasma power supply;
an evaporated-material source disposed in said deposition chamber corresponding to said second shutter; and said evaporated-material source contains a Li metallic material and is externally connected with an evaporation power supply;
a gas supply source coupled to said deposition chamber to convey gas into said deposition chamber required during production; and
a controller disposed outside said deposition chamber and coupled to said vacuum-system piping, said gas supply source, said evaporation power supply, and said plasma power supply to control production sequence and to adjust a vacuum pressure of said vacuum-system piping, a gas flow of said gas supply source, an evaporation source power of said evaporation power supply, and a plasma source power of said plasma power supply, the method comprising steps of:
(a) obtaining the apparatus;
(b) disposing said substrate on said placing plate;
(c) obtaining and disposing an amount of said Li metallic material in said evaporated-material source;
(d) conveying argon as a working gas in said deposition chamber through said gas supply source;
(e) using said plasma power supply in said deposition chamber to generate an arc with said arc plasma source at a cathode to process a plasma reaction and hereinafter continuingly maintain said deposition chamber in a stable status of a plasma environment thus obtained;
(f) using said evaporation power supply in said deposition chamber to convey a current to said evaporated-material source to process thermal evaporation to said Li metallic material;
(g) after obtaining a molten state of a Li metal in said evaporated-material source and keeping evaporating out a Li gas, using said gas supply source to convey and mix oxygen into said working gas to coordinately maintain said plasma reaction;
(h) under said stable status of said plasma environment, using said controller to adjust an amount of evaporated Li and an amount of said arc-evaporated metal target according to required compositions and ratios;
(i) in accordance with a yield of each reactant including Li, said metal target and oxygen is independently adjusted according to each corresponding required amount of reactant, transforming said each reactant into a gas-phase precursor to be excited and activated in said plasma environment of said deposition chamber to process chemical reaction and co-depositing all of said reactants on said substrate to finally obtain said Li-compound thin film; and
(j) disposing said Li-compound thin film in an annealing furnace to process annealing under an atmospheric environment to obtain said Li-compound thin film having a crystalline structure to be used as a cell electrode.

2. The method according to claim 1 , wherein the yield of Li is controlled by said controller through adjusting an evaporating rate of Li in said evaporated-material source.

3. The method according to claim 1 , wherein the yield of said metal target is controlled by said controller through adjusting a current intensity of said arc plasma source.

4. The method according to claim 1 , wherein oxygen is adjusted by said controller to be mixed with said working gas as a reaction gas at a determined ratio to maintain said plasma environment.

Assignees

• Iner Aec Executive Yuan

Inventors

• Jan Der-Jun
• Yu Yuh-Jenq
• Hsueh Tien-Hsiang
• Ko Tien-F

Classifications

• C23C14/082

  of alkaline earth metals · CPC title

• C23C14/54

  Controlling or regulating the coating process · CPC title

• C23C14/325

  Electric arc evaporation · CPC title

• H01M10/0525 Primary

  Rocking-chair batteries, i.e. batteries with lithium insertion or intercalation in both electrodes; Lithium-ion batteries · CPC title

• H01M4/0428

  Chemical vapour deposition · CPC title