Inspection jig provided with probe, substrate inspection device provided with same, and method for manufacturing inspection jig

Patent metadata

Field	Value
Publication number	US-10914758-B2
Application number	US-201716319827-A
Country	US
Kind code	B2
Filing date	Jul 20, 2017
Priority date	Jul 28, 2016
Publication date	Feb 9, 2021
Grant date	Feb 9, 2021

Abstract

This inspection jig is provided with: an inspection-side support member having a counter plate ( 51 ) provided with a facing surface (F) disposed to face the substrate; and an electrode-side support member ( 6 ) having supporting plates ( 61 - 63 ) disposed to face an electrode plate ( 9 ) located on the side opposite to the facing surface (F) of the counter plate ( 51 ) A probe supporting hole ( 23 ), into and by which the rear end portion of the probe (Pr) is inserted and supported, is provided in the supporting plates ( 61 - 63 ), and the probe supporting hole ( 23 ) is provided with a restricting surface which is formed along a supporting line (V) inclined at a certain angle (θ) with respect to a reference line (Z), and which restricts the rear end portion of the probe (Pr) from moving in the direction perpendicular to the inclined direction of the supporting line (V).

First claim

The invention claimed is:

1. An inspection jig that brings a probe into contact with an inspection point which is provided on a substrate which is an inspection object, the inspection jig comprising:
an inspection-side support member that includes a counter plate which is provided with an opposing surface disposed to face the substrate; and
an electrode-side support member which is formed by stacking a plurality of support plates, one of the plurality of support plates being disposed to face an electrode plate located on the side opposite to the opposing surface of the counter plate,
wherein a probe insertion hole into which a front tip portion of the probe is inserted is formed in the counter plate,
wherein a probe support hole which causes a rear tip portion of the probe to be inserted thereinto and supported thereby is formed in the electrode-side support member to correspond to the probe insertion hole of the counter plate, and
wherein the probe support hole includes a plurality of support holes respectively formed in the plurality of support plates and being continuous along a support line which is inclined by a predetermined angle with respect to a reference line in a direction perpendicular to the opposing surface of the counter plate, and a restricting surface is formed using inner circumferential surfaces of the plurality of support holes being continuous and restricts movement of the rear tip portion of the probe in a direction perpendicular to an inclination direction of the support line.

2. The inspection jig according to claim 1 , wherein the probe support hole is formed such that a sectional section in a direction perpendicular to the support line is a substantially perfect circular shape, and the restricting surface is formed by a circumferential surface that forms the probe support hole having the substantially perfect circular shape.

3. A method for manufacturing the inspection jig according to claim 1 , wherein the probe support hole is formed by applying a laser beam along the support line in a state in which the plurality of support plates have been stacked and located.

4. A substrate inspection device comprising:
the inspection jig according to claim 1 ; and
an inspection portion that is electrically connected to the rear tip portion of the probe and supplies an electrical signal to the rear tip portion of the probe to inspect the substrate.

5. A method for manufacturing the inspection jig according to claim 1 , wherein the method comprising:
forming the probe support hole by irradiating the plurality of support plates with a laser beam to perform laser beam processing.

6. The inspection jig according to claim 1 , wherein the probe support hole of the electrode-side support member is formed by the plurality of the support holes each having an elliptical section shape with a pair of parallel lines extending in the inclination direction of the support line, the restricting surface is formed by a plurality pair of parallel lines forming the plurality of support holes support hole being elliptical, and the probe support hole is formed by setting the centers of each of the plurality of support holes formed in the plurality of support plates to be slightly offset in a predetermined direction with respect to the reference line.

7. An inspection jig that brings a probe into contact with an inspection point which is provided on a substrate which is an inspection object, the inspection jig comprising:
an inspection-side support member that includes a counter plate which is provided with an opposing surface disposed to face the substrate; and
an electrode-side support member which is formed by stacking a plurality of support plates, one of the plurality of support plates being disposed to face an electrode plate located on the side opposite to the opposing surface of the counter plate,
wherein a probe insertion hole into which a front tip portion of the probe is inserted is formed in the counter plate,
wherein a probe support hole which causes a rear tip portion of the probe to be inserted thereinto and supported thereby is formed in the electrode-side support member to correspond to the probe insertion hole of the counter plate,
wherein the probe support hole includes a restricting surface that is formed along a support line which is inclined by a predetermined angle with respect to a reference line in a direction perpendicular to the opposing surface of the counter plate and restricts movement of the rear tip portion of the probe in a direction perpendicular to an inclination direction of the support line, and
wherein the probe support hole of the electrode-side support member is formed by a plurality of support holes each having an elliptical section shape with a pair of parallel lines extending in the inclination direction of the support line, the plurality of support holes are respectively formed in the plurality of support plates, the restricting surface is formed by a plurality pair of parallel lines forming the plurality of support holes being elliptical, and the probe support hole is formed by setting the centers of each of the plurality of support holes formed in the plurality of support plates to be slightly offset in a predetermined direction with respect to the reference line.

8. A substrate inspection device comprising:
the inspection jig according to claim 7 ; and
an inspection portion that is electrically connected to the rear tip portion of the probe and supplies an electrical signal to the rear tip portion of the probe to inspect the substrate.

9. A method for manufacturing the inspection jig according to claim 7 , wherein the method comprising:
forming the probe support hole by irradiating the plurality of support plates with a laser beam to perform laser beam processing.

Assignees

• Nidec Read Corp

Inventors

• Yamazaki Hidekazu
• Ota Norihiro

Classifications

• G01R31/26

  Testing of individual semiconductor devices (testing of photovoltaic devices H02S50/10; testing or measuring during manufacture or treatment {H10P74/00}) · CPC title

• G01R1/073

  Multiple probes · CPC title

• G01R31/2886

  Features relating to contacting the IC under test, e.g. probe heads; chucks (G01R31/2865 takes precedence, test connections, e.g. test sockets, or probes per se, G01R1/04 or G01R1/06) · CPC title

• G01R31/2601

  Apparatus or methods therefor (G01R31/2607, G01R31/2642 take precedence) · CPC title

• G01R1/07371 Primary

  using an intermediate card or back card with apertures through which the probes pass · CPC title