Arc evaporation source

Patent metadata

Field	Value
Publication number	US-10913997-B2
Application number	US-201515321227-A
Country	US
Kind code	B2
Filing date	Jul 3, 2015
Priority date	Jul 30, 2014
Publication date	Feb 9, 2021
Grant date	Feb 9, 2021

Abstract

Provided is an arc evaporation source capable of stably retaining an arc spot on the front end surface of a target and apparatus downsizing. An arc evaporation source includes a target to be melted and vaporized from its front end surface by arc discharge and at least one magnet disposed apart from a side surface of the target radially thereof. The magnet is disposed to form a magnetic field satisfying conditions a) and b) below, on the side surface, in a region of up to 10 mm from the front end surface axially of the target: a) an angle which magnetic lines of force forms with the side surface of the target is 45 degrees or less; and b) a component of the strength of the magnetic lines of force along the axial direction of the target is 200 G or more.

First claim

The invention claimed is:

1. An arc evaporation source, comprising:
a target to be melted and evaporated from a front end surface of the target by arc discharge; and
three or more magnets disposed at a position apart from a side surface of the target radially of the target, the side surface being continuous with a periphery of the front end surface of the target,
wherein the target has a cylindrical shape being defined by the front end surface, a back end surface, and the side surface which defines a length of the target, the front end surface and back end surface being separated by the side surface, which joins the front end surface and back end surface,
the front end surface of the target having a flat portion and having a circular cross-section when viewed along an axial direction to the target,
the length of the target being greater than a diameter of the front end surface,
each of the three or more magnets is disposed so as to form a magnetic field that satisfies conditions a) and b) below, on the side surface of the target, in a region of up to 10 mm from the front end surface of the target in an axial direction of the target, the axial direction being normal to the front end surface:
a) an angle which magnetic lines of force of the magnetic field forms with the side surface of the target is 45 degrees or less, the magnetic lines of force of the magnetic field extending outward in the radial direction of the target while approaching the front end surface of the target on the side surface of the target; and
b) a component of the strength of the magnetic lines of force along the axial direction of the target is 200 G or more,
wherein the three or more magnets are spaced at regular intervals around the center axis of the target having the circular cross-section in a circumferential direction of the target at an axial position that is apart from the front end surface backward of the target.

2. The arc evaporation source according to claim 1 , wherein the target contains carbon.

3. The arc evaporation source according to claim 1 , wherein the target contains tungsten carbide, tungsten, molybdenum or niobium.

4. The arc evaporation source according to claim 1 , wherein
each of the three or more magnets has magnetic poles of mutually different polarities, and
each of the three or more magnets is disposed so as to align the magnetic poles of mutually different polarities in the radial direction of the target.

5. The arc evaporation source according to claim 1 , wherein
each of the three or more magnets has magnetic poles of mutually different polarities, and
each of the three or more magnets is disposed so as to align the magnetic poles of mutually different polarities in the axial direction of the target.

6. The arc evaporation source according to claim 1 ,
wherein the component of the strength of the magnetic lines of force along the axial direction of the target is increased with increase in distance from the front end surface of the target in the axial direction of the target.

7. The arc evaporation source according to claim 1 ,
wherein each of the three or more magnets is a permanent magnet.

8. The arc evaporation source according to claim 7 ,
wherein the permanent magnet contains neodymium.

9. The arc evaporation source according to claim 1 ,
wherein each of the three or more magnets is disposed on a rear side of the front end surface of the target, in the axial direction of the target.

10. The arc evaporation source according to claim 1 , further comprising a shield plate arranged circumferentially around the side surface of the target and arranged between the front end surface of the target and the three or more magnets.

11. The arc evaporation source according to claim 1 ,
wherein the three or more magnets are each arranged at the same distance from the front end surface of the target in the axial direction.

12. An arc evaporation source, comprising:
a target to be melted and evaporated from a front end surface of the target by arc discharge; and
three or more magnets disposed at a position apart from a side surface of the target radially of the target, the side surface being continuous with a periphery of the front end surface of the target,
wherein the target has a cylindrical shape being defined by the front end surface, a back end surface, and the side surface which defines a length of the target, the front end surface and back end surface being separated by the side surface, which joins the front end surface and back end surface,
the front end surface of the target having a flat portion and having a circular cross-section when viewed along an axial direction to the target,
the length of the target being greater than a diameter of the front end surface,
each of the three or more magnets is disposed so as to form a magnetic field that satisfies conditions a) and b) below, on the side surface of the target, in a region of up to 10 mm from the front end surface of the target in an axial direction of the target, the axial direction being normal to the front end surface:
a) an angle which magnetic lines of force of the magnetic field forms with the side surface of the target is 45 degrees or less,
b) a component of the strength of the magnetic lines of force along the axial direction of the target is 500 G or more,
wherein the three or more magnets are spaced at regular intervals around the center axis of the target having the circular cross-section in a circumferential direction of the target at an axial position that is apart from the front end surface backward of the target.

13. An arc evaporation source, comprising:
a target to be melted and evaporated from a front end surface of the target by arc discharge; and
three or more magnets disposed at a position apart from a side surface of the target radially of the target, the side surface being continuous with a periphery of the front end surface of the target,
wherein the target has a cylindrical shape being defined by the front end surface, a back end surface, and the side surface which defines a length of the target, the front end surface and back end surface being separated by the side surface, which joins the front end surface and back end surface,
the front end surface of the target having a flat portion and having a circular cross-section when viewed along an axial direction to the target,
the length of the target being greater than a diameter of the front end surface,
each of the three or more magnets is disposed so as to form a magnetic field that satisfies conditions a) and b) below, on the side surface of the target, in a region of up to 10 mm from the front end surface of the target in an axial direction of the target, the axial direction being normal to the front end surface:
a) an angle which magnetic lines of force of the magnetic field forms with the side surface of the target is 45 degrees or less,
b) the magnetic field has a place at which the component of the strength of the magnetic lines of force along the axial direction of the target is 800 G or more,
wherein the three or more magnets are spaced at regular intervals around the center axis of the target having the circular cross-section in a circumferential direction of the target at an axial position that is apart from the front end surface backward of the target.

Assignees

• Kobe Steel Ltd

Inventors

• Kurokawa Yoshinori
• Hirota Satoshi
• Tanifuji Shinichi

Classifications

• C23C14/325 Primary

  Electric arc evaporation · CPC title

• H01J37/32055 Primary

  Arc discharge · CPC title

• H01J37/3266

  Magnetic control means · CPC title

• H01J37/32669

  Particular magnets or magnet arrangements for controlling the discharge · CPC title

• C23C14/32 Primary

  by explosion; by evaporation and subsequent ionisation of the vapours {, e.g. ion-plating}(C23C14/34 - C23C14/48 take precedence) · CPC title