Systems and methods for reducing power reflected towards a higher frequency RF generator during a period of a lower RF generator and for using a relationship to reduce reflected power

Patent metadata

Field	Value
Publication number	US-10911081-B2
Application number	US-201916669844-A
Country	US
Kind code	B2
Filing date	Oct 31, 2019
Priority date	May 9, 2013
Publication date	Feb 2, 2021
Grant date	Feb 2, 2021

Abstract

Systems and methods for reducing reflected towards a higher frequency radio frequency (RF) generator during a period of a lower frequency RF generator and for using a relationship to reduce reflected power are described. By tuning the higher frequency RF generator during the period of the lower frequency RF generator, precise control of the higher frequency RF generator is achieved for reducing power reflected towards the higher frequency RF generator. Moreover, by using the relationship to reduce the reflected power, time is saved during processing of a wafer.

First claim

The invention claimed is:

1. A controller comprising:
a processor configured to:
receive a plurality of measured input parameter values sensed between an output of a radio frequency (RF) generator and an input of an impedance matching network when the RF generator operates at a plurality of radio frequency values and the impedance matching network has a variable measurable factor;
initialize one or more computer models to have the variable measurable factor and the plurality of radio frequency values;
determine a plurality of output parameter values using the one or more computer models from the plurality of measured input parameter values when the one or more computer models have the variable measurable factor and the plurality of radio frequency values;
generate, using the plurality of output parameter values and the one or more computer models, a plurality of favorable radio frequency values, wherein for each of the plurality of favorable radio frequency values, a reflection coefficient at an input of the one or more computer models is minimum; and
control the RF generator to operate at the plurality of favorable radio frequency values to reduce power reflected towards the RF generator; and

a memory device coupled to the processor.

2. The controller of claim 1 , wherein the plurality of measured input parameter values are received from a sensor coupled to the output of the RF generator, wherein the output of the RF generator is coupled to the input of the impedance matching network via an RF cable.

3. The controller of claim 1 , wherein the one or more computer models include models generated by the processor, wherein the one or more computer models include a model of an RF cable, a model of the impedance matching network, and a model of an RF transmission line, wherein the RF cable is coupled between the output of the RF generator and the input of the impedance matching network, wherein the RF transmission line is coupled to an output of the impedance matching network.

4. The controller of claim 3 , wherein to determine the plurality of output parameter values, the processor is configured to forward propagate the plurality of measured input parameter values via the model of the RF cable to generate a first plurality of intermediate values at an output of the model of the RF cable, forward propagate the first plurality of intermediate values via the model of the impedance matching network to generate a second plurality of intermediate values at an output of the model of the impedance matching network, and forward propagate the second plurality of intermediate values via the model of the RF transmission line to generate the plurality of output parameter values.

5. The controller of claim 3 , wherein the reflection coefficient is minimum at an input of the model of the RF cable.

6. The controller of claim 1 , wherein the plurality of measured input parameter values include a plurality of impedance values.

7. The controller of claim 1 , wherein the variable measurable factor includes a capacitance of the impedance matching network.

8. The controller of claim 1 , wherein the one or more computer models are initialized to have the variable measurable factor when the one or more computer models have a combined capacitance of the impedance matching network.

9. A method comprising:
receiving a plurality of measured input parameter values sensed between an output of a radio frequency (RF) generator and an input of an impedance matching network when the RF generator operates at a plurality of radio frequency values and the impedance matching network has a variable measurable factor;
initializing one or more computer models to have the variable measurable factor and the plurality of radio frequency values;
determining a plurality of output parameter values using the one or more computer models from the plurality of measured input parameter values when the one or more computer models have the variable measurable factor and the plurality of radio frequency values;
generating, using the plurality of output parameter values and the one or more computer models, a plurality of favorable radio frequency values, wherein for each of the plurality of favorable radio frequency values, a reflection coefficient at an input of the one or more computer models is minimum; and
controlling the RF generator to operate at the plurality of favorable radio frequency values to reduce power reflected towards the RF generator.

10. The method of claim 9 , wherein the plurality of measured input parameter values are received from a sensor coupled to the output of the RF generator, wherein the output of the RF generator is coupled to the input of the impedance matching network via an RF cable.

11. The method of claim 9 , wherein the plurality of measured input parameter values include a plurality of impedance values.

12. The method of claim 9 , wherein the variable measurable factor includes a capacitance of the impedance matching network.

13. The method of claim 9 , wherein the one or more computer models include models generated by a processor, wherein the one or more computer models include a model of an RF cable, a model of the impedance matching network, and a model of an RF transmission line, wherein the RF cable is coupled between the output of the RF generator and the input of the impedance matching network, wherein the RF transmission line is coupled to an output of the impedance matching network.

14. The method of claim 13 , wherein the plurality of output parameter values are determined by forward propagating the plurality of measured input parameter values via the model of the RF cable to generate a first plurality of intermediate values at an output of the model of the RF cable, forward propagating the first plurality of intermediate values via the model of the impedance matching network to generate a second plurality of intermediate values at an output of the model of the impedance matching network, and forward propagating the second plurality of intermediate values via the model of the RF transmission line to generate the plurality of output parameter values.

15. The method of claim 13 , wherein the reflection coefficient is minimum at an input of the model of the RF cable.

16. The method of claim 9 , wherein the one or more computer models are initialized to have the variable measurable factor when the one or more computer models have a combined capacitance of the impedance matching network.

17. A plasma system comprising:
a radio frequency (RF) generator configured to operate at a plurality of radio frequency values to generate an RF signal;
an impedance matching network having an input coupled to an output of the RF generator via an RF cable, wherein the impedance matching network is configured to have a variable measurable factor;
a host computer coupled to the RF generator, wherein the host computer is configured to:
receive a plurality of measured input parameter values sensed between the output of the RF generator and the input of the impedance matching network;
initialize one or more computer models to have the variable measurable factor and the plurality of radio frequency values;
determine a plurality of output parameter values using the one or more computer models from the plurality of measured input parameter values when the one or more computer models have the variable measurable factor and the plurality of radio frequency values;
generate, using the plurality of output parameter values and the one or more computer models, a plurality of favorable radio frequency values, where

Assignees

• Lam Res Corp

Inventors

• Howald Arthur M
• Valcore Jr John C
• Fong Andrew
• Hopkins David

Classifications

• G06F30/36 Primary

  Circuit design at the analogue level · CPC title

• H05B6/50

  for monitoring or control · CPC title

• H04B1/0475 Primary

  with means for limiting noise, interference or distortion (H04B1/0483 takes precedence) · CPC title

• G05B17/02

  electric · CPC title

• H04B2001/0491

  with frequency synthesizers, frequency converters or modulators · CPC title