Radiation analysis apparatus

Patent metadata

Field	Value
Publication number	US-10908104-B2
Application number	US-201816041905-A
Country	US
Kind code	B2
Filing date	Jul 23, 2018
Priority date	Jul 25, 2017
Publication date	Feb 2, 2021
Grant date	Feb 2, 2021

Abstract

A radiation analysis apparatus includes an excitation source unit irradiating an object, for which the radiation analysis apparatus analyzes property or a structure, with a first radiation, a radiation detection unit including three or more radiation detectors that detect a second radiation generated from the object irradiated with the first radiation, a radiation focusing unit disposed between the object and the radiation detection unit, and focusing the second radiation, a position changing unit changing a relative positional relationship between the radiation focusing unit and the radiation detection unit, and a control unit controlling the position changing unit to change the positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information indicating a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

First claim

What is claimed is:

1. A radiation analysis apparatus that analyzes a property or a structure of an object, comprising:
an excitation source configured to irradiate the object with a first radiation;
a radiation detection unit including three or more radiation detectors configured to detect a second radiation generated from the object irradiated with the first radiation;
a radiation focusing unit disposed between the object and the radiation detection unit, and configured to focus the second radiation;
a position changing unit configured to manually or electrically change at least one of a position of the radiation detection unit with respect to the radiation focusing unit and a position of the radiation focusing unit with respect to the radiation detection unit to change a relative positional relationship between the radiation focusing unit and the radiation detection unit; and
a drive control unit configured to drive the position changing unit to change the relative positional relationship, based on first information which is stored in a storage unit and indicates an intensity distribution of the second radiation emitted from the radiation focusing unit and second information which indicates a distribution based on a detection count of the second radiation detected by each of the radiation detectors.

2. The radiation analysis apparatus according to claim 1 ,
wherein the first information is information indicating an intensity distribution of a focus of the radiation focusing unit.

3. The radiation analysis apparatus according to claim 1 ,
wherein the first information is information indicating an intensity distribution corrected by a user of the radiation analysis apparatus, the information indicates an intensity distribution of a focus of the radiation focusing unit.

4. The radiation analysis apparatus according to claim 1 ,
wherein the radiation focusing unit is a capillary.

5. The radiation analysis apparatus according to claim 1 ,
wherein the drive control unit calculates a count rate of the second radiation detected per unit time by each of the radiation detectors, and calculates, as the second information, a distribution of the count rate calculated for each radiation detector.

6. The radiation analysis apparatus according to claim 1 ,
wherein the drive control unit controls the position changing unit to change the relative positional relationship in a direction perpendicular to a surface on which the radiation detectors are arranged, based on a profile of a function representing the intensity distribution indicated by the first information and a profile of a function representing the distribution indicated by the second information.

7. The radiation analysis apparatus according to claim 1 ,
wherein the drive control unit controls the position changing unit to change the relative positional relationship in a direction along a surface on which the radiation detectors are arranged, based on a peak of the intensity distribution indicated by the first information and a peak of the distribution indicated by the second information.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Nakayama Satoshi
• Tanaka Keiichi
• Nagata Atsushi
• Chinone Kazuo

Classifications

• H01J37/023 Primary

  Means for mechanically adjusting components not otherwise provided for · CPC title

• G01T7/005

  calibration techniques (stabilization of spectrometer G01T1/40) · CPC title

• G01T1/1606

  with other specified detectors not provided for in the other subgroups of G01T1/16 · CPC title

• G01N2223/076

  X-ray fluorescence · CPC title

• G01N23/223

  by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence · CPC title