Vacuum pump

Patent metadata

Field	Value
Publication number	US-10907653-B2
Application number	US-201615774861-A
Country	US
Kind code	B2
Filing date	Oct 31, 2016
Priority date	Nov 16, 2015
Publication date	Feb 2, 2021
Grant date	Feb 2, 2021

Abstract

Provided is a vacuum pump that prevents the solidification of gas while being operated properly. The vacuum pump includes a rotor that is supported rotatably on a base, a stator that has a thread groove portion, and a heating structure that heats the stator. The heating structure has a spacer that insulates the stator from stator components other than the stator, and a cartridge heater that heats the stator. The distance between a rotor cylindrical portion and the stator at the inlet port side is set to be equal to or greater than the distance between the rotor cylindrical portion and the stator at the outlet port side.

First claim

What is claimed is:

1. A vacuum pump including: a base; a rotor that has a rotor cylindrical portion stored in the base and is supported rotatably on the base; a stator that has a substantially cylindrical shape and is disposed between the base and the rotor cylindrical portion; and a thread groove portion that is engraved on either an outer circumferential surface of the rotor cylindrical portion or an inner circumferential surface of the stator,
the vacuum pump comprising:
a motor for rotating the rotor;
a heat insulating means for insulating the stator from stator components other than the stator; and
a heater for heating the stator, wherein
a distance between the rotor cylindrical portion and the stator at an inlet port side is set to be equal to or greater than a distance between the rotor cylindrical portion and the stator at an outlet port side, and
the heater is arranged in the heat insulating means.

2. The vacuum pump according to claim 1 , wherein the heat insulating means includes a flange portion that comes into contact with the stator in a rotor axial direction and is provided in the base, and a spacer cylindrical portion that comes into contact with the base in a rotor axial direction and is provided in an inner circumferential rim of the flange portion, and the heat insulating means is a spacer for storing the heater in the flange portion.

3. The vacuum pump according to claim 2 , wherein the spacer inhibits the stator from deforming at least partially in a rotor radial direction when thermally expanded.

4. The vacuum pump according to claim 2 , wherein the spacer is a member having a linear expansion coefficient lower than that of the stator.

5. The vacuum pump according to claim 2 , wherein a distance from the heater to a contact portion between the stator and the flange portion is shorter than a distance from the heater to a contact portion between the base and the spacer cylindrical portion.

6. The vacuum pump according to claim 2 , wherein the spacer cylindrical portion allows positioning in a rotor axial direction and is formed so as to be capable of elastically deforming in a rotor radial direction.

7. The vacuum pump according to claim 2 , wherein the spacer is attached to the stator in a rotor radial direction with a spigot structure.

8. The vacuum pump according to claim 2 , wherein the spacer is attached to the base in a rotor radial direction with a spigot structure.

Assignees

• Edwards Japan Ltd

Inventors

• Sakaguchi Yoshiyuki

Classifications

• F04D19/046

  Combinations of two or more different types of pumps · CPC title

• F04D19/044

  Holweck-type pumps · CPC title

• F04D29/584

  cooling or heating the machine (F04D29/5846, F04D29/5853 take precedence) · CPC title

• F04D19/04 Primary

  specially adapted to the production of a high vacuum, e.g. molecular pumps · CPC title

• F04D19/042

  Turbomolecular vacuum pumps · CPC title