Multilayer structure and machine component having multilayer structure

Patent metadata

Field	Value
Publication number	US-10906270-B2
Application number	US-201716097945-A
Country	US
Kind code	B2
Filing date	Aug 23, 2017
Priority date	Aug 26, 2016
Publication date	Feb 2, 2021
Grant date	Feb 2, 2021

Abstract

A multilayer structure includes: a base material made of an iron-based metal material; a nitride layer that is provided on a surface of the base material through a nitriding treatment performed to the base material; an intermediate layer provided on a surface of the nitride layer; and a DLC layer provided on a surface of the intermediate layer. The intermediate layer is made of Si3N4, and the DLC layer has a thickness of 2 μm to 10 μm.

First claim

The invention claimed is:

1. A multilayer structure, comprising:
a base material made of a ferrous metal material;
a nitride layer that is provided on a surface of the base material through a nitriding treatment performed to the base material;
an intermediate layer provided on a surface of the nitride layer; and
a DLC layer provided on a surface of the intermediate layer, wherein
the intermediate layer is made of Si 3 N 4 and has a thickness of 0.5 micrometers (μm) to 2 μm,
the intermediate layer is harder than the DLC layer, and
the DLC layer has a thickness of 2 μm to 10 μm.

2. The multilayer structure according to claim 1 , wherein the nitride layer has hardness that is intermediate between the base material and the DLC layer, and is continuously increased from the base material toward the DLC layer.

3. The multilayer structure according to claim 2 , wherein the nitride layer has a thickness of 10 μm to 100 μm.

4. The multilayer structure according to claim 2 , wherein the nitride layer has a thickness of 25 μm to 80 μm.

5. The multilayer structure according to claim 2 , wherein a diffusion layer in which nitrogen is diffused in the base material is provided at an interface between the nitride layer and the base material.

6. The multiplayer structure according to claim 2 , wherein the intermediate layer includes stacked layers of a layer made of Si 3 N 4 and a layer made of SiC.

7. The multiplayer structure according to claim 2 , wherein the intermediate layer is harder than the nitride layer.

8. The multilayer structure according to claim 1 , wherein the nitride layer has a thickness of 10 μm to 100 μm.

9. The multilayer structure according to claim 1 , wherein the nitride layer has a thickness of 25 μm to 80 μm.

10. The multilayer structure according to claim 1 , wherein a diffusion layer in which nitrogen is diffused in the base material is provided at an interface between the nitride layer and the base material.

11. The multilayer structure according to claim 1 includes stacked layers of a layer made of Si 3 N 4 and a layer made of SiC.

12. The multilayer structure according to claim 1 , wherein the intermediate layer is harder than the nitride layer.

13. A rotary machine component comprising a multilayer structure, the multilayer structure comprising:
a base material made of a ferrous metal material;
a nitride layer that is provided on a surface of the base material through a nitriding treatment performed to the base material;
an intermediate layer provided on a surface of the nitride layer; and
a DLC layer provided on a surface of the intermediate layer, wherein
the intermediate layer is made of Si 3 N 4 and has a thickness of 0.5 μm to 2 μm,
the intermediate layer is harder than the DLC layer, and
the DLC layer has a thickness of 2 μm to 10 μm.

14. The rotary machine component according to claim 13 , wherein the rotary machine component is a component of a steam turbine or a compressor.

15. A rotary machine component comprising a multilayer structure, the multilayer structure comprising:
a base material made of a ferrous metal material;
a nitride layer that is provided on a surface of the base material through a nitriding treatment performed to the base material;
an intermediate layer provided on a surface of the nitride layer; and
a DLC layer provided on a surface of the intermediate layer, wherein
the intermediate layer is made of Si 3 N 4 and has a thickness of 0.5 μm to 2 μm,
the intermediate layer is harder than the DLC layer,
the DLC layer has a thickness of 2 μm to 10 μm, and
the nitride layer has hardness that is intermediate between the base material and the DLC layer and is continuously increased from the base material toward the DLC layer.

16. The rotary machine component according to claim 15 , wherein the rotary machine component is a component of a steam turbine or a compressor.

Assignees

• Mitsubishi Heavy Ind Compressor Corp

Inventors

• Konno Yuya
• Yasui Toyoaki
• Kawano Masaki

Classifications

• C23C8/38 Primary

  Treatment of ferrous surfaces · CPC title

• C23C8/80

  After-treatment · CPC title

• F01D5/28

  Selecting particular materials; {Particular measures relating thereto;} Measures against erosion or corrosion · CPC title

• F05D2300/224

  Carbon, e.g. graphite · CPC title

• F01D5/288

  Protective coatings for blades · CPC title