Detection device, imprint apparatus, planarization device, detection method, and article manufacturing method
US-2019371642-A1 · Dec 5, 2019 · US
US10906246B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10906246-B2 |
| Application number | US-201916354657-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 15, 2019 |
| Priority date | Sep 29, 2016 |
| Publication date | Feb 2, 2021 |
| Grant date | Feb 2, 2021 |
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An optical shaping apparatus includes a light modulation element having a plurality of pixels and configured to modulate light from a light source for each pixel, a controller configured to control the light modulation element based on each of a plurality of two-dimensional shape data obtained from three-dimensional shape data, and a moving member configured to move a cured portion cured by the modulation light among the photocurable resin in a direction separating from the light-transmissive portion. The controller controls the light modulation element so as to irradiate the modulation light of an irradiation light amount corresponding to a light amount necessary for curing for each resin area, onto each of a plurality of resin areas in the photocurable resin based on a temperature distribution or a temperature change in the photocurable resin.
Opening claim text (preview).
What is claimed is: 1. An optical shaping apparatus comprising: a container having a light-transmissive portion and configured to store a liquid photocurable resin; a light modulation element having a plurality of pixels and configured to modulate light from a light source for each pixel; an optical system configured to irradiate modulation light from the light modulation element onto the photocurable resin through the light-transmissive portion; a controller configured to control the light modulation element based on each of a plurality of two-dimensional shape data obtained from three-dimensional shape data; and a moving member configured to move a cured portion cured by the modulation light among the photocurable resin in a direction separating from the light-transmissive portion, wherein the controller controls the light modulation element so as to irradiate the modulation light of an irradiation light amount corresponding to a light amount necessary for curing for each resin area, onto each of a plurality of resin areas in the photocurable resin based on a temperature distribution or a temperature change in the photocurable resin. 2. The optical shaping apparatus according to claim 1 , wherein the controller controls the light modulation element so as to irradiate the modulation light of the irradiation light amount corresponding to the light amount necessary for curing, onto each of the plurality of resin areas for each irradiation of the modulation light based on each of the plurality of two-dimensional shape data. 3. The optical shaping apparatus according to claim 1 , wherein where a light amount necessary for curing for a first resin area is smaller than a light amount necessary for curing for a second resin area in the plurality of resin areas, the controller changes the light modulation element so that the irradiation light amount for the first resin area is smaller than the irradiation light amount for the second resin area. 4. The optical shaping apparatus according to claim 1 , wherein the controller controls an irradiation duty ratio of the pixel in the light modulation element based on the light amount necessary for curing. 5. The optical shaping apparatus according to claim 1 , further comprising a temperature detector configured to detect the temperature distribution or the temperature change in the photocurable resin. 6. The optical shaping apparatus according to claim 1 , wherein the controller sets the light amount necessary for curing for each resin area based on the three-dimensional shape data. 7. The optical shaping apparatus according to claim 6 , wherein the controller sets the light amount necessary for curing for each resin area based on irradiation schedule information of the modulation light for the plurality of resin areas based on the three-dimensional shape data. 8. The optical shaping apparatus according to claim 1 , wherein the controller sets the light amount necessary for curing for each resin area based on information on a shape of the cured portion formed by controlling the light modulation element based on three-dimensional shape data for calibrations. 9. A manufacturing method configured to manufacture a three-dimensional object, the manufacturing method comprising the steps of: storing a liquid photocurable resin in a container having a light-transmissive portion; irradiating modulation light from a light modulation element onto the photocurable resin through the light-transmissive portion by controlling the light modulation element based on each of two-dimensional shape data obtained from three-dimensional shape data, the light modulation element having a plurality of pixels and being configured to modulate light from a light source for each pixel; moving a cured portion cured by the modulation light among the photocurable resin in a direction separating from the light-transmissive portion; and controlling the light modulation element so as to irradiate the modulation light of an irradiation light amount corresponding to a light amount necessary for curing for each resin area, onto each of a plurality of resin areas in the photocurable resin based on a temperature distribution or a temperature change in the photocurable resin. 10. A non-transitory computer-readable storage medium storing an optically shaping program that enables a computer in an optical shaping apparatus to execute an optically shaping process, the optical shaping apparatus including a container having a light-transmissive portion and configured to store a liquid photocurable resin, a light modulation element having a plurality of pixels and configured to modulate light from a light source for each pixel, and an optical system configured to irradiate modulation light from the light modulation element onto the photocurable resin through the light-transmissive portion, the optically shaping process comprising the steps of: controlling the light modulation element based on each of a plurality of two-dimensional shape data obtained from three-dimensional shape data; moving a cured portion cured by the modulation light among the photocurable resin in a direction separating from the light-transmissive portion; and controlling the light modulation element so as to irradiate the modulation light of an irradiation light amount corresponding to a light amount necessary for curing for each resin area, onto each of a plurality of resin areas in the photocurable resin based on a temperature distribution or a temperature change in the photocurable resin.
characterised by the energy source therefor, e.g. by global irradiation combined with a mask · CPC title
Apparatus for additive manufacturing; Details thereof or accessories therefor · CPC title
for controlling or regulating additive manufacturing processes · CPC title
Post-treatment, e.g. curing, coating or polishing · CPC title
Arrangements for irradiation · CPC title
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