Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US10906158B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10906158-B2 |
| Application number | US-201916238327-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 2, 2019 |
| Priority date | Jan 2, 2019 |
| Publication date | Feb 2, 2021 |
| Grant date | Feb 2, 2021 |
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Disclosed herein is a system for indexing a workpiece. The system comprises a vacuum source and a fixture plate, fluidly coupled with the vacuum source. The system also comprises an indexing stop, coupled to the fixture plate and fluidly coupled with the vacuum source. The indexing stop is actuatable between an extended position and a retracted position relative to the fixture plate. The vacuum source is selectively operable to concurrently apply a suction force to a workpiece supported on the fixture plate to urge the workpiece against the fixture plate and to the indexing stop to actuate the indexing stop from the extended position to the retracted position.
Opening claim text (preview).
What is claimed is: 1. A system for indexing a workpiece, the system comprising: a vacuum source; a fixture plate, fluidly coupled with the vacuum source; and an indexing stop, coupled to the fixture plate and fluidly coupled with the vacuum source, wherein the indexing stop is actuatable between an extended position and a retracted position relative to the fixture plate; wherein the vacuum source is selectively operable to concurrently apply a suction force: to a workpiece supported on the fixture plate to urge the workpiece against the fixture plate; and to the indexing stop to actuate the indexing stop from the extended position to the retracted position. 2. The system according to claim 1 , wherein: the fixture plate comprises a bore; the indexing stop is translationally movable within the bore between the extended position and the retracted position; and the suction force is applied to the indexing stop via the bore. 3. The system according to claim 2 , further comprising an indexing assembly, positioned at least partially within the bore of the fixture plate, wherein the indexing assembly comprises: the indexing stop; a housing that defines an interior cavity within which the indexing stop is translationally movable; and a spring, within the interior cavity and biasing the indexing stop into the extended position. 4. The system according to claim 3 , wherein the housing comprises a through-port having a first end fluidly open to the interior cavity and a second end, opposite the first end, fluidly open to the vacuum source. 5. The system according to claim 4 , wherein: the indexing assembly further comprises a seal interposed between the indexing stop and the housing; and the seal forms a fluidic seal between the indexing stop and the housing as the indexing stop translationally moves within the interior cavity of the housing. 6. The system according to claim 2 , wherein: the fixture plate comprises a fluid conduit; the suction force is applied to the workpiece via the fluid conduit; and the bore and the fluid conduit are fluidly coupled together and to the vacuum source. 7. The system according to claim 1 , wherein: the fixture plate comprises a support surface; the workpiece is urged against the support surface when the vacuum source concurrently applies the suction force to the workpiece; in the extended position, the indexing stop protrudes from the support surface; and in the retracted position, the indexing stop does not protrude from the support surface. 8. The system according to claim 7 , wherein, in the retracted position, the indexing stop is flush with the support surface. 9. The system according to claim 7 , wherein, in the retracted position, the indexing stop is recessed relative to the support surface. 10. The system according to claim 1 , further comprising a base fluidly coupled with the vacuum source and supporting the fixture plate, wherein the vacuum source is further selectively operable to concurrently apply the suction force to the fixture plate to urge the fixture plate against the base. 11. The system according to claim 10 , wherein: the fixture plate comprises a fluid conduit integratably formed in the fixture plate; the base comprises a second fluid conduit, a third fluid conduit, and a fourth fluid conduit integratably formed in the base; the fluid conduit of the fixture plate is fluidly coupled with the third fluid conduit of the base and the suction force is concurrently applied to the workpiece via the fluid conduit of the fixture plate and the third fluid conduit of the base; the suction force is concurrently applied to the fixture plate via the second fluid conduit; the suction force is concurrently applied to the indexing stop via the fourth fluid conduit of the base; and the system further comprises a source fluid conduit fluidly interconnecting the second fluid conduit, the third fluid conduit, and the fourth fluid conduit of the base with the vacuum source. 12. The system according to claim 1 , further comprising a plurality of indexing stops spaced apart from each other about the fixture plate according to a predetermined workpiece indexing pattern, wherein the vacuum source is selectively operable to concurrently apply the suction force to the plurality of indexing stops to concurrently actuate the plurality of indexing stops from the extended position to the retracted position. 13. A fixture plate assembly for indexing a workpiece, the fixture plate assembly comprising: a fixture plate, fluidly coupleable with a vacuum source; and an indexing stop, coupled to the fixture plate and fluidly coupleable with the vacuum source, wherein the indexing stop is actuatable between an extended position and a retracted position relative to the fixture plate; wherein, when fluidly coupled with the vacuum source, selective operation of the vacuum source concurrently applies a suction force: to a workpiece supported on the fixture plate to urge the workpiece against the fixture plate; and to the indexing stop to actuate the indexing stop from the extended position to the retracted position. 14. The fixture plate assembly according to claim 13 , wherein: the fixture plate comprises a bore; the fixture plate assembly further comprises an indexing assembly, positioned at least partially within the bore of the fixture plate, wherein the indexing assembly comprises: the indexing stop; a housing, non-movably fixed relative to the fixture plate and defining an interior cavity within which the indexing stop is translationally movable between the extended position and the retracted position; and a spring, within the interior cavity and biasing the indexing stop into the extended position; and the suction force is applied to the indexing stop via the interior cavity of the housing and the bore of the fixture plate. 15. The fixture plate assembly according to claim 13 , wherein: the fixture plate comprises a support surface; the workpiece, when supported on the support surface, is urged against the support surface when the vacuum source concurrently applies the suction force to the workpiece; in the extended position, the indexing stop protrudes from the support surface; and in the retracted position, the indexing stop is flush with or recessed relative to the support surface. 16. The fixture plate assembly according to claim 13 , further comprising a plurality of indexing stops spaced apart from each other about the fixture plate according to a predetermined workpiece indexing pattern, wherein when fluidly coupled with the vacuum source, selective operation of the vacuum source concurrently applies the suction force to the plurality of indexing stops to concurrently actuate the plurality of indexing stops from the extended position to the retracted position. 17. A method of indexing a workpiece, the method comprising: locating a workpiece on a fixture plate and against an indexing stop coupled to the fixture plate and in an extended position relative to the fixture plate; and with the workpiece on the fixture plate against the indexing stop, concurrently applying a suction force to the workpiece, to urge the workpiece against the fixture plate, and to the indexing stop, to actuate the indexing stop from the extended position to a retracted position relative to the fixture plate. 18. The method according to claim 17 , wherein, in the retracted position, the indexing stop is flush with or recessed relative to a support surface of the fixture plate on which the workpie
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