System of forming debonding layer, method of forming debonding layer, system of manufacturing display device using debonding layer and method of manufacturing display device debonding layer

Patent metadata

Field	Value
Publication number	US-10903241-B2
Application number	US-201816031543-A
Country	US
Kind code	B2
Filing date	Jul 10, 2018
Priority date	Oct 24, 2017
Publication date	Jan 26, 2021
Grant date	Jan 26, 2021

Abstract

A system of forming a debonding layer includes a debonding layer forming device configured to form a coating layer by coating a graphene oxide layer on a support substrate. The debonding layer forming device is configured to form a debonding layer by heat-treating the coating layer. An optical measuring device is configured to classify the support substrate into a plurality of cell areas. The optical measuring device is configured to measure a thickness of at least one of the coating layer in at least one cell area of the plurality of cell areas.

First claim

What is claimed is:

1. A system of forming a debonding layer comprising:
a debonding layer forming device configured to form a coating layer by coating a graphene oxide layer on a support substrate and to form a debonding layer by heat-treating the coating layer; and
an optical measuring device configured to classify a region of the support substrate by differentiating distinct physical areas of the region into a plurality of cell areas based instructions stored in a memory and to measure a thickness of at least one of the coating layer or the debonding layer in at least one cell area of the plurality of cell areas.

2. The system of claim 1 , wherein the optical measuring device outputs a coordinate information of a defective cell of the plurality of cell areas based on a value measured by the optical measuring device that is out of a predetermined reference range.

3. The system of claim 2 , wherein the debonding layer forming device re-coats a re-coated graphene oxide layer on the support substrate of the defective cell area based on the coordinate information.

4. The system of claim 1 , wherein the optical measuring device comprises an ellipsometer for measuring a reflectance of the coating layer.

5. The system of claim 1 , wherein the optical measuring device comprises a spectrometer for measuring a transmittance of the debonding layer.

6. The system of claim 1 , wherein the optical measuring device irradiates a light having a wavelength in a range from about 400 nm to about 800 nm to the support substrate to measure the thickness of the at least one of the coating layer or the debonding layer.

7. The system of claim 1 , wherein the debonding layer forming device electrolytically treats a surface of the support substrate so that the surface of the support substrate is negatively charged, forms a first coating layer on the surface of the support substrate by using an electrostatic attraction force of a positively charged polymer electrolyte, and forms a second coating layer on the first coating layer by coating a negatively charged graphene oxide cm the first coating layer.

8. The system of claim 7 , wherein the debonding layer forming device repeats formation of the first coating layer or formation of the second coating layer one or more times.

9. A method of forming a debonding layer, the method comprising:
forming a coating layer by coating a graphene oxide layer on a support substrate;
forming a debonding layer by heat-treating the coating layer; and
classifying a region of the support substrate by differentiating distinct physial areas of the region into a plurality of cell areas based on instructions stored in a memory and measuring a thickness of at least one of the coating layer or the debonding layer in at least one cell area of the plurality of tell areas.

10. The method of claim 9 , wherein measuring of a thickness of at least one of the coating layer and the debonding layer comprises:
measuring a reflectance or a transmittance of each of the cell areas of the plurality of cell areas;
calculating a thickness of each of the cell areas of the plurality of cell areas based on the reflectance or transmittance;
comparing the thickness of each of the cell areas of the plurality of cell areas with a predetermined reference range; and
when there is a defective cell area in which the thickness is out of the predetermined reference range, determining a coordinate information of the defective cell area.

11. The method of claim 10 , further comprising re-coating a second graphene oxide layer on the support substrate of the defective cell area based on the coordinate information of the defective cell area.

12. The method of claim 9 , wherein a reflectance of the coating layer is measured by an ellipsometer.

13. The method of claim 9 , wherein a transmittance of the debonding layer is measured by a spectrometer.

14. The method of claim 9 , wherein light having a wavelength in a range from about 400 nm to about 800 nm is transmitted to the support substrate to measure a thickness of the support substrate.

15. The method of claim 9 , wherein forming the coating layer comprises:
electrolytically treating a surface of the support substrate so that the surface of the support substrate is negatively charged;
forming a fast coating layer on the surface of the support substrate by using an electrostatic attraction force of a positively charged polymer electrolyte, and
forming a second coating layer on the first coating layer by coating a negatively charged graphene oxide on the first coating layer.

16. The method of claim 15 , wherein the forming of the first coating layer or the forming of the second coating layer are repeated one or more times.

17. A method of manufacturing a display device, the method comprising:
forming a coating layer by coating a graphene oxide layer on a support substrate;
forming a debonding layer by heat-treating the coating layer;
classifying a region of the support substrate by differentiating distinct physical areas of the region into a plurality of cell areas based on instructions stored in a memory;
measuring a thickness of at least one of the coating layer or the debonding layer in at least one cell area of the plurality of cell areas;
forming a substrate on the debonding layer;
performing a TFT process on the substrate; and
separating the substrate and the support substrate by using the debonding layer.

18. The method of claim 17 , wherein coordinate information of a defective cell having a thickness that is out of a predetermined reference range is determined.

19. A method of manufacturing a display device, the method comprising:
forming a coating layer by coating a graphene oxide layer on a support substrate, wherein the coating layer is formed by electrolytically treating a surface of the support substrate so that the surface of the support substrate is negatively charged, forming a first coating layer on the surface of the support substrate by using an electrostatic attraction force of a positively charged polymer electrolyte, and forming a second coating layer on the first coating layer by coating a negatively charged graphene oxide on the first coating, layer;
forming a debonding layer by heat-treating the coating layer;
disposing a substrate on the debonding layer;
performing a TFT process on the substrate;
separating the support substrate and the debonding layer;
classifying the support substrate into a plurality of cell areas; and
measuring a thickness of one or more of the coating layer or the debonding layer for each cell area of the plurality of cell areas.

20. The method of claim 19 , wherein measuring of a thickness of one or more of the coating layer or the debonding layer comprises:
measuring a reflectance or a transmittance of each of the cell areas of the plurality of cell areas;
calculating a thickness of each of the cell areas of the plurality of cell areas based on the reflectance or transmittance;
comparing the thickness of each of the cell areas of the plurality of cell areas with a predetermined reference range; and
when there is a defective cell area in which the thickness is out of the predetermined reference range, determining a coordinate information of the defective cell area.

Assignees

• Samsung Display Co Ltd

Inventors

• Lee Minwoo
• Kang Byunghoon
• Shin Heekyun
• Moon Seungjun
• Cho Woojin

Classifications

• H10K71/40

  Thermal treatment, e.g. annealing in the presence of a solvent vapour · CPC title

• H10K59/873

  Encapsulations · CPC title

• H10K59/80

  Constructional details · CPC title

• H10D86/60

  wherein the TFTs are in active matrices · CPC title

• H10D86/0214 Primary

  using temporary substrates · CPC title