Spectral reflectometer

Patent metadata

Field	Value
Publication number	US-10900833-B2
Application number	US-201816202619-A
Country	US
Kind code	B2
Filing date	Nov 28, 2018
Priority date	Nov 29, 2017
Publication date	Jan 26, 2021
Grant date	Jan 26, 2021

Abstract

A spectral reflectometer includes a first substrate, a first light emitting element and a second light emitting element in which a height of a first light emitting portion which is the height from the first substrate to a first light emitting portion of the first light emitting element, which is installed on the first substrate and a height of a second light emitting portion which is the height from the first substrate to a second light emitting portion of the second light emitting element are different, and a light receiver that receives light, in which the second light emitting element having a high height of the second light emitting portion is installed at a position close to an optical axis of the light received by the light receiver from the first light emitting element having a low height of the first light emitting portion.

First claim

What is claimed is:

1. A spectral reflectometer comprising:
a substrate;
a plurality of light emitters that are installed on the substrate, each light emitter having a light emitting portion; and
a light receiver that receives light,
wherein the plurality of light emitters have different wavelength distributions, and
wherein the light emitting portion of a first one of the light emitters is further in height from the substrate than the light emitting portion of a second one of the light emitters, and the first one of the light emitters is installed at a position closer to an optical axis of the light received by the light receiver than the second one of the light emitters.

2. The spectral reflectometer according to claim 1 ,
wherein angles formed by light traveling from the light emitting portions to an object to be measured, which is on the optical axis of light received by the light receiver, are the same as each other.

3. The spectral reflectometer according to claim 2 ,
wherein an angle formed by light traveling from the light emitting portions to the object to be measured on the optical axis and the optical axis is 45 degrees.

4. The spectral reflectometer according to claim 2 ,
wherein an opening is provided between the light emitters and the object to be measured on the optical axis.

5. The spectral reflectometer according to claim 4 ,
wherein a light-transmissive filter entirely covers the opening.

6. The spectral reflectometer according to claim 5 ,
wherein the filter limits a wavelength of the light that may pass therethrough.

7. The spectral reflectometer according to claim 5 ,
wherein the filter is detachably installed.

8. The spectral reflectometer according to claim 1 ,
wherein a lens is provided at a position facing the light emitters.

9. The spectral reflectometer according to claim 1 ,
wherein the plurality of light emitters include a white light emitter, an ultraviolet light emitter, and a blue light emitter.

10. The spectral reflectometer according to claim 1 ,
wherein the light receiver includes a wavelength tunable Fabry-Perot etalon.

Assignees

• Seiko Epson Corp

Inventors

• Gomi Tsugio

Classifications

• G01N2021/4759

  Annular illumination · CPC title

• G01N2021/4757

  Geometry 0/45° or 45/0° · CPC title

• G01N2021/3181

  using LEDs · CPC title

• G01J3/0297

  Constructional arrangements for removing other types of optical noise or for performing calibration · CPC title

• G01N21/474

  Details of optical heads therefor, e.g. using optical fibres · CPC title