Helium management control system

Patent metadata

Field	Value
Publication number	US-10900699-B2
Application number	US-201816173623-A
Country	US
Kind code	B2
Filing date	Oct 29, 2018
Priority date	Mar 4, 2011
Publication date	Jan 26, 2021
Grant date	Jan 26, 2021

Abstract

A refrigerant management system controls the supply of refrigerant from two or more variable speed and fixed speed compressors to a plurality of cryogenic refrigerators. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators. The amount of refrigerant to supply is based on an aggregate demand for refrigerant from the plurality of cryogenic refrigerators and a refrigerant correction metric. An appropriate supply of refrigerant is distributed to each cryogenic refrigerator by adjusting the speed of the variable speed compressors or, alternatively, selectively turning the compressors on or off. The speed of the variable speed compressors is adjusted by determining an amount of refrigerant to supply to the plurality of cryogenic refrigerators. If the aggregate demand for refrigerant exceeds the capacity of the compressors, then the speed of a refrigerator within the plurality of refrigerators is adjusted.

First claim

What is claimed is:

1. In a cryogenic refrigeration system in which plural compressors, controlled by a controller, supply helium refrigerant at a supply pressure to plural cryogenic refrigerators, each comprising a reciprocating displacer, that expand the helium refrigerant to absorb heat to produce a cooling effect and that return the helium refrigerant to the plural compressors at a return pressure, a method for controlling supply of the helium refrigerant, the method comprising:
at the controller, receiving communication from the plural cryogenic refrigerators indicating demand for helium refrigerant;
determining an aggregated demand for the helium refrigerant for the plural cryogenic refrigerators;
sensing supply pressure from the plural compressors;
sensing return pressure to the plural compressors;
at the controller, calculating a helium refrigerant supply correction based on a difference between sensed supply pressure and sensed return pressure;
computing amount of helium refrigerant to supply to the plural cryogenic refrigerators based on the aggregated demand for the helium refrigerant corrected by the helium refrigerant supply correction; and
with the controller, controlling speed of at least one of the plural compressors that delivers helium refrigerant to the plural cryogenic refrigerators to deliver the computed amount of helium refrigerant.

2. The method of claim 1 , further comprising selectively turning the plural compressors on or off to deliver the computed amount of refrigerant.

3. The method of claim 1 , further comprising turning the plural compressors on or off to deliver the computed amount of helium refrigerant and selecting specific compressors to be turned on or off based on a history of turn on and offs of the plural compressors.

4. The method as claimed in claim 1 wherein the at least one of the plural compressors includes at least one fixed speed compressor and at least one variable speed compressor.

5. The method as claimed in claim 1 wherein the plural cryogenic refrigerators are included in cryopumps.

6. A cryogenic refrigeration system for controlling supply of helium refrigerant, the system comprising:
at least one compressor, the at least one compressor including a high pressure supply line and a low pressure return line, the at least one compressor supplying helium refrigerant;
a plurality of cryogenic refrigerators, each comprising a reciprocating displacer, coupled to the at least one compressor to receive helium refrigerant from the supply line and return helium refrigerant to the return lines;
a supply pressure sensor sensing supply pressure on the supply line;
a return pressure sensor sensing return pressure on the return line;
a system controller including:
a helium refrigerant management system that receives communications from the plurality of cryogenic refrigerators, indicating demand for helium refrigerant and that determines an aggregated demand for the helium refrigerant for the plural cryogenic refrigerators; and
a helium refrigerant supply correction controller that calculates a helium refrigerant supply correction based on a difference between sensed supply pressure and sensed return pressure and that computes amount of helium refrigerant to supply to the cryogenic refrigerators, based on the aggregated demand for the helium refrigerant corrected by the helium refrigerant supply correction; and
a compressor controller that controls speed of the at least one compressor that delivers helium refrigerant to the plural cryogenic refrigerators to deliver the computed amount of helium refrigerant.

7. The cryogenic refrigeration system as claimed in claim 6 wherein the compressor controller turns the at least one compressor on or off to deliver the computed amount of helium refrigerant.

8. The cryogenic refrigeration system as claimed in claim 6 wherein the compressor controller turns variable speed compressors of the at least one compressor on or off to deliver the computed amount of helium refrigerant and selects specific variable speed compressors of the at least one compressor to be turned on or off based on a history of turn on and offs of the variable speed compressors of the at least one compressor.

9. The cryogenic refrigeration system as claimed in claim 6 wherein the cryogenic refrigerators are associated with respective cryopumps.

10. The system as claimed in claim 6 wherein the compressor controller switches to a dual variable speed compressor operational state by turning one of two variable speed compressors of the at least one compressor on if a calculated amount of helium refrigerant to supply to plural cryogenic refrigerators is greater than a threshold helium refrigerant output of a single compressor of the at least one compressor for a period of time.

11. A method for controlling supply of a refrigerant, the method comprising:
at a controller, obtaining an aggregated demand for a helium refrigerant based on communications from plural cryogenic refrigerators, each comprising a reciprocating displacer; and
with the controller, controlling speed of a compressor of a plurality of compressors that deliver gas refrigerant to the plural cryogenic refrigerators, based on the aggregated demand for the refrigerant corrected by a refrigerant correction metric calculated based on supply and return refrigerant pressure; and
turning a subset of the plurality of compressors on or off based on the aggregated demand for the refrigerant corrected by the refrigerant correction metric.

12. The method as claimed in claim 11 wherein the plurality of compressors includes at least one fixed speed compressor and at least one variable speed compressor.

13. The method as claimed in claim 11 wherein the cryogenic refrigerators are included in cryopumps.

14. A refrigeration system for controlling supply of a refrigerant, the system comprising:
a compressor of a plurality of compressors, the compressor of the plurality of compressors including a high pressure supply line and a low pressure return line, the compressor of the plurality of compressors configured to supply a helium refrigerant;
a plurality of cryogenic refrigerators, each comprising a reciprocating displacer, coupled to the compressor of the plurality of compressors to receive helium refrigerant from the supply line and return helium refrigerant to the return lines; and
an electronic controller configured to obtain an aggregated demand for the helium refrigerant based on communications from the plurality of cryogenic refrigerators, the electronic controller further configured to control speed of the compressor of the plurality of compressors based on the aggregated demand for the refrigerant corrected by a refrigerant correction metric, the correction metric determined based on a supply pressure feedback loop from the high pressure supply line and a return pressure feedback loop from the low pressure return line, the electronic controller being configured to turn a subset of the plurality of compressors that supply the helium refrigerant to the refrigerators on or off based on the aggregated demand for the refrigerant corrected by the refrigerant correction metric.

15. The refrigeration system as claimed in claim 14 wherein the plurality of compressors comprise a plurality of variable speed compressors.

16. The refrigeration system as claimed in claim 14 wherein the plurality of compressors comprise at least one variable speed compressor and at least one fixed speed compressor.

17. The refrigeration system as claimed in claim 14 wherein the cryogenic refrig

Assignees

• Edwards Vacuum Llc

Inventors

• Dumas Oliver J
• Buonpane Maureen C
• Ball-Difazio Doreen J
• Morris Ronald N
• Bartlett Allen J
• Loranger Leonard A
• Chopy Jr Joseph
• Sullivan Robert P
• Varone John J
• Amundsen Paul E

Classifications

• F25J1/0276 Primary

  Laboratory or other miniature devices · CPC title

• F25B49/022 Primary

  Compressor control arrangements · CPC title

• F25B2700/1931

  Discharge pressures · CPC title

• F25J1/0065

  Helium · CPC title

• F25J1/0294

  Multiple compressor casings/strings in parallel, e.g. split arrangement · CPC title