Maintenance mode power supply system

Patent metadata

Field	Value
Publication number	US-10896808-B2
Application number	US-201816045644-A
Country	US
Kind code	B2
Filing date	Jul 25, 2018
Priority date	Jul 25, 2018
Publication date	Jan 19, 2021
Grant date	Jan 19, 2021

Abstract

A dual mode power device for controlling voltage level to a plasma processing apparatus is disclosed. The dual mode power device comprises a power supply connector and a control circuit. The power supply connector is connected to a first voltage power supply or a second voltage power supply. The control circuit is connected between an output of the power supply connector and a first and second voltage subsystem of the plasma processing apparatus. The control circuit provides a first voltage based on the first voltage power supply to the first voltage subsystem in a first mode of operation of the plasma processing apparatus. The control circuit provides a second voltage based on the second voltage power supply to the second voltage subsystem in a second mode of operation of the plasma processing apparatus.

First claim

What is claimed is:

1. A dual mode power device comprising:
a power supply connector configured to be coupled with one of a first voltage power supply or a second voltage power supply; and
a control circuit coupled between an output of the power supply connector and a first and second voltage subsystem of a plasma processing apparatus, the control circuit configured to:
provide a first voltage based on the first voltage power supply to the first voltage subsystem in a first mode of operation of the plasma processing apparatus in response to the power supply connector being connected to the first voltage supply, and
provide a second voltage based on the second voltage power supply to the second voltage subsystem in a second mode of operation of the plasma processing apparatus in response to the power supply connector being connected to the second voltage power supply.

2. The dual mode power device of claim 1 , wherein the first mode of operation includes an operating mode of the plasma processing apparatus using the first voltage, wherein the second mode of operation includes a maintenance mode of the plasma processing apparatus using the second voltage.

3. The dual mode power device of claim 2 , wherein the operating mode is configured for processing a water disposed in a chamber of the plasma processing apparatus, wherein the maintenance mode is configured for testing or calibrating components of the plasma processing apparatus.

4. The dual mode power device of claim 2 , wherein the control 114 is configured to:
detect the first voltage in response to the power supply connector being connected to the first voltage supply,
provide the first voltage to the first voltage subsystem in the operating mode,
convert the first voltage to the second voltage, and
provide the second voltage to the second voltage subsystem in the maintenance mode.

5. The dual mode power device of claim 1 , wherein the power supply connector includes a single input connector configured to receive one of the first voltage power supply or the second voltage power supply.

6. The dual mode power device of claim 2 , wherein the control circuit further comprises:
a first electrical circuit connected between the output of the power supply connector and an input of the first voltage subsystem; and
a second electrical circuit connected between the output of the power supply connector and an input of the second voltage subsystem.

7. The dual mode power device of claim 6 , wherein the second electrical circuit comprises:
a fuse configured to break the second electrical circuit in response to detecting, on the second electrical circuit, the first voltage generated by the first voltage power supply;
a primary surge prevention circuit coupled to the fuse, the primary surge prevention circuit configured to be disabled in the first mode of operation, and to be enabled in the second mode of operation;
a secondary surge prevention circuit coupled to the primary surge prevention circuit;
an inrush protection circuit coupled to the primary and secondary surge prevention circuits, the inrush protection circuit configured to limit a current from the primary and secondary surge prevention circuit;
a Direct Current (DC) to DC converter coupled to the fuse, the DC to DC converter configured to convert the first voltage to the second voltage;

a first mode circuit coupled to the primary surge prevention circuit, the first mode circuit configured to disable the primary surge prevention circuit in response to detecting the first voltage generated by the first voltage power supply; and
a diode-based switch circuit coupled to the inrush protection circuit and the DC to DC converter, the diode-based switch circuit configured to select between an output of the inrush protection circuit and an output of the DC to DC converter.

8. The dual mode power device of claim 7 , wherein the fuse is configured to disable power to the second electrical circuit.

9. The dual mode power device of claim 7 , wherein the DC to DC converter is powered by the first voltage power supply in the first mode of operation.

10. The dual mode power device of claim 7 , wherein the primary surge prevention circuit includes at least one of a bootstrap current-based surge suppressor with automatic restart, a bootstrap current-based surge suppressor without automatic restart, a plurality of floating gates, a depletion mode pass element with ground reference control circuit, a depletion mode pass element, or a mechanical relay.

11. The dual mode power device of claim 7 , wherein the secondary surge prevention circuit includes at least one of a clamp circuit, a shunt voltage regulator, or a shunt transistor switch.

12. The dual mode power device of claim 7 , wherein an output of the DC to DC converter is used to disable the primary surge prevention circuit or the inrush protection circuit.

13. The dual mode power device of claim 7 , wherein an output of the secondary surge prevention circuit is used to disable the primary surge prevention circuit or the inrush protection circuit.

14. The dual mode power device of claim 7 , wherein an input voltage at the fuse is used to turn off the primary surge prevention circuit in response to the input voltage corresponding to the first voltage of the first voltage power supply.

15. The dual mode power device of claim 6 , further comprising:
a radio frequency (RF) filter disposed between the output of the power supply connector and the control circuit, the RF frequency filter configured to filter signals from the first voltage power supply; and
a switch coupled to the first voltage power supply and the second voltage power supply, the switch being configured to connect the first voltage power supply to the control circuit in the first mode of operation, and the second voltage power supply to the control circuit in the second mode of operation.

16. The dual mode power device of claim 1 , wherein the first voltage is more than 300 Volts, wherein the second voltage is less than 15 Volts.

17. A dual mode power source system comprising:
a first voltage power supply for generating a first voltage for powering a first voltage subsystem of a plasma processing apparatus, the first voltage subsystem being configured to operate based on the first voltage in a first mode of operation of the plasma processing apparatus;
a second voltage power supply for generating a second voltage for powering a second voltage subsystem of the plasma processing apparatus, the second voltage subsystem being configured to operate based on the second voltage in a second mode of operation of the plasma processing apparatus; and
a control circuit having an input configured to receive signals from one of the first voltage power supply and the second voltage power supply, and an output of the control circuit coupled to the second voltage subsystem, the control circuit being configured to:
protect the second voltage subsystem from the first voltage power supply during the first mode of operation in response to the input receiving signals from the first power voltage supply;
prevent the first voltage power supply from powering the second voltage subsystem in the second mode of operation in response to the input receiving signals from the first power voltage supply; and
allow the second voltage power supply to power both the first voltage subsystem and the second voltage subsystem.

18. The dual mode power device of claim 17 , wherein the first mode of operation includes an operating mode of the plasma processing apparatu

Assignees

• Lam Res Corp

Inventors

• Benjamin Neil Martin Paul
• Pease John

Classifications

• H02J7/96

  in response to battery voltage · CPC title

• H02J7/855

  with circuits adapted for supplying loads from the battery · CPC title

• H01J37/32935

  Monitoring and controlling tubes by information coming from the object and/or discharge · CPC title

• H01J37/32174 Primary

  Circuits specially adapted for controlling the RF discharge · CPC title

• H02H9/041

  using a short-circuiting device · CPC title