Powerless magnetic field sensing using magnetoelectric nanowires

Patent metadata

Field	Value
Publication number	US-10892399-B2
Application number	US-201816188457-A
Country	US
Kind code	B2
Filing date	Nov 13, 2018
Priority date	Nov 13, 2017
Publication date	Jan 12, 2021
Grant date	Jan 12, 2021

Abstract

Embodiments of a magnetic field sensor of the present disclosure includes magnetoelectric nanowires suspended above a substrate across electrodes without substrate clamping. This results in enhanced magnetoelectric coupling by reducing substrate clamping when compared to layered thin-film architectures. Accordingly, the magnetoelectric nanowires of the magnetic field sensor generate a voltage response in the presence of a magnetic field.

First claim

Therefore, at least the following is claimed:

1. A magnetic field sensor device comprising:
a first electrode positioned across a second electrode, wherein an electrode gap separates the first electrode and the second electrode;
a magnetoelectric nanowire connected to the first electrode and the second electrode across the electrode gap without substrate clamping;
wherein the magnetoelectric nanowire generates a voltage response in a presence of a magnetic field.

2. The magnetic field sensor device of claim 1 , further comprising a current trace positioned perpendicular to an array of magnetoelectric nanowires, wherein the magnetic field is induced by a time varying current traveling over the current trace.

3. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a piezoelectric material coupled with a magnetostrictive material.

4. The magnetic field sensor device of claim 3 , wherein the piezoelectric material coupled with the magnetostrictive material comprises barium titanate coupled with cobalt ferrite.

5. The magnetic field sensor device of claim 3 , wherein the piezoelectric material coupled with the magnetostrictive material comprises PZT (lead zirconate titanate) coupled with nickel zinc (NiZn) ferrite.

6. The magnetic field sensor device of claim 1 , wherein the magnetic field sensor device comprises a series of magnetoelectric nanowires that span between respective pairs of electrodes, wherein the series of magnetoelectric nanowires include the magnetoelectric nanowire connected to the first electrode and the second electrode.

7. The magnetic field sensor device of claim 1 , wherein the magnetic field sensor device comprises a collection of magnetoelectric nanowires having respective pairs of electrodes that are coupled in parallel with one another, wherein the collection of magnetoelectric nanowires include the magnetoelectric nanowire connected to the first electrode and the second electrode.

8. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a Janus morphology.

9. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a core shell morphology.

10. The magnetic field sensor device of claim 1 , wherein the magnetoelectric nanowire comprises a randomly dispersed morphology.

11. The magnetic field sensor device of claim 1 , wherein the first electrode and the second electrode form inter-digitated electrodes.

12. A method comprising:
fabricating 1-D magnetoelectric nanofibers;
forming 1-D magnetoelectric nanofibers into shorter 1-D magnetoelectric nanowires;
using dielectrophoresis to orient a 1-D magnetoelectric nanowire across an electrode gap separating a pair of electrodes; and
measuring a voltage response induced by the 1-D magnetoelectric nanowire in a presence of a magnetic field.

13. The method of claim 12 , further comprising establishing upper electrical contacts.

14. The method of claim 12 , wherein the magnetoelectric nanowire is oriented with solvent across the electrode gap using a dielectrophoretic force.

15. The method of claim 14 , wherein the solvent comprises water, ethanol, 2-methoxyethanol, or butanol.

16. The method of claim 12 , wherein the magnetoelectric nanofibers are fabricated by sol-gel electrospinning.

17. The method of claim 12 , wherein the magnetoelectric nanowire comprises a piezoelectric material coupled with a magnetostrictive material.

18. The method of claim 12 , wherein the magnetoelectric nanowire comprises a Janus morphology.

19. The method of claim 12 , wherein the magnetoelectric nanowire comprises a core shell morphology.

20. The method of claim 12 , wherein the magnetoelectric nanowire comprises a randomly dispersed morphology.

21. The method of claim 12 , wherein the pair of electrodes forms inter-digitated electrodes.

22. The method of claim 12 , further comprising forming a sacrificial metal coating on the magnetoelectric nanowire.

23. The method of claim 22 , wherein the metal comprises copper.

Assignees

• Univ Florida

Inventors

• Andrew Jennifer S
• Arnold David P
• Bauer Matthew
• Wen Xiao

Classifications

• G01R33/06 Primary

  using galvano-magnetic devices · CPC title

• G01R33/02

  Measuring direction or magnitude of magnetic fields or magnetic flux (G01R33/20 takes precedence) · CPC title

• G01R33/07

  Hall effect devices · CPC title

• H01L41/16

  Electricity · mapped topic

• H01L41/20

  Electricity · mapped topic