Ion implantation processes and apparatus using gallium

Patent metadata

Field	Value
Publication number	US-10892137-B2
Application number	US-201916564965-A
Country	US
Kind code	B2
Filing date	Sep 9, 2019
Priority date	Sep 12, 2018
Publication date	Jan 12, 2021
Grant date	Jan 12, 2021

Abstract

An ion source apparatus for ion implantation is described, including an ion source chamber, and a consumable structure in or associated with the ion source chamber, in which the consumable structure includes a solid dopant source material susceptible to reaction with a reactive gas for release of dopant in gaseous form to the ion source chamber, wherein the solid dopant source material comprises gallium nitride, gallium oxide, either of which may be isotopically enriched with respect to a gallium isotope, or combinations thereof.

First claim

The invention claimed is:

1. An ion source apparatus capable of generating gallium ions, the apparatus comprising:
an arc chamber including an interior defined by interior surfaces that include sidewalls, a bottom, and a top; and
a consumable structure disposed in the arc chamber, wherein the consumable structure comprises one or more gallium-containing sheet structures disposed in the interior and covering one or more of the interior surfaces, the one or more gallium-containing sheet structures comprising gallium nitride, gallium oxide, or a combination thereof.

2. The apparatus of claim 1 wherein the one or more gallium-containing sheet structures are removable from the interior of the ion source chamber.

3. The apparatus of claim 1 , wherein the one or more gallium-containing sheets structures comprise at least 80 percent by weight gallium nitride.

4. The apparatus of claim 1 , wherein the one or more gallium-containing sheet structures comprise at least 80 percent by weight gallium oxide.

5. The apparatus of claim 1 wherein the one or more gallium-containing sheet structures comprise at least 80 percent by weight of a combination of gallium oxide and gallium nitride.

6. The apparatus of claim 1 , wherein the interior contains:
one or more gallium-containing sheets structures comprise at least 80 percent by weight gallium nitride, and
one or more gallium-containing sheet structures comprise at least 80 percent by weight gallium oxide.

7. The apparatus of claim 1 , wherein the one or more gallium-containing sheet structures cover from about 5 percent to about 80 percent of a total area of the interior surfaces of the chamber.

8. The apparatus of claim 1 , wherein the gallium nitride, gallium oxide, or combination thereof, contains greater than 60 percent 69Ga based on a total amount (atomic) of gallium in the gallium nitride, gallium oxide, or combination thereof.

9. The apparatus of claim 1 , wherein the amount of 69Ga in the gallium nitride, gallium oxide, or combination thereof, is in a range of from 65% to 100% based on a total amount (atomic) of gallium in the gallium nitride, gallium oxide, or combination thereof.

10. The apparatus of claim 1 , wherein the gallium nitride, gallium oxide, or combination thereof contains greater than 40 percent 71 Ga based on a total amount (atomic) of gallium in the gallium nitride, gallium oxide, or combination thereof.

11. The apparatus of claim 1 , wherein the amount of 71 Ga in the gallium nitride, gallium oxide, or combination thereof, is in a range of from 45% to 100% based on a total amount (atomic) of gallium in the gallium nitride, gallium oxide, or combination thereof.

12. The apparatus of claim 1 , comprising a source of reactant gas in fluid communication with the interior surface.

13. The apparatus of claim 1 , wherein the reactant gas selected from BF 3 , B 2 F 4 , SiF 4 , Si 2 F 6 , GeF 4 , PF 3 , PF 5 , AsF 3 , AsF 5 , XeF 2 , XeF 4 , XeF 6 , WF 6 , MoF 6 , C n F 2n+2 , C n F 2n , C n F 2n−2 , C n H x F 2n+2−x , C n H x F 2n−x , C n H x F 2n−2−x (n=1, 2, 3 . . . , x=0, 1, 2 . . . ), COF 2 , CO, CO 2 , SF 6 , SF 4 , SeF 6 , NF 3 , N 2 F 4 , HF, Xe, He, Ne, Ar, Kr, N 2 , H 2 , eBF 3 , eGeF 4 and combinations thereof.

14. The apparatus of claim 13 wherein the source of reactant gas comprises a combination of selected from: BF 3 and H 2 ; SiF 4 and H 2 ; BF 3 and Xe; SiF 4 and Xe; BF 3 , H 2 , and Xe; or SiF 4 , H 2 , and Xe.

15. A method of forming gallium ion, the method comprising:
generating ionized gallium in an arc chamber including an interior defined by interior surfaces that include sidewalls, a bottom, and a top, wherein the arc chamber has a consumable structure disposed therein, and wherein the consumable structure comprises one or more gallium-containing sheet structures disposed in the interior and covering one or more of the interior surfaces, the one or more gallium-containing sheet structures comprising gallium nitride, gallium oxide, or a combination thereof, and
contacting the consumable structure with a reactant gas to generate gallium ions.

16. The method of claim 15 , wherein the consumable structure is a removable liner.

17. The method of claim 15 , wherein the one or more gallium-containing sheets comprise at least 80 percent by weight gallium nitride.

18. The method of claim 15 , wherein the one or more gallium-containing sheets comprise at least 80 percent by weight gallium oxide.

Assignees

• Entegris Inc

Inventors

• Sweeney Joseph D
• Despres Joseph R
• Tang Ying
• Yedave Sharad N
• Jones Edward E
• Byl Oleg

Classifications

• H10P30/20

  into semiconductor materials, e.g. for doping · CPC title

• H01J37/3171 Primary

  for ion implantation · CPC title

• H01J2237/0815

  Methods of ionisation · CPC title

• H01J2237/061

  Construction · CPC title

• H01J37/08 Primary

  Ion sources; Ion guns · CPC title