Spectrometry system with decreased light path
US-2015355024-A1 · Dec 10, 2015 · US
US10890487B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10890487-B2 |
| Application number | US-201716075842-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 26, 2017 |
| Priority date | Feb 4, 2016 |
| Publication date | Jan 12, 2021 |
| Grant date | Jan 12, 2021 |
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An integrated polarization interferometer includes a polarization beam splitter for separating incident complex waves, a first mirror attached to a first surface of the polarization beam splitter, for reflecting a first polarization transmitted through the polarization beam splitter to the polarization beam splitter, and a second mirror attached to a second surface of the polarization beam splitter, for reflecting a second polarization transmitted through the polarization beam splitter to the polarization beam splitter. Accordingly, it is possible to measure dynamic spectroscopic polarization phenomenon with extremely high robustness disturbances due to an external vibration and the like by using the integrated polarization interferometer, thereby improving measurement repeatability and accuracy of measurement.
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The invention claimed is: 1. An integrated polarization interferometer comprising: a polarizing beam splitter configured to split incident complex waves; a first mirror facing a first surface of the polarizing beam splitter and configured to reflect, to the polarizing beam splitter, first polarized light passing through the polarizing beam splitter; and a second mirror facing a second surface of the polarizing beam splitter and configured to reflect, to the polarizing beam splitter, second polarized light reflected by the polarizing beam splitter, wherein an optical path length of the first polarized light differs from an optical path length of the second polarized light in the integrated polarization interferometer; and the difference between the optical path length of the first polarized light and the optical path length of the second polarized light ranges from 20 μm to 60 μm for an ultraviolet or visible light region and 60 μm to 500 μm for a near-infrared or infrared region. 2. The integrated polarization interferometer of claim 1 , wherein the first polarized light is P-polarized light, and the second polarized light is S-polarized light. 3. A snapshot spectro-polarimeter comprising: a first linear polarizer configured to linearly-polarize light emitted from a light source; the integrated polarization interferometer of claim 1 to polarization-modulate complex waves that are output from the first linear polarizer and pass through, or are reflected by, an object; a second linear polarizer configured to cause two waves output from the integrated polarization interferometer to interfere with each other; and a measurement device configured to measure spectrum polarization information of light output from the second linear polarizer, wherein the measurement device comprises a spectrometer of a sensor array type. 4. The snapshot spectro-polarimeter of claim 3 , wherein the first linear polarizer and the second linear polarizer are linear polarizers oriented in the same direction. 5. The snapshot spectro-polarimeter of claim 3 , wherein a measurement wavelength region of the measurement device comprises at least one of a visible light region, an ultraviolet region, a near-infrared region, and an infrared region. 6. A snapshot spectro-polarimeter comprising: a linear polarizer configured to linearly-polarize light emitted from a light source; the integrated polarization interferometer of claim 1 to modulate polarized light input from the linear polarizer; a beam splitter configured to split interference waves modulated by the integrated polarization interferometer; a first measurement device configured to measure spectral polarization information of first light that is split by the beam splitter and passes through, or is reflected by, an object; and a second measurement device configured to measure spectral polarization information of second light that is split by the beam splitter and does not pass through, or is not reflected by, the object. 7. The snapshot spectro-polarimeter of claim 6 , wherein measurement wavelength regions of the first measurement device and the second measurement device comprise at least one of a visible light region, an ultraviolet region, a near-infrared region, and an infrared region. 8. A snapshot spectro-polarimeter comprising: a linear polarizer configured to linearly-polarize light emitted from a light source; an integrated polarization interferometer configured to modulate polarized light input from the linear polarizer; a beam splitter configured to split interference waves modulated by the integrated polarization interferometer into two paths; a chopper wheel configured to periodically transmit first light split by the beam splitter to an object and periodically transmit second light split by the beam splitter to a path in which there is no object; and a measurement device configured to measure spectral polarization information of the first light and the second light, wherein the integrated polarization interferometer comprises: a polarizing beam splitter configured to split polarized light input from the linear polarizer; a first mirror facing a first surface of the polarizing beam splitter to reflect, to the polarizing beam splitter, first polarized light passing through the polarizing beam splitter; and a second mirror facing a second surface of the polarizing beam splitter to reflect, to the polarizing beam splitter, second polarized light reflected by the polarizing beam splitter, wherein an optical path length of the first polarized light differs from an optical path length of the second polarized light in the integrated polarization interferometer; and the difference between the optical path length of the first polarized light and the optical path length of the second polarized light ranges from 20 μm to 60 μm for an ultraviolet or visible light region and 60 μm to 500 μm for a near-infrared or infrared region. 9. The snapshot spectro-polarimeter of claim 8 , wherein a measurement wavelength region of the measurement device comprises at least one of a visible light region, an ultraviolet region, a near-infrared region, and an infrared region.
using polarising or depolarising elements · CPC title
Devices of compact or symmetric construction (G01J3/4531 takes precedence) · CPC title
Polarisation spectrometry · CPC title
Beam switching arrangements · CPC title
Devices without moving parts · CPC title
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