Charged Particle Beam Device and Pattern Measurement Device
US-2018182595-A1 · Jun 28, 2018 · US
US10890443B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10890443-B2 |
| Application number | US-201916438912-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 12, 2019 |
| Priority date | Aug 1, 2018 |
| Publication date | Jan 12, 2021 |
| Grant date | Jan 12, 2021 |
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Official abstract text for this publication.
A rotary table including a placement surface with an object; a rotary base rotating the rotary table; a detector detecting displacement of a peripheral surface of the object; an angle adjustment mechanism adjusting an inclination angle of the rotary table; a position adjustment mechanism adjusting a position of the rotary table; a video acquisition unit acquiring a video of the rotary base; a display unit displaying an image based on the video; a position recognition unit recognizing images of the rotary table, rotary base, and object on the display unit and recognizing positions of the rotary table, rotary base, and object in a display space of the images; and a display control unit performing control of displaying a guide in a superimposing manner on the image on the display unit on a basis of the positions of the rotary table, rotary base, and object recognized by the position recognition unit.
Opening claim text (preview).
The invention claimed is: 1. A roundness measuring device configured to measure a position of a peripheral surface of an object, the roundness measuring device comprising: a rotary table including a placement surface on which the object is placed; a rotary base configured to rotate the rotary table about a rotation axis; a detector configured to detect displacement of the peripheral surface of the object being rotated; an angle adjustment mechanism configured to adjust an inclination angle of the rotary table with respect to the rotation axis; a position adjustment mechanism configured to adjust a position of the rotary table along a plane orthogonal to the rotation axis; a camera configured to acquire a video of the rotary base and a region around the rotary base; a display unit configured to display an image based on the video; a position recognition unit configured to recognize images of the rotary table, the rotary base, and the object displayed on the display unit and configured to recognize positions of the rotary table, the rotary base, and the object in a display space of the images; and a display control unit configured to perform control of displaying a guide in a superimposing manner on the image displayed on the display unit on a basis of the positions of the rotary table, the rotary base, and the object recognized by the position recognition unit. 2. The roundness measuring device according to claim 1 , wherein the position recognition unit recognizes a position of the rotation axis on a basis of the image of the rotary base; and the display control unit performs control of displaying a rotation axis image indicating the rotation axis in a superimposing manner on the image of the rotary table displayed on the display unit on a basis of the position of the rotation axis recognized by the position recognition unit. 3. The roundness measuring device according to claim 1 , wherein the position recognition unit recognizes a position of a center axis of the object on a basis of the image of the object; and the display control unit performs control of displaying a center axis image indicating the center axis in a superimposing manner on the image of the object displayed on the display unit on a basis of the position of the center axis recognized by the position recognition unit. 4. The roundness measuring device according to claim 3 , wherein the display control unit performs control of displaying on the display unit a deviation angle of the center axis with respect to the rotation axis. 5. The roundness measuring device according to claim 4 , wherein when the deviation angle falls within a preset range, the display control unit performs control of displaying on the display unit a state indicating that the deviation angle is within the preset range. 6. The roundness measuring device according to claim 4 , wherein the display control unit performs control of sending to the angle adjustment mechanism the deviation angle obtained when the object is placed on the placement surface; and the angle adjustment mechanism adjusts the inclination angle of the rotary table to cancel out the deviation angle sent from the display control unit. 7. The roundness measuring device according to claim 3 , wherein the display control unit performs control of displaying on the display unit a positional deviation amount of the center axis with respect to the rotation axis along the plane. 8. The roundness measuring device according to claim 7 , wherein when the positional deviation amount falls within a preset range, the display control unit performs control of displaying on the display unit a state indicating that the positional deviation amount is within the preset range. 9. The roundness measuring device according to claim 7 , wherein the display control unit performs control of sending to the position adjustment mechanism the positional deviation amount obtained when the object is placed on the placement surface; and the position adjustment mechanism adjusts the position of the rotary table along the plane to cancel out the positional deviation amount sent from the display control unit. 10. A measurement guide system configured to guide measurement in a roundness measuring device including a rotary table including a placement surface on which an object is placed, a rotary base configured to rotate the rotary table about a rotation axis, and a detector configured to detect displacement of a peripheral surface of the object being rotated, the measurement guide system comprising: a camera configured to acquire a video of the rotary base and a region around the rotary base; a display unit configured to display an image based on the video; a position recognition unit configured to recognize images of the rotary table, the rotary base, and the object displayed on the display unit and configured to recognize positions of the rotary table, the rotary base, and the object in a display space of the images; and a display control unit configured to perform control of displaying a guide in a superimposing manner on the image displayed on the display unit on a basis of the positions of the rotary table, the rotary base, and the object recognized by the position recognition unit. 11. A measurement guide method for guiding measurement in a roundness measuring device including a rotary table including a placement surface on which an object is placed, a rotary base configured to rotate the rotary table about a rotation axis, and a detector configured to detect displacement of a peripheral surface of the object being rotated, the method comprising the steps of: a video acquisition step of acquiring a video of the rotary base and a region around the rotary base by a camera; a display step of displaying an image based on the video on a display unit; a position recognition step of recognizing images of the rotary table, the rotary base, and the object displayed on the display unit and recognizing positions of the rotary table, the rotary base, and the object in a display space of the images; and a display control step of displaying a guide in a superimposing manner on the image displayed on the display unit on a basis of the positions of the rotary table, the rotary base, and the object recognized at the position recognition step.
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