Ceramic susceptor
US-11963270-B2 · Apr 16, 2024 · US
US10880953B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10880953-B2 |
| Application number | US-201815907665-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 28, 2018 |
| Priority date | May 29, 2015 |
| Publication date | Dec 29, 2020 |
| Grant date | Dec 29, 2020 |
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Official abstract text for this publication.
A heater system includes a heater and a controller. The heater includes a first power pin made of a first conductive material, a second power pin made of a second conductive material that is dissimilar from the first conductive material, and a resistive heating element having two ends and made of a material that is different from the first and second conductive material of the first and second power pins. The resistive heating element forms a first junction with one end of the first power pin and a second junction at its other and with the second power pin. The controller is in communication with the power pins for measuring changes in voltage at the first and second junctions to determine an average temperature of the heater based on the changes in voltage.
Opening claim text (preview).
What is claimed is: 1. A method of controlling at least one heater, comprising: (a) activating the at least one heater to a heating mode, wherein the at least one heater comprising a power supply pin made of a first conductive material; a power return pin made of a second conductive material that is dissimilar from the first conductive material of the power supply pin; and a resistive heating element having opposing ends and being made of a material that is different from the first and second conductive materials of the power supply pin and power return pin; and a controller in communication with the power pins, wherein the resistive heating element is electrically and directly connected to the power supply pin at one of the opposing ends to form a first thermocouple junction, and electrically and directly connected to the power return pin at the other one of the opposing ends to form a second thermocouple junction; and the controller is further configured to measure changes in voltage at the first and second junctions without interrupting power to the resistive heating element; (b) supplying power to the power supply pin, to the resistive heating element, and further supplying the power through the power return pin; (c) measuring changes in voltage at the first and second thermocouple junctions to determine an average temperature of the heater; (d) adjusting the power supplied to the heater as needed based on the average temperature determined in step (c); and (e) repeating steps (a) through (d). 2. The method according to claim 1 further comprising the steps of: interrupting step (b) and switching to a measuring mode; and switching back to the heating mode after step (c). 3. The method according to claim 1 further comprising the step of comparing the average temperature determined at step (c) to a predetermined limit in order to detect the presence of moisture proximate the power supply and return pins. 4. The method according to claim 1 further comprising the step of controlling a plurality of heaters by sequencing through steps (a) through (d) for each heater in a predetermined sequence. 5. The method according to claim 1 , wherein AC power supplied to the heater is switched at or near a zero-cross of a power signal to carry out step (c) to measure the changes in voltage and determine the average temperature of the heater. 6. The method according to claim 1 , wherein power supplied to the heater is switched during an off-period of a FET in communication with a DC power supply to carry out step (c) to measure the changes in voltage and determine the average temperature of the heater. 7. The method according to claim 1 , further comprising operating the at least one heater between the heating mode and a measuring mode. 8. The method according to claim 1 , wherein the at least one heater is operated between the heating mode and the measuring mode so that the same power supply and return pins are used for a dual purpose of power supply and temperature measurement. 9. The method according to claim 1 , wherein step (c) is performed without interrupting power to the resistive heating element. 10. The method according to claim 9 , further comprising measuring the changes in voltage at the first and second junctions when AC power supplied to the heater is at or near a zero-cross of a power signal. 11. A method of controlling at least one heater, comprising: (a) activating the at least one heater to a heating mode, wherein the at least one heater comprising a power supply pin made of a first conductive material; a power return pin made of a second conductive material that is dissimilar from the first conductive material of the power supply pin; and a resistive heating element having opposing ends and being made of a material that is different from the first and second conductive materials of the power supply pin and power return pin; and a controller in communication with the power pins, wherein the resistive heating element is electrically and directly connected to the power supply pin at one of the opposing ends to form a first thermocouple junction, and electrically and directly connected to the power return pin at the other one of the opposing ends to form a second thermocouple junction; and the controller is further configured to measure changes in voltage at the first and second junctions without interrupting power to the resistive heating element; (b) supplying power to the power supply pin, to the resistive heating element, and further supplying the power through the power return pin; (c) measuring changes in voltage at the first and second thermocouple junctions to determine an average temperature of the heater. 12. The method according to claim 11 , further comprising: (d) adjusting the power supplied to the heater as needed based on the average temperature determined in step (c). 13. The method according to claim 12 , further comprising: (e) repeating steps (a) through (d). 14. The method according to claim 11 , further comprising the steps of: interrupting step (b) and switching to a measuring mode; and switching back to the heating mode after step (c). 15. The method according to claim 11 , further comprising the step of comparing the average temperature determined at step (c) to a predetermined limit in order to detect the presence of moisture proximate the power supply and return pins. 16. The method according to claim 11 , further comprising the step of controlling a plurality of heaters by sequencing through steps (a) through (d) for each heater in a predetermined sequence. 17. The method according to claim 11 , wherein AC power supplied to the heater is switched at or near a zero-cross of a power signal to carry out step (c) to measure the changes in voltage and determine the average temperature of the heater. 18. The method according to claim 11 , wherein power supplied to the heater is switched during an off-period of a FET in communication with a DC power supply to carry out step (c) to measure the changes in voltage and determine the average temperature of the heater. 19. The method according to claim 11 , wherein the at least one heater is operated between the heating mode and the measuring mode so that the same power supply and return pins are used for a dual purpose of power supply and temperature measurement. 20. The method according to claim 11 , further comprising operating the at least one heater between the heating mode and a measuring mode.
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