Resonator and resonator device

Patent metadata

Field	Value
Publication number	US-10879448-B2
Application number	US-201815926347-A
Country	US
Kind code	B2
Filing date	Mar 20, 2018
Priority date	Oct 13, 2015
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

A resonator includes a vibrator with a base, and multiple vibrating arms extending therefrom. Moreover, a frame surrounds a periphery of the vibrating part and a holding arm couples the vibrator to the frame. The holding arm includes a pair of first support arms that are connected to the base opposite the vibrating arms and a coupling portion that couples the support arms with one another and that is connected to the frame.

First claim

The invention claimed is:

1. A resonator comprising:
a vibrator that includes a base and a plurality of vibrating arms extending from a first side of the base;
a frame that at least partially surrounds the vibrator; and
a holding arm coupling the frame to a second side of the base opposite the first side, the holding arm including a pair of first support arms having first ends respectively connected to the second side of the base and a coupling portion that couples the pair of first support arms to each other and that is connected to the frame,
wherein each of the base, the plurality of vibrating arms and the coupling portion of the holding arm are all disposed in a same plane as each other.

2. The resonator according to claim 1 , wherein the pair of first support arms extend in a first direction that is parallel to a lengthwise direction of the plurality of vibrating arms.

3. The resonator according to claim 2 , wherein the coupling portion includes:
a first coupling arm extending in a second direction orthogonal to the first direction and having a first end connected to a second end of a first of the pair of first support arms and a second end connected to a second end of a second of the pair of first support arms, and
a second support arm extending in the first direction and having a first end connected to a center of the first coupling arm and a second end connected to a region of the frame facing the second side of the base.

4. The resonator according to claim 2 , wherein the coupling portion includes:
a first coupling arm extending in a second direction orthogonal to the first direction and having a first end connected to a second end of a first of the pair of first support arms and a second end connected to a second end of a second of the pair of first support arms,
a second coupling arm extending in the second direction at a position between the first coupling arm and the frame,
a second support arm extending in the first direction and having a first connected to a center of the first coupling arm and a second end connected to a center of the second coupling arm, and
a pair of third support arms extending in the first direction and each having a first end connected to respective ends of the second coupling arm and second ends connected to a region of the frame facing free ends of the plurality of vibrating arms.

5. The resonator according to claim 2 , wherein the coupling portion includes:
a first coupling arm extending in a second direction orthogonal to the first direction and having a first end connected to a second end of a first of the pair of first support arms and a second end connected to a second end of a second of the pair of first support arms,
a second coupling arm extending in the second direction at a position between the first coupling arm and the frame,
a second support arm extending in the first direction and having a first end connected to a center of the first coupling arm and a second end connected to a center of the second coupling arm,
a pair of third support arms extending in the first direction and each having a first end connected to respective ends of the second coupling arm,
a fourth support arm extending in the second direction and having a first end connected to a first of the pair of third support arms and a second end connected to a region of the frame part facing the first of the pair of third support arms, and
a fifth support arm extending in the second direction and having a first end connected to a second of the pair of third support arms and a second end connected to a region of the frame facing the second of the pair of third support arms.

6. The resonator according to claim 1 , wherein the pair of first support arms are connected to the base in an area of the base where a displacement of the plurality of vibrating arms due to vibration is minimized at a rear end of the base opposite to a front end of the base connected to the plurality of vibrating arms.

7. The resonator according to claim 1 , wherein the pair of first support arms are connected to the base at an inner side with respect to a center in the second direction between outermost vibrating arms of the plurality of vibrating arms.

8. The resonator according to claim 1 , wherein the pair of first support arms are each respectively connected to the base at positions between the plurality of vibrating arms.

9. The resonator according to claim 1 , wherein the plurality of vibrating arms comprises a first pair of vibrating arms and a second pair of vibrating arm with respective first and second central axes extending in a lengthwise direction of the plurality of vibrating arms, the first and second central axes being between the first and second pairs of vibrating arms, respectively.

10. The resonator according to claim 9 , wherein the pair of first support arms are respectively connected to positions of the second side of the base that intersect the first and second central axes, respectively, in the lengthwise direction, such that displacement due to vibration during excitation is minimized.

11. A resonator comprising:
a vibration member having a base and a plurality of vibrating arms extending from the base in a first direction;
a frame that at least partially surrounds the vibration member; and
a vibration member support coupling the frame to the base,
wherein the vibration member support includes:
a pair of first support arms extending from the base in the first direction and a connected to a side of the base opposite the plurality of vibrating arms; and
a coupling member that connects the pair of first support arms to the frame.

12. The resonator according to claim 11 , wherein the coupling member includes a first coupling arm extending in a second direction orthogonal to the first direction and having a first end connected to one of the pair of first support arms and a second end connected to the other of the pair of first support arms.

13. The resonator according to claim 12 , wherein the coupling member further includes a second support arm extending in the first direction and having a first end connected the first coupling arm and a second end connected to the frame.

14. The resonator according to claim 13 , wherein the first end of the second support arm is connected to a center of the first coupling arm and the second end of the second support arm is connected to a region of the frame facing the side of the base opposite the plurality of vibrating arms.

15. The resonator according to claim 11 , wherein the pair of first support arms are connected to the base in an area of the base where a displacement of the plurality of vibrating arms due to vibration is minimized at a rear end of the base opposite to a front end of the base connected to the plurality of vibrating arms.

16. The resonator according to claim 11 , wherein the pair of first support arms are each respectively connected to the base at positions between the plurality of vibrating arms.

17. The resonator according to claim 11 , wherein the plurality of vibrating arms comprises a first pair of vibrating arms and a second pair of vibrating arm with respective first and second central axes extending in a lengthwise direction of the plurality of vibrating arms, with the first and second central axes being between the first and second pairs of vibrating arms, respectively.

18. The resonator according to claim 17 , wherein the pair of first support arms are respectively connected to the base at positions that intersect with the first and second central axes, respectively,

Assignees

• Murata Manufacturing Co

Inventors

• Hirota Wakana
• Kaajakari Ville

Classifications

• H03H9/02433 Primary

  Means for compensation or elimination of undesired effects · CPC title

• H03H9/2489

  with more than two fork tines · CPC title

• H03H9/0595

  the holder support and resonator being formed in one body · CPC title

• H03H9/1057

  for microelectro-mechanical devices · CPC title

• G01L1/106

  Constructional details · CPC title