Fourier-transform interferometer using meta surface

Patent metadata

Field	Value
Publication number	US-10877349-B2
Application number	US-201916710025-A
Country	US
Kind code	B2
Filing date	Dec 11, 2019
Priority date	Nov 21, 2017
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

A Fourier-transform interferometer includes a phase change plate including a reflective layer configured to reflect a first light that is incident, and a meta surface configured to locally and differently change a phase of the first light that is reflected. The Fourier-transform interferometer further includes a photodetector configured to detect a second light, and a transflective mirror and a mirror configured to transmit a first part of a third light that is incident, to the phase change plate, transmit a remaining part of the third light, to the photodetector, and transmit the first light of which the phase is locally and differently changed, to the photodetector. The photodetector is further configured to detect an interference pattern between the remaining part of the third light and the first light of which the phase is locally and differently changed.

First claim

What is claimed is:

1. A Fourier-transform interferometer comprising:
a transflective mirror configured to transmit a first part of a first light that is incident, and reflect a remaining part of the first light;
a phase change plate disposed opposite to the transflective mirror, the phase change plate comprising,
a meta surface comprising a plurality of phase change elements having different diameters and configured to locally and differently change a phase of a second light that is incident; and
a transflective substrate configured to transmit a second part of the second light, and reflect a third part of the second light, the meta surface being disposed on the transflective substrate; and

a photodetector configured to detect an interference pattern between a third light that is transmitted through the phase change plate.

2. The Fourier-transform interferometer of claim 1 , wherein the plurality of phase change elements have columnar shapes vertically protruding from the transflective substrate.

3. The Fourier-transform interferometer of claim 1 , wherein the phase change plate comprises a first meta region and a second meta region that differently change the phase of the third part of the second light that is reflected.

4. The Fourier-transform interferometer of claim 3 , wherein the phase change plate comprises first phase change elements disposed in the first meta region, and second phase change elements disposed in the second meta region.

5. The Fourier-transform interferometer of claim 4 , wherein each of the first phase change elements has a first diameter, and
each of the second phase change elements has a second diameter different from the first diameter.

6. The Fourier-transform interferometer of claim 1 , wherein each of the different diameters of the plurality of phase change elements is less than a wavelength of light to be analyzed.

7. The Fourier-transform interferometer of claim 1 , wherein each of refractive indices of the plurality of phase change elements is higher than a refractive index of the transflective substrate.

8. The Fourier-transform interferometer of claim 1 , wherein the photodetector, the phase change plate, and the transflective mirror are sequentially arranged in a vertical direction.

9. The Fourier-transform interferometer of claim 1 , further comprising a substrate,
wherein the transflective mirror, the phase change plate, and the photodetector are sequentially arranged in a lateral direction on the substrate.

10. The Fourier-transform interferometer of claim 1 , further comprising a light source configured to radiate a fourth light toward a sample.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Park Yeonsang

Classifications

• G02B1/002

  made of materials engineered to provide properties not available in nature, e.g. metamaterials · CPC title

• G01J3/45 Primary

  Interferometric spectrometry · CPC title

• G02F1/21 Primary

  by interference · CPC title

• G01J3/4531

  Devices without moving parts · CPC title

• G02F1/19

  based on variable-reflection or variable-refraction elements not provided for in groups G02F1/015 - G02F1/169 · CPC title