Monitoring of mems mirror properties
US-2020132981-A1 · Apr 30, 2020 · US
US10877263B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10877263-B2 |
| Application number | US-201816174519-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 30, 2018 |
| Priority date | Oct 30, 2017 |
| Publication date | Dec 29, 2020 |
| Grant date | Dec 29, 2020 |
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A mirror device includes a frame, a mirror body arranged in the frame and rotatable around a rotation, support beams connected between the mirror body and the frame and a leaf spring providing torsional stiffness with respect to a rotation of the mirror body around the rotational axis. The leaf spring has a maximum thickness that is smaller than a minimum width thereof, where the leaf spring has openings that reduce the thickness thereof or the penetrate the leaf spring in the thickness direction.
Opening claim text (preview).
What is claimed is: 1. A mirror device comprising: a frame; a mirror body arranged in the frame and rotatable around a rotation axis; support beams connected between the mirror body and the frame; and a leaf spring providing torsional stiffness with respect to a rotation of the mirror body around the rotational axis, wherein the leaf spring has a maximum thickness that is smaller than a minimum width of the leaf spring, wherein the leaf spring has openings that reduce the thickness of the leaf spring or that penetrate the leaf spring in a thickness direction of the leaf spring, wherein the openings are completely surrounded by material of the leaf spring when viewed in the thickness direction of the leaf spring, and wherein a first end of the leaf spring is coupled to the mirror body and a second end of the leaf spring is coupled to the frame, wherein the openings comprise an opening arranged closer to the first end than to the second end. 2. The mirror device of claim 1 , wherein at least one of the openings has an extension in a width direction of the leaf spring that is less than the minimum width of the leaf spring. 3. The mirror device of claim 1 , wherein the openings comprise at least three openings. 4. The mirror device of claim 1 , wherein the openings are distributed over a region covering 50% or more of an area of the leaf spring when viewed in the thickness direction of the leaf spring. 5. The mirror device of claim 1 , wherein the openings comprise at least two openings of different shapes and/or different areas when viewed in the thickness direction of the leaf spring. 6. The mirror device of claim 1 , wherein the openings occupy a percentage of an area of the leaf spring when viewed in the thickness direction of the leaf spring in a range of 20% to 90%. 7. The mirror device of claim 1 , wherein the openings are arranged to reduce the torsional stiffness with respect to the rotation of the mirror body around the rotational axis more than a torsional stiffness with respect to rotations around axes perpendicular to the rotational axis. 8. The mirror device of claim 1 , wherein the openings are arranged to provide a truss structure of the leaf spring. 9. The mirror device of claim 1 , wherein the openings comprise openings arranged with at least one of a cross-shaped, a y-shaped, or an x-shaped land between them. 10. The mirror device of claim 1 , wherein, when viewed in the thickness direction of the leaf spring, the openings comprise triangular openings. 11. The mirror device of claim 10 , wherein, when viewed in the thickness direction of the leaf spring, fillets are formed in corners of the openings and the openings do not include acute corners. 12. The mirror device of claim 1 , wherein the openings comprise longitudinal rectangular openings extending in a longitudinal direction between a first end of the leaf spring and a second end of the leaf spring. 13. The mirror device of claim 12 , wherein pairs of the longitudinal rectangular openings are formed side by side in a width direction in a portion of the leaf spring having a smaller width than other portions of the leaf spring. 14. The mirror device of claim 1 , wherein: the mirror body comprises a mirror support and a mirror arranged on the mirror support, the mirror support comprises a support bar, and the leaf spring is fixed to the support bar outside of the mirror when viewed in the thickness direction of the leaf spring. 15. A mirror device comprising: a frame; a mirror body arranged in the frame and rotatable around a rotation axis; support beams connected between the mirror body and the frame; a leaf spring providing torsional stiffness with respect to a rotation of the mirror body around the rotational axis, wherein the leaf spring has a maximum thickness that is smaller than a minimum width of the leaf spring, wherein the leaf spring has openings that reduce the thickness of the leaf spring or that penetrate the leaf spring in a thickness direction of the leaf spring, wherein the openings are completely surrounded by material of the leaf spring when viewed in the thickness direction of the leaf spring; and at least one leaf spring assembly comprising the leaf spring and a relief link, wherein the leaf spring has a first end, a second end, and a longitudinal direction between the first end and the second end, and wherein the first end is fixed to the mirror body and the second end is coupled to the frame by the relief link, or the first end is coupled to the mirror body by the relief link and the second end is fixed to the frame, and wherein the relief link allows for a translation of the leaf spring in the longitudinal direction at the first end or the second end that is adjacent to the relief link. 16. A mirror device comprising: a frame; a mirror body arranged in the frame and rotatable around a rotation axis; support beams connected between the mirror body and the frame; and a first pair of leaf springs and a second pair of leaf springs, the leaf springs in each pair extending from the mirror body in opposite directions, wherein each leaf spring provides torsional stiffness with respect to a rotation of the mirror body around the rotational axis, wherein each leaf spring has a maximum thickness that is smaller than a minimum width of the leaf spring, wherein each leaf spring has openings that reduce the thickness of the leaf spring or that penetrate the leaf spring in a thickness direction of the leaf spring, and wherein the openings of each leaf spring are completely surrounded by material of the leaf spring when viewed in the thickness direction of the leaf spring. 17. The mirror device of claim 1 , A mirror device comprising: a frame; a mirror body arranged in the frame and rotatable around a rotation axis; support beams connected between the mirror body and the frame; and a leaf spring providing torsional stiffness with respect to a rotation of the mirror body around the rotational axis, wherein the leaf spring has a maximum thickness that is smaller than a minimum width of the leaf spring, wherein the leaf spring has openings that reduce the thickness of the leaf spring or that penetrate the leaf spring in a thickness direction of the leaf spring, wherein the openings are completely surrounded by material of the leaf spring when viewed in the thickness direction of the leaf spring, and wherein the leaf spring comprises a first end, a second end, and a width that increases from a middle portion thereof towards the first end coupled to the mirror body and towards the second end coupled to the frame, wherein the width of the leaf spring at the first end is larger than the width of the leaf spring at the second end. 18. A mirror device comprising: a frame; a mirror body arranged in the frame and rotatable around a rotation axis extending in a plane defined by the frame; support beams connected between the mirror body and the frame along the rotation axis; and a leaf spring providing torsional stiffness with respect to a rotation of the mirror body around the rotational axis, the leaf spring having a first end, a second end, and a longitudinal direction between the first end and the second end, the first end being coupled to the mirror body and the second end being coupled to the frame, wherein the leaf spring has a maximum thickness, perpendicular to the plane, that is smaller than a minimum width of the leaf spring, in the plane, and wherein the leaf spring has openings that reduce the thickness of the leaf spring
characterised by shape or design of individual leaves (F16F1/22 takes precedence) · CPC title
comprising an element between the end coil of the spring and the support proper, e.g. an elastomeric annulus (F16F1/13 takes precedence) · CPC title
with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title
the reflecting means being moved or deformed by electromagnetic means · CPC title
the reflecting element being moved or deformed by electrostatic means · CPC title
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