Electromagnetic rotating device and vacuum pump equipped with electromagnetic rotating device

Patent metadata

Field	Value
Publication number	US-10876540-B2
Application number	US-201314443102-A
Country	US
Kind code	B2
Filing date	Oct 9, 2013
Priority date	Nov 30, 2012
Publication date	Dec 29, 2020
Grant date	Dec 29, 2020

Abstract

An electromagnetic rotating apparatus may include an electromagnet winding that consumes power generated during regeneration. A motor voltage monitoring circuit detects that a voltage at a motor driving main circuit is higher than a voltage during normal operation, due to overshoot or the like after arrival at a set speed during deceleration or acceleration of a motor. The motor voltage monitoring circuit transmits a high-voltage detection signal to a braking current adjusting circuit and a magnetic bearing control circuit. Upon receiving the high-voltage detection signal, the braking current adjusting circuit reduces a braking current command value for the motor so as to maintain an excitation voltage for the motor constant or reduce this excitation voltage, and an amplifier control circuit in the magnetic bearing control circuit increases a bias current flowing through an electromagnet winding to increase power consumption.

First claim

What is claimed is:

1. A vacuum pump comprising:
a motor;
a rotor shaft that is rotationally driven by the motor;
an electromagnet through which, as an excitation current, a displacement current generated in accordance with a positional deviation of the rotor shaft and superimposed on a bias current is passed;
a power supply that supplies a direct current;
a motor driving main circuit that supplies the direct current supplied by the power supply to the motor;
a motor voltage monitoring circuit that monitors a voltage of the direct current;
detection signal output means for outputting a detection signal when the voltage monitored by the motor voltage monitoring circuit reaches a predetermined value or a value larger than the predetermined value; and
a magnetic bearing control circuit that increases the bias current that excites the electromagnet, based on the detection signal that is output by the detection signal output means, wherein a regenerated electric power generated by a rotation of the rotor shaft is consumed by increasing the bias current of the electromagnet.

2. The vacuum pump according to claim 1 , further comprising:
a motor driving control circuit that controls a motor current passing through the motor in accordance with a command value; and
a braking current adjusting circuit that reduces the command value for the motor current, based on the detection signal that is output by the detection signal output means.

3. The vacuum pump according to claim 2 , wherein the power supply supplies the magnetic bearing control circuit with a direct current of a voltage substantially identical to a voltage supplied to the motor driving main circuit.

4. The vacuum pump according to claim 1 , wherein the power supply supplies the magnetic bearing control circuit with a direct current of a voltage identical to a voltage supplied to the motor driving main circuit.

5. A vacuum pump comprising an electromagnetic rotating apparatus comprising:
a motor;
a rotor shaft that is rotationally driven by the motor;
a rotor blade attached to the rotor shaft;
an electromagnet through which, as an excitation current, a displacement current generated in accordance with a positional deviation of the rotor shaft and superimposed on a bias current is passed;
a power supply that supplies a direct current;
a motor driving main circuit that supplies the direct current supplied by the power supply to the motor;
a motor voltage monitoring circuit that monitors a voltage of the direct current;
detection signal output means for outputting a detection signal when the voltage monitored by the motor voltage monitoring circuit reaches a predetermined value or a value larger than the predetermined value; and
a magnetic bearing control circuit that increases the bias current that excites the electromagnet, based on the detection signal that is output by the detection signal output means, wherein a regenerated electric power generated by a rotation of the rotor shaft is consumed by increasing the bias current of the electromagnet.

6. The vacuum pump of claim 5 , wherein the electromagnetic rotating apparatus further comprises:
a motor driving control circuit that controls a motor current passing through the motor in accordance with a command value; and
a braking current adjusting circuit that reduces the command value for the motor current, based on the detection signal that is output by the detection signal output means.

7. The vacuum pump of claim 6 , wherein the power supply supplies the magnetic bearing control circuit with a direct current of a voltage identical to a voltage supplied to the motor driving main circuit.

8. The vacuum pump of claim 5 , wherein the power supply supplies the magnetic bearing control circuit with a direct current of a voltage identical to a voltage supplied to the motor driving main circuit.

Assignees

• Edwards Japan Ltd

Inventors

• Omori Hideki

Classifications

• H02P3/14

  by regenerative braking · CPC title

• F04D29/058 Primary

  magnetic; electromagnetic · CPC title

• Y02B30/70

  Efficient control or regulation technologies, e.g. for control of refrigerant flow, motor or heating · CPC title

• F04D19/048 Primary

  comprising magnetic bearings · CPC title

• F16C2360/45

  Turbo-molecular pumps · CPC title