Film for applying compressive stress to ceramic materials

Patent metadata

Field	Value
Publication number	US-10868899-B2
Application number	US-201816015428-A
Country	US
Kind code	B2
Filing date	Jun 22, 2018
Priority date	Jun 23, 2017
Publication date	Dec 15, 2020
Grant date	Dec 15, 2020

Abstract

A method to provide compressive stress to substrates includes depositing a film on a ceramic substrate at a deposition temperature (Td) to form an article, the film having a difference relative to the ceramic substrate at Td in a coefficient thermal expansion (CTE) of at least 1.0×10−6/K and a difference in a refractive index >0.10. At least a portion of the thickness the film is converted in at least one of composition, phase and microstructure by lowering or raising the temperature from Td to reach a changed temperature (Tc) that is at least 100° C. different from Td. The film converting conditions result in the converted film portion providing a difference in refractive index at the Tc between the converted film and the ceramic substrate of ≤|0.10|. The temperature of the article is then lowered to room temperature.

First claim

The invention claimed is:

1. A method to provide compressive stress to substrates, comprising:
depositing a nitride film on a ceramic substrate at a deposition temperature (Td) to form an article, said nitride film having a difference in a coefficient thermal expansion (CTE) relative to said ceramic substrate at said Td of at least 1.0×10−6/K and a difference in a refractive index of greater than (>) 0.10;
converting said nitride film comprising lowering or raising a temperature from said Td to reach a changed temperature (Tc) that is at least 100° C. different from said Td, wherein conditions for said converting result in said nitride film becoming in at least a portion of its thickness a converted film through a composition change such that there is an increase in oxygen content by at least (≥) 10 mole percent, a decrease in nitrogen content by at least (≥) 10 mole percent, or a decrease in carbon content by at least (≥) 10 mole percent, so that a difference in said refractive index at said Tc of said converted film and said ceramic substrate is ≤|0.10|, and
lowering a temperature of said article from said Tc to room temperature, wherein said nitride film is an AlO a N b film, wherein a+b<1.5, a SiCON film, or a SiAlCON film.

2. The method of claim 1 , wherein said substrate comprises sapphire.

3. The method of claim 1 , wherein said converting comprises flowing one or more of carbon, oxygen or nitrogen containing gases.

4. The method of claim 1 , wherein said article is optically transparent.

5. The method of claim 1 , wherein said substrate comprises a silica-based glass, sapphire, alumina, or a spinel.

6. The method of claim 1 , wherein said portion of said converted film is under a compressive stress, and wherein said substrate is under a tensile stress.

7. The method of claim 1 , wherein said article comprises a display screen of a cellular phone.

8. The method of claim 1 , wherein said portion of said converted film is from 10% to 80%.

9. The method of claim 1 , wherein after said converting said difference in said refractive index of said nitride film and said ceramic substrate is <10.051.

10. The method of claim 1 , wherein, after said converting of said nitride film, a compressive stress in said film is 1 MPa to 10 GPa.

11. The method of claim 1 , wherein said nitride film is an AlO a N b film, wherein a+b<1.5 and wherein said converted film is an AlO x N y film wherein x+y<1.5 and wherein x>a and y<b.

12. The method of claim 11 , wherein a is from 0 to 0.5.

13. The method of claim 11 , wherein a=0.

14. The method of claim 11 , wherein x is from 0.5 to 1.5.

15. The method of claim 11 , wherein x=1.5 and y=0.

16. The method of claim 1 , wherein said nitride film is a SiCON film and wherein said converted film is SiO x N y film, wherein x+y<2.

Assignees

• Sinmat Inc
• Univ Florida
• Entegris Inc

Inventors

• Singh Rajiv K
• Singh Deepika

Classifications

• H04M1/0266 Primary

  for a display module assembly · CPC title

• G06F1/1637

  Details related to the display arrangement, including those related to the mounting of the display in the housing · CPC title

• C30B33/00

  After-treatment of single crystals or homogeneous polycrystalline material with defined structure (C30B31/00 takes precedence) · CPC title

• C30B29/20

  Aluminium oxides · CPC title

• C23C16/308

  Oxynitrides · CPC title