Measuring device based on an optical measurement in an opto-mechanical cavity
US-2020141805-A1 · May 7, 2020 · US
US10867500B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10867500-B2 |
| Application number | US-201916564300-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 9, 2019 |
| Priority date | Feb 25, 2019 |
| Publication date | Dec 15, 2020 |
| Grant date | Dec 15, 2020 |
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The present disclosure provide a gas monitoring device, a gas monitoring system, a gas monitoring method, a cabinet, and a computer readable storage medium. The gas monitoring device includes: a tubular housing, a light transmission module arranged at one end of the tubular housing, and a gas detecting module arranged at the other end of the tubular housing, in which a first end surface of the light transmission module, a second end surface of the gas detecting module and the tubular housing form a cavity, and the first end surface and the second end surface are parallel to each other; the light transmission module is configured to input incident light to the cavity, and the gas detecting module is configured to adjust a distance between the second end surface and the first end surface according to a concentration of the gas to be detected.
Opening claim text (preview).
What is claimed is: 1. A gas monitoring device, comprising a tubular housing, a light transmission module arranged at one end of the tubular housing, and a gas detecting module arranged at the other end of the tubular housing, wherein a first end surface of the light transmission module proximate to the gas detecting module, a second end surface of the gas detecting module proximate to the first end surface, and the tubular housing form a cavity, and the first end surface and the second end surface are parallel to each other; the light transmission module is configured to input incident light to the cavity through the first end surface; the gas detecting module is configured to adjust a distance between the second end surface and the first end surface according to a concentration of a gas to be detected; and wherein the gas detecting module comprises a gas-sensitive film layer arranged on one side of the tubular housing away from the light transmission module and a reflective film arranged to be attached in the tubular housing for forming the second end surface, and the gas-sensitive film layer, the reflective film and the tubular housing form a hollow structure, the hollow structure is with a compressed gas; the gas-sensitive film layer is configured to adsorb the gas to be detected; and the reflective film is configured to move the second end surface toward the first end surface according to a mass of the gas adsorbed by the gas-sensitive film layer. 2. The gas monitoring device of claim 1 , wherein the light transmission module comprises a sensing optical fiber arranged to be attached on an inner wall of the tubular housing, and the sensing optical fiber comprises a fiber core and an optical fiber tube for wrapping the fiber core; and the sensing optical fiber is configured to input incident light entering the fiber core into the cavity. 3. The gas monitoring device of claim 1 , wherein a material of the gas-sensitive film layer comprises one or more of a composite polymer gas-sensitive material and a conjugated polymer gas-sensitive material. 4. The gas monitoring device of claim 3 , wherein the composite polymer gas-sensitive material comprises one or more of polyimide, polyethylene, polytetrafluoroethylene, and polyester; and metal particles, tetrathiafulvalene 7,7,8,8-tetracyanoquinodimethane salt or carbon nanotube is used as a conductive filler. 5. The gas monitoring device of claim 3 , wherein the conjugated polymer gas-sensitive material comprises one or more of poly(bistributyl-phosphine)-platinum-diethynylbiphenyl, poly-2,5-dibutoxyethynylbenzene and poly-2,5-dioctyloxyethynylbenzene. 6. The gas monitoring device of claim 1 , wherein a material of the reflective film comprises titanium oxide or silicon oxide. 7. The gas monitoring device of claim 1 , wherein the gas detecting module is further configured to move the second end surface toward a position proximate to the first end surface when it is detected that the concentration of the gas to be detected increases, and further configured to move the second end surface toward a position away from the first end surface when it is detected that the concentration of the detection gas to be detected decreases. 8. The gas monitoring device of claim 7 , wherein the sensitivity of the gas monitoring device is in direct proportion to a wavelength of incident light reaching the first end surface. 9. A gas monitoring system, comprising a light source device, the gas monitoring device of claim 1 , a receiving device and a processing device, wherein the light source device is connected to the light transmission module of the gas monitoring device, and configured to input incident light to the cavity through the light transmission module; the receiving device is connected to the light transmission module of the gas monitoring device, and configured to receive a first light beam and a second light beam emitted by the incident light after passing through the cavity, and transmit a received optical signal to the processing device; and the processing device is connected to the receiving device, and configured to determine whether the concentration of the gas to be detected is greater than a safety threshold according to a phase difference between the first light beam and the second light beam. 10. The gas monitoring system of claim 9 , wherein the gas detecting module in the gas monitoring device comprises a gas-sensitive film layer arranged on one side of the tubular housing away from the light transmission module and a reflective film arranged to be attached in the tubular housing for forming the second end surface, and the gas-sensitive film layer, the reflective film and the tubular housing form a hollow structure, the hollow structure is filled with a compressed gas; the gas-sensitive film layer is configured to adsorb the gas to be detected; and the reflective film is configured to move the second end surface toward the first end surface according to a mass of a gas adsorbed by the gas-sensitive film layer. 11. The gas monitoring system of claim 9 , further comprising: an isolation device connected between the light source device and the gas monitoring device and configured to individually propagate incident light emitted from the light source device to the gas monitoring device. 12. The gas monitoring system of claim 9 , further comprising: a beam splitting device connecting the light source device and the receiving device in parallel to the gas monitoring device, and configured to perform a beam splitting treatment to the incident light input by the light source device to the gas monitoring device and the light emitted after passing through the gas monitoring device. 13. The gas monitoring system of claim 9 , further comprising: a warning device connected to the processing device, and configured to send out an alarm signal when the processing device determines that the concentration of the gas to be detected is greater than the safety threshold. 14. The gas monitoring system of claim 9 , wherein the incident light input by the light source device through the light transmission module to the cavity has a wavelength ranging from 1300 nm to 1680 nm. 15. A gas monitoring method, performed by the gas monitoring system of claim 9 , the method comprising: turning on the light source device to input incident light to the gas monitoring device; receiving the first light beam and the second light beam emitted by the incident light after passing through the gas monitoring device; and determining whether the concentration of the gas to be detected is greater than the safety threshold according to the phase difference between the first light beam and the second light beam. 16. The gas monitoring method of claim 15 , further comprising: testing with a standard substance in advance to determine a critical value of a variation in the phase difference between the first light beam and the second light beam when the concentration of the gas to be detected reaches the safety threshold; wherein determining whether the concentration of the gas to be detected is greater than the safety threshold according to the phase difference between the first light beam and the second light beam comprises: determining that the concentration of the gas to be detected reaches the safety threshold when the variation in the phase difference between the first light beam and the second light beam reaches the critical value. 17. The gas monitoring method of claim 15 , further comprising: sending out an alarm signal when it is determined that th
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