Methods, systems, and apparatus for mass flow verification based on rate of pressure decay

Patent metadata

Field	Value
Publication number	US-10866135-B2
Application number	US-201815936428-A
Country	US
Kind code	B2
Filing date	Mar 26, 2018
Priority date	Mar 26, 2018
Publication date	Dec 15, 2020
Grant date	Dec 15, 2020

Abstract

Mass flow verification systems and apparatus verify mass flow rates of mass flow controllers (MFCs) based on pressure decay principles. Embodiments include a location for coupling a calibrated gas flow standard or a MFC to be tested in a line to receive a gas flow from a gas supply; a control volume serially coupled to the location in the line to receive the gas flow; a flow restrictor serially coupled to the control volume; a pump serially coupled to the flow restrictor; and a controller adapted to allow the gas supply to flow gas through the mass flow control verification system to achieve a stable pressure in the control volume, terminate the gas flow from the gas supply, and measure a rate of pressure decay in the control volume over time. Numerous additional aspects are disclosed.

First claim

What is claimed is:

1. A mass flow control verification system, comprising:
a line, the line comprising a location for coupling a mass flow controller (MFC) to be tested and is to receive a gas flow from a gas supply;
a control volume serially coupled to the line to receive the gas flow;
a flow restrictor serially coupled to the control volume;
a valve coupled between the location for the MFC and the control volume; and
a controller adapted to:
allow the gas supply to flow gas through the line;
detect a stable pressure in the control volume;
terminate the gas flow from the gas supply by closing the valve in response to detection of the stable pressure;
measure a rate of pressure decay in the control volume over time;
detect a decaying pressure inflection point in the measured rate of pressure decay over time;
determine an equation that fits a curve of the pressure decay after the decaying pressure inflection point; and
calculate, using the equation via backward extrapolation, a corrected value for the rate of pressure decay at a time the valve was closed.

2. The mass flow control verification system of claim 1 , wherein the decaying pressure inflection point indicates a point on the curve after which a mass flow rate of the MFC is steady.

3. The mass flow control verification system of claim 1 , wherein the controller is configured to:
determine, using the corrected value of the rate of pressure decay at the time the valve was closed, an actual mass flow rate through the MFC; and
determine an error in measurement of the MFC by comparing a set point of the MFC to the actual mass flow rate of the MFC.

4. The mass flow control verification system of claim 1 , wherein the flow restrictor is at least one of a drilled orifice flow restrictor and a porous media flow restrictor.

5. The mass flow control verification system of claim 1 , further comprising a second valve coupled between the control volume and the flow restrictor, and operable by the controller to cause pressure to build in the control volume.

6. The mass flow control verification system of claim 1 , further comprising a second volume couplable to the control volume and operable by the controller to boost pressure in the control volume by supplying pressurized gas to the control volume.

7. The mass flow control verification system of claim 6 , further comprising a first valve for coupling the second volume to the gas supply and a second valve for coupling the second volume to the control volume.

8. The mass flow control verification system of claim 6 , further comprising a pump serially coupled to the flow restrictor.

9. The mass flow control verification system of claim 1 , wherein the MFC is calibrated based on the corrected value for the rate of pressure decay.

10. A method comprising:
allowing, by a controller, a gas supply to flow gas through a line, the line comprising a location for coupling a mass flow controller (MFC) to be tested;
detecting, by the controller, a stable pressure in a control volume coupled to the line;
terminating, by the controller, the gas flow from the gas supply by closing a valve in response to the detecting, the valve coupled between the location for the MFC and the control volume;
measuring, by the controller, a rate of pressure decay in the control volume over time to determine a measured rate of pressure decay;
detecting, by the controller, a decaying pressure inflection point in the measured rate of pressure decay over time;
determining, by the controller, an equation that fits a curve of the pressure decay after the decaying pressure inflection point; and
calculating, by the controller, using the equation via backward extrapolation, a corrected value for the rate of pressure decay at a time the valve was closed.

11. The method of claim 10 , wherein the decaying pressure inflection point indicates a point on the curve after which a mass flow rate of the MFC is steady.

12. The method of claim 10 , further comprising calibrating the MFC based on the corrected value for the rate of pressure decay.

13. The method of claim 10 , further comprising:
determining, using the corrected value of the rate of pressure decay at the time the valve was closed, an actual mass flow rate through the MFC; and
determining an error in measurement of the MFC by comparing a set point of the MFC to the actual mass flow rate of the MFC.

14. The method of claim 10 , further comprising restricting gas flow using a flow restrictor serially coupled to the control volume.

15. The method of claim 14 , further comprising causing pressure to build in the control volume by controlling a second valve coupled between the control volume and the flow restrictor.

16. The method of claim 10 , further comprising boosting pressure, by the controller, in the control volume by causing pressurized gas to flow from a second volume that is couplable to the control volume.

Assignees

• Applied Materials Inc

Inventors

• Ye Zhiyuan
• Hough Justin
• Josephson Marcel E

Classifications

• H10P72/0402 Primary

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• G05D7/0635 Primary

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• G01F1/80

  operating by measuring pressure, force, momentum, or frequency of a fluid flow to which a rotational movement has been imparted · CPC title

• G01F25/10

  of flowmeters · CPC title

• G01F25/00 Primary

  Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume · CPC title