Synthetic quartz glass lid precursor, synthetic quartz glass lid, and preparation methods thereof

Patent metadata

Field	Value
Publication number	US-10865141-B2
Application number	US-201815883575-A
Country	US
Kind code	B2
Filing date	Jan 30, 2018
Priority date	Jan 31, 2017
Publication date	Dec 15, 2020
Grant date	Dec 15, 2020

Abstract

A synthetic quartz glass lid for use in optical device packages is prepared by furnishing a synthetic quartz glass lid precursor comprising a synthetic quartz glass substrate (1) and a metal or metal compound film (2), and forming a metal base adhesive layer (3) on the metal or metal compound film (2). The metal or metal compound film contains Ag, Bi, and at least one element selected from P, Sb, Sn and In.

First claim

The invention claimed is:

1. A synthetic quartz glass lid precursor comprising a synthetic quartz glass substrate and a metal or metal compound film on one major surface thereof, the metal or metal compound film containing silver, bismuth, and at least one element selected from the group consisting of phosphorus, antimony, tin and indium, wherein
the metal or metal compound film has a surface roughness (Ra) of up to 2 nm.

2. The lid precursor of claim 1 wherein the metal or metal compound film is formed on an outer peripheral portion of the major surface of the substrate.

3. The lid precursor of claim 1 wherein the metal or metal compound film has a thickness of 1 to 20 μm.

4. The lid precursor of claim 1 wherein the metal or metal compound film has a flatness of up to 10 μm on its surface.

5. The lid precursor of claim 1 which is used in optical device packages.

6. A synthetic quartz glass lid comprising the lid precursor of claim 1 , and a metal base adhesive layer on the surface of the metal or metal compound film.

7. The lid of claim 6 wherein the metal base adhesive layer contains at least one element selected from the group consisting of gold, silver, copper, palladium, tin, tungsten, and tellurium.

8. A method for preparing the synthetic quartz glass lid precursor of claim 1 , comprising the steps of:
coating one major surface of a synthetic quartz glass substrate with a metal paste comprising silver, bismuth, and at least one element selected from the group consisting of phosphorus, antimony, tin and indium in a dispersing medium, and
heating and sintering the metal paste coating to form the metal or metal compound film on the substrate.

9. The method of claim 8 wherein the metal paste has a silver content of 65 to 95% by weight.

10. A method for preparing a synthetic quartz glass lid from the synthetic quartz glass lid precursor prepared by the method of claim 8 ,
the method comprising the step of coating the surface of the metal or metal compound film with another metal paste to form a metal base adhesive layer thereon.

11. The method of claim 10 wherein the other metal paste contains at least one element selected from the group consisting of gold, silver, copper, palladium, tin, tungsten, and tellurium, and a dispersing medium.

Assignees

• Shinetsu Chemical Co

Inventors

• Matsui Harunobu
• Harada Daijitsu
• Takeuchi Masaki

Classifications

• H10W74/01

  Manufacture or treatment · CPC title

• H10W74/43 Primary

  comprising oxides, nitrides or carbides, e.g. ceramics or glasses · CPC title

• C03C17/3642 Primary

  the multilayer coating containing a metal layer · CPC title

• C03C17/10 Primary

  by deposition from the liquid phase · CPC title

• C03C17/3644

  the metal being silver · CPC title