Formation of pores in atomically thin layers
US-2020062600-A1 · Feb 27, 2020 · US
US10865112B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10865112-B2 |
| Application number | US-201816218859-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 13, 2018 |
| Priority date | Dec 13, 2018 |
| Publication date | Dec 15, 2020 |
| Grant date | Dec 15, 2020 |
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Modified substrates are provided having nano- or microscale wells, tracks, channels, pores or perforations. Also provided are methods of making the same.
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What is claimed is: 1. A modified substrate comprising: a first face and an opposite facing second face 3 to 30 μm from each other defining a thickness; a first plurality of track-etched pores through the substrate; and a well in the first face of the substrate, wherein the well is from 100 to 1,000 μm in diameter, and wherein the well comprises a bottom surface that is 1 to 10 μm from the second face of the substrate, and wherein the pores have an average diameter between 10-2,000 nm. 2. The modified substrate of claim 1 , wherein the first plurality of pores comprises about 1×10 5 to 1×10 11 pores per cm 2 of substrate. 3. The modified substrate of claim 2 , wherein the first plurality of pores comprises about 1×10 7 to 1×10 10 pores per cm 2 of substrate and has an average pore diameter between 100-2,000 nm. 4. The modified substrate of claim 2 , wherein the first plurality of pores comprises about 1×10 5 to 1×10 8 pores per cm 2 of substrate. 5. The modified substrate of claim 1 , wherein the second face comprises a coating of a two dimensional material or multiple layers thereof, wherein the two dimensional material is selected from graphene, graphene platelets, black phosphorous, hafnium dioxide, molybdenum disulfide, molybdenum diselenide, carbide, a carbon nanomembrane (CNM), carbon nanotubes (CNT), graphyne, borophene, germanene, silicone, Si 2 BN, stanine, phosphorene, bismuthene, molybdenite, palladium, rhodium, Pb/Sn alloy, Pb/Bi alloy, aerographite, aerogel, nanogel, carbon nanofoam, amorphous carbon and hydrocarbons, hexagonal boron nitride, borocarbonitride, germanane, transition metal dichalcogenide, or any combination thereof. 6. The modified substrate of claim 5 , wherein the two dimensional material or multiple layers thereof comprises graphene. 7. The modified substrate of claim 5 , wherein the two dimensional material comprises a plurality of perforations therethrough. 8. The modified substrate of claim 5 , further comprising an intermediate layer comprising electrospun nanofibers or carbon nanotubes, between the second face and the two dimensional material. 9. The modified substrate of claim 1 , wherein the substrate comprises polysulfones, polyurethane, polymethylmethacrylate (PMMA), polyglycolid acid (PGA), polylactic acid (PLA), polyethylene glycol (PEG), polylactic-co-glycolic acid (PLGA), polyamides, polyimides, polypropylene, polyethersulfones (PES), polyvinylidine fluoride (PVDF), cellulose acetate, polyethylene, polyethylene terephthalate (PET), polypropylene, polycarbonate, polytetrafluoroethylene (PTFE), polyvinylchloride (PVC), polyether ether ketone (PEEK), polycaprolactone, polydimethylsiloxane (PDMS), block co-polymers of any thereof, or mixtures of any two or more thereof. 10. The modified substrate of claim 1 , further comprising nanowires or a support mesh embedded therein. 11. The modified substrate of claim 1 , wherein the modified substrate is comprised of two or more materials anisotropically arranged or present in a gradient. 12. The modified substrate of claim 1 , wherein the first plurality of pores comprises pores having a diameter at the first face that is between 5-20% greater than their diameter at the second face. 13. The modified substrate of claim 1 , further comprising a second plurality of pores therethrough, wherein the second plurality of pores comprises pores having an average diameter of up to 50% the average diameter of the pores of the first plurality of pores and wherein the second plurality of pores is comprised of 1×10 7 to 1×10 13 pores per cm 2 of substrate. 14. The modified substrate of claim 13 , wherein the pores of the first and/or second pluralities of pores comprise a diameter at the first face that is between 5-20% greater than their diameter at the second face. 15. The modified substrate of claim 13 , wherein the modified substrate has a porosity of between 20-50%. 16. The modified substrate of claim 15 , wherein the porosity is between 35% to 50%. 17. The modified substrate of claim 1 , wherein the first face further comprises functionalization, texturing, additional etching, plasma treatment, or a coating. 18. The modified substrate of claim 17 , wherein the coating is selected from a hydrogel, non-porous graphene, graphene oxide, carbon nanotubes or electrospun nanofibers. 19. The modified substrate of claim 1 , wherein all of the bottom surface is 1 to 10 μm from the second face of the substrate. 20. A modified substrate comprising: a first face and an opposite facing second face 6 to 30 μm from each other defining a thickness; a first plurality of pores through the substrate, comprising about 1×10 5 to 1×10 11 pores per cm 2 of substrate and pores having an average diameter between 10-10,000 nm; and a second plurality of pores through the substrate, comprising pores having an average diameter of 1% to 50% the average diameter of the pores of the first plurality of pores, wherein the second plurality of pores is comprised of 1×10 7 to 1×10 13 pores per cm 2 of substrate, wherein the second face comprises a coating of a two dimensional material or multiple layers thereof, wherein the two dimensional material is selected from graphene, graphene platelets, black phosphorous, hafnium dioxide, molybdenum disulfide, molybdenum diselenide, carbide, a carbon nanomembrane (CNM), a carbon nanotube (CNT), amorphous carbon and hydrocarbons, graphyne, borophene, germanene, silicone, Si 2 BN, stanine, phosphorene, bismuthene, molybdenite, palladium, rhodium, Pb/Sn alloy, Pb/Bi alloy, aerographite, aerogel, nanogel, carbon nanofoam, hexagonal boron nitride, borocarbonitride, germanane, transition metal dichalcogenide, or any combination thereof. 21. The modified substrate of claim 20 , wherein the pores of the first and/or second pluralities of pores have a diameter at the first face that is between 5-20% greater than their diameter at the second face. 22. The modified substrate of claim 20 , wherein the porosity is between 35% to 50%. 23. The modified substrate of claim 20 , wherein the two dimensional material comprises graphene. 24. The modified substrate of claim 20 , wherein the two dimensional material comprises a plurality of perforations therethrough. 25. The modified substrate of claim 20 , further comprising an intermediate layer comprising electrospun nanofibers between the second face and the two dimensional material. 26. The modified substrate of claim 20 , wherein the substrate comprises polysulfones, polyurethane, polymethylmethacrylate (PMMA), polyglycolid acid (PGA), polylactic acid (PLA), polyethylene glycol (PEG), polylactic-co-glycolic acid (PLGA), polyamides, polyimides, polypropylene, polyethersulfones (PES), polyvinylidine fluoride (PVDF), cellulose acetate, polyethylene, polyethylene terephthalate (PET), polypropylene, polycarbonate, polytetrafluoroethylene (PTFE), polyvinylchloride (PVC), polyether ether ketone (PEEK), polycaprolactone, polydimethylsiloxane (PDMS), block co-polymers of any thereof, or mixtures of any two or more thereof. 27. The modified substrate of claim 20 , further comprising nanowires or a support mesh embedded therein.
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