Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US10858334B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10858334-B2 |
| Application number | US-201916243394-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 9, 2019 |
| Priority date | Jan 9, 2018 |
| Publication date | Dec 8, 2020 |
| Grant date | Dec 8, 2020 |
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An oxidative homocoupling method of synthesizing certain 2,2′-bithiophenes from thiophenes using oxygen as the terminal oxidant is disclosed. In non-limiting examples, the method uses oxygen along with a catalytic system that includes palladium, an assistive ligand, and a non-palladium metal additive to catalyze one of the following reactions: Associated catalytic systems and compositions are also disclosed.
Opening claim text (preview).
We claim: 1. A method for synthesizing a 2,2′-bithiophene from two thiophenes, the method comprising: contacting the two thiophenes with oxygen gas and a catalyst comprising palladium and a ligand selected from the group consisting of a pyridine; a 1,10-phenanthroline; a 2,2′-bipyridine, a 2,2′-bipyrimidine; a 4,5-diazafluoren-9-one; a quinoline; a 1,10-phenanthroline-5,6-dione; a bis(arylimino)acenaphthene; and a 2,2′-biquinoline; whereby the two thiophenes are covalently coupled by aerobic oxidation to form the 2,2′-bithiophene; wherein the two thiophenes are not substituted exclusively with alkyl groups, alkoxy groups, alkanoate groups, alkanamide groups, alkoxyalkyl groups, and benzoalkyl groups. 2. The method of claim 1 , wherein the 2,2′-bithiophene that is synthesized has the chemical structure: and the two thiophenes have the chemical structure: wherein X is a halogen, an alkyl, a trimethylsilyl (TMS), a thiophenyl, or a dioxolanyl: and wherein R 1 and R 2 are each independently selected from the group consisting of hydrogen, bromine, chlorine, fluorine, an alkoxycarbonyl group, an oxoalkyl group, and an alkyl group. 3. The method of claim 2 , wherein the two thiophenes are 2,3-dibromothiophene, 2,4-dibromothiophene, 2-bromo-4-fluorothiophene 2-bromo-3-dodecylthiophene, 2-bromothiophene, 2-chlorothiophene, 2-bromo-3-methylthiophene, 2-bromo-3-hexylthiophene, 2-chloro-3-hexylthiophene, and wherein the corresponding 2,2′-bithiophene is 4,4′,5,5′-tetrabromo-2,2′-bithiophene (X is bromine, R 1 is bromine, and R 2 is hydrogen), 3,3′,5,5′-tetrabromo-2,2′-bithiophene (X is bromine, R 1 is hydrogen, and R 2 is bromine), 5,5′-dibromo-3,3′-difluoro-2,2′-bithiophene (X is bromine, R 1 is hydrogen, and R 2 is fluorine), 5,5′-dibromo-4,4′-didocecyl-2,2′-bithiophene (X is bromine, R 1 is n-dodecyl, and R 2 is hydrogen), 5,5′-dibromo-2,2′-bithiophene (X is bromine, R 1 is hydrogen, and R 2 is hydrogen), 5,5′-dichloro-2,2′-bithiophene (X is chlorine, R 1 is hydrogen, and R 2 is hydrogen), 5,5′-dibromo-4,4′-dimethyl-2,2′-bithiophene (X is bromine, R 1 is methyl, and R 2 is hydrogen), 5,5′-dibromo-4,4′-dihexyl-2,2′-bithiophene (X is bromine, R 1 is n-hexyl, and R 2 is hydrogen) 5,5′-dichloro-4,4′-dihexyl-2,2′-bithiophene (X is chlorine, R 1 is n-hexyl, and R 2 is hydrogen), 4. The method of claim 1 , wherein the 2,2′-bithiophene that is synthesized is a 2,2′-bibenzo[b]thiophene, and wherein the two thiophenes are benzo[b]thiophenes. 5. The method of claim 4 , wherein the 2,2′-bibenzo[b]thiophene has the chemical structure: and the two benzo[b]thiophenes have the chemical structure: wherein R 1 , R 2 , R 3 , R 4 and R 5 are independently selected from the group consisting of hydrogen and bromine. 6. The method of claim 5 , wherein the 2,2′-bibenzo[b]thiophene that is synthesized is 3,3′-dibromo-2,2′-bibenzo[b]thiphene or 2,2′-bibenzo[b]thiophene, and wherein the two benzo[b]thiophenes are 3-bromobenzo[b]thiophene (R 1 is bromine; R 2 , R 3 , R 4 and R 5 are all hydrogen) or unsubstituted benzo[b]thiophene R 2 , R 3 , R 4 and R 5 are all hydrogen). 7. The method of claim 1 , wherein the 2,2′-bithiophene that is synthesized is a 5,5′-bis-(1-oxoalkyl)-2,2′-bithiophene, and wherein the two thiophenes are 2-(1-oxoalkyl)thiophenes. 8. The method of claim 7 , wherein the 5,5′-bis-(1-oxoalkyl)-2,2′-bithiophene has the chemical structure: and the two 2-(1-oxoalkyl)thiophenes have the chemical structure: wherein R 1 is selected from the group consisting of an alkyl group and hydrogen. 9. The method of claim 8 , wherein the 5,5′-bis-(1-oxoalkyl)-2,2′-bithiophene that is synthesized is 5,5′-bis(trimethylacetyl)-2,2′-bithiophene or 5,5′-bis(carbaldehyde)-2,2′-bithiophene, and wherein the two 2-(1-oxoalkyl)thiophenes are 2-trimethylacetylthiophene (R 1 is tert-butyl; R 2 and R 3 are hydrogen) or thiophene-2-carbaldehyde (R 1 , R 2 , and R 3 are all hydrogen). 10. The method of claim 1 , wherein the 2,2′-bithiophene analog that is synthesized is a 5,5′-bithiazole, and wherein the two thiophene analogs are thiazoles. 11. The method of claim 10 , wherein the 5,5′-bithiazole has the chemical structure: and the two thiazoles have the chemical structure: wherein R 1 is hydrogen and R 2 is bromine. 12. The method of claim 1 , wherein the ligand is selected from the group consisting of a 1,10-phenanthroline-5,6-dione; a 2,2′-bipyridine, a 2,2′-bipyrimidine; a 4,5-diazafluoren-9-one; a quinoline; a 1,10-phenanthroline; a bis(arylimino)acenaphthene; and a 2,2′-biquinoline. 13. The method of claim 12 , wherein the ligand is selected from the group consisting of: (a) a 1,10-phenanthroline-5,6-dione having the chemical formula: wherein (i) 1, 2, 3, 4, or 5 of R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are hydrogen, or (ii) all six of R 1 , R 2 , R 3 , R 4 , R 5 and R 6 are hydrogen (the ligand is 1,10-phenanthroline-5,6-dione (phd)); (b) a 2,2′-bipyridine having the chemical formula: wherein one or more of R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 and R 5 are independently selected from the group consisting of hydrogen, tert-butyl, methoxy, methyl, phenyl, and trifluoromethyl; (c) a 2,2′-bipyrimidine having the chemical formula: wherein one or more of R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 is hydrogen; (d) a 4,5-diazafluoren-9-one having the chemical formula: wherein one or more of R 1 , R 2 , R 3 , R 4 , R 5 , and R 6 is hydrogen; (e) a quinoline having the chemical formula: wherein one or more of R 1 , R 2 , R 3 , R 4 , R 5 , R 6 and R 7 is hydrogen; f) a 1,10-phenanthroline having the chemical formula: wherein one or more of R 1 , R 2 , R 3 , R 4 , R 5 , R 6 R 7 , and R 8 is independently selected form the group consisting of hydrogen, methyl, and phenyl; (g) a bis(arylimino)acenaphthene having the chemical formula:
comprising perfluoroalkyl groups or moieties · CPC title
comprising fluorine, e.g. trifluoroacetate · CPC title
Non-coordinating groups comprising only oxygen beside carbon or hydrogen · CPC title
C-H or C-C activation · CPC title
Non-coordinating groups comprising nitrogen · CPC title
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