Piezoelectric sensor and instrument including such a sensor

Patent metadata

Field	Value
Publication number	US-10854807-B2
Application number	US-201615561499-A
Country	US
Kind code	B2
Filing date	Mar 24, 2016
Priority date	Mar 25, 2015
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

Some embodiments are directed to a piezoelectric sensor, including a body with a central cavity; and a membrane extending over the cavity, which membrane is fastened to the body via its periphery and includes a carrier layer made of polymer and a sensitive layer made of piezoelectric polymer, the membrane being able to deform or vibrate. The sensitive layer is made of a material including a polymer filled with inorganic nanomaterials. Instrument including such a sensor.

First claim

The invention claimed is:

1. An instrument, comprising:
a piezoelectric sensor, including:
a body with a central cavity;
a membrane extending over the cavity;
the membrane being attached to the body via its periphery and includes a carrier layer made of polymer and a sensitive layer) made of piezoelectric polymer material; and
the membrane being capable of deforming or vibrating, wherein
the sensitive layer is made of a material comprising a polymer filled with Al 2 O 3 inorganic nanomaterials and not filled with organic nanomaterials;
the polymer of the sensitive layer is selected from the group comprising polyvinylidene fluoride (PVDF), vinylidene fluoride and trifluoroethylene copolymer P(VDF-TrFE) and polyamide-11;
the carrier layer is made of a material selected from the group including polyimide (PI) and polyether ether ketone (PEEK);
a first aluminium conductive layer is interposed between the carrier layer and the sensitive layer;
a second conductive layer is deposited on a portion of a free surface of the sensitive layer; and
a transmission rod, a first end of which is intended to be applied against a mass that is capable of vibrating, and a second end of which bears against the membrane of the sensor.

2. The instrument as claimed in claim 1 , wherein the nanomaterials are made of an inorganic material such as metals, semiconductors or dielectrics.

3. The instrument as claimed in claim 1 , wherein the thickness of the carrier layer is between 5 and 150 μm.

4. The instrument as claimed in claim 1 , wherein the membrane is attached to the body by bonding.

5. The instrument as claimed in claim 4 , wherein the membrane is attached to the body by the carrier layer.

6. The instrument as claimed in claim 1 , further including a head in which the sensor is housed, the rod being linked by an elastic mechanism to the head.

7. The instrument as claimed in claim 1 , wherein the second end of the rod includes a domed surface for bearing against the membrane.

8. The instrument as claimed in claim 1 , wherein the thickness of the carrier layer is 25 μm.

Assignees

• Univ De Lorraine

Inventors

• Rouxel Didier
• Vincent Brice
• Badie Laurent

Classifications

• G01H11/08 Primary

  using piezoelectric devices · CPC title

• H01L41/02

  Electricity · mapped topic

• H01L41/1138 Primary

  Electricity · mapped topic

• H01L41/183

  Electricity · mapped topic

• H10N30/308 Primary

  Membrane type · CPC title