Metal wiring and method of manufacturing the same, and metal wiring substrate and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-10854636-B2
Application number	US-201815916860-A
Country	US
Kind code	B2
Filing date	Mar 9, 2018
Priority date	Jul 27, 2001
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

A metal wiring suitable for a substrate of large size is provided. The present invention is characterized in that at least one layer of conductive film is formed on an insulating surface, a resist pattern is formed on the conductive film, and the conductive film having the resist pattern is etched to form a metal wiring while controlling its taper angle α in accordance with the bias power density, the ICP power density, the temperature of lower electrode, the pressure, the total flow rate of etching gas, or the ratio of oxygen or chlorine in etching gas. The thus formed metal wiring has less fluctuation in width or length and can satisfactorily deal with an increase in size of substrate.

First claim

What is claimed is:

1. A display device having a pixel portion, the pixel portion comprising:
a transistor over a first substrate, the transistor comprising a semiconductor layer having a first channel formation region and a gate electrode provided over the semiconductor layer;
a wiring electrically connected to one of a source region and a drain region in the semiconductor layer;
a pixel electrode electrically connected to the other of the source region and the drain region in the semiconductor layer;
a spacer over the transistor, the spacer overlapping with part of the wiring; and
a second substrate having a plurality of coloring layers, the second substrate provided over the first substrate with the plurality of coloring layers positioned therebetween,
wherein the spacer is overlapped with at least two of the plurality of coloring layers, and
wherein an end of the first channel formation region is aligned with an end of the gate electrode.

2. The display device according to claim 1 , wherein the spacer is overlapped with a red coloring layer and a blue coloring layer.

3. The display device according to claim 1 , wherein the spacer is a columnar spacer.

4. The display device according to claim 1 , wherein the semiconductor layer further includes a second channel formation region.

5. The display device according to claim 1 , wherein the gate electrode comprises W and Mo.

6. The display device according to claim 1 , further comprising an orientation film on the pixel electrode and the spacer.

7. The display device according to claim 1 , further comprising a liquid crystal material provided between the first substrate and the second substrate.

8. A cellular phone including the display device according to claim 1 .

9. A display device having a pixel portion, the pixel portion comprising:
a transistor over a first substrate, the transistor comprising a semiconductor layer having a first channel formation region and a gate electrode provided over the semiconductor layer;
a wiring electrically connected to one of a source region and a drain region in the semiconductor layer;
a pixel electrode electrically connected to the other of the source region and the drain region in the semiconductor layer;
a spacer over the transistor, the spacer overlapping with part of the wiring; and
a second substrate having a plurality of coloring layers, the second substrate provided over the first substrate with the plurality of coloring layers positioned therebetween,
wherein the spacer is overlapped with part of the plurality of coloring layers,
wherein an end of the gate electrode has a tapered portion, and
wherein the first channel formation region is overlapped with the tapered portion of the end of the gate electrode.

10. The display device according to claim 9 , wherein the spacer is overlapped with a red coloring layer and a blue coloring layer.

11. The display device according to claim 9 , wherein the spacer is a columnar spacer.

12. The display device according to claim 9 , wherein the semiconductor layer further includes a second channel formation region.

13. The display device according to claim 9 , wherein the gate electrode comprises W and Mo.

14. The display device according to claim 9 , further comprising an orientation film on the pixel electrode and the spacer.

15. The display device according to claim 9 , further comprising a liquid crystal material provided between the first substrate and the second substrate.

16. A cellular phone including the display device according to claim 9 .

17. A display device having a pixel portion, the pixel portion comprising:
a transistor over a first substrate, the transistor comprising a semiconductor layer having a first channel formation region and a gate electrode provided over the semiconductor layer;
a source wiring electrically connected to the semiconductor layer;
a pixel electrode electrically connected to the semiconductor layer;
a spacer over the transistor, the spacer overlapping with part of the source wiring; and
a second substrate having a plurality of coloring layers, the second substrate provided over the first substrate with the plurality of coloring layers positioned therebetween,
wherein the spacer is overlapped with part of the plurality of coloring layers,
wherein an end of the gate electrode has an upper tapered portion and a lower tapered portion, and
wherein the first channel formation region is overlapped with the lower tapered portion of the gate electrode.

18. The display device according to claim 17 , wherein the spacer is overlapped with a red coloring layer and a blue coloring layer.

19. The display device according to claim 17 , wherein the spacer is a columnar spacer.

20. The display device according to claim 17 , wherein the semiconductor layer further includes a second channel formation region.

21. The display device according to claim 17 , wherein the gate electrode comprises W and Mo.

22. The display device according to claim 17 , further comprising an orientation film on the pixel electrode and the spacer.

23. The display device according to claim 17 , further comprising a liquid crystal material provided between the first substrate and the second substrate.

24. A cellular phone including the display device according to claim 17 .

Assignees

• Semiconductor Energy Lab

Inventors

• Ono Koji
• Suzawa Hideomi

Classifications

• H10P50/267

  using plasmas · CPC title

• H10W20/031

  of conductive parts of the interconnections · CPC title

• C23F4/00 Primary

  Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00 · CPC title

• H10D86/441

  Interconnections, e.g. scanning lines · CPC title

• H10D86/00

  Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates · CPC title