Sputtering target of sintered Sb—Te-based alloy

Patent metadata

Field	Value
Publication number	US-10854435-B2
Application number	US-201515102305-A
Country	US
Kind code	B2
Filing date	Feb 20, 2015
Priority date	Mar 25, 2014
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

Sb—Te-based alloy sintered sputtering target having a Sb content of 10 to 60 at %, a Te content of 20 to 60 at %, and remainder being one or more types of elements selected from Ag, In, and Ge and unavoidable impurities, wherein an average grain size of oxides is 0.5 μm or less. An object of this invention is to improve the texture of the Sb—Te-based alloy sintered sputtering target in order to prevent the generation of arcing during sputtering and improve the thermal stability of the sputtered film.

First claim

The invention claimed is:

1. A Sb—Te-based alloy sintered sputtering target, wherein:
the target has a composition consisting of Sb in a content of 10 to 60 at %, Te in a content of 20 to 60 at %, oxygen in an average content in the target of 1500 to 2500 wtppm, one or more elements selected from the group consisting of Ag, In, and Ge, one or more oxides of Mg, Al, Si, Ti, Zr, Nb, Hf, and Ta in an amount of 2 to 5 mol %, and unavoidable impurities;
the target comprises oxide grains;
an average size of the oxide grains is 0.5 μm or less;
a number of the oxide grains having a size of 1 μm or more is 0.5% or less relative to a total number of the oxide grains; and
a maximum size of the oxide grains is 1.5 μm or less.

2. A Sb—Te-based alloy sintered sputtering target, wherein:
the target has a composition consisting of Sb in a content of 10 to 60 at %, Te in a content of 20 to 60 at %, one or more elements selected from the group consisting of Ag, In, and Ge, one or more elements selected from the group consisting of Ga, Ti, Au, Pt, Pd, Bi, B, C, Mo, and Si in an amount of 30 at % or less, oxygen in an average content in the target of 1500 to 2500 wtppm, and unavoidable impurities;
the target comprises oxide grains;
an average size of the oxide grains is 0.5 μm or less;
a number of the oxide grains having a size of 1 μm or more is 0.5% or less relative to a total number of the oxide grains; and
a maximum size of the oxide grains is 1.5 μm or less.

3. The Sb—Te-based alloy sintered sputtering target according to claim 2 , wherein a maximum content of oxygen in the target is 3500 ppm or less.

4. The Sb—Te-based alloy sintered sputtering target according to claim 2 , wherein a concentration difference of oxygen in the target is 2000 wtppm or less.

Assignees

• Jx Nippon Mining & Metals Corp

Inventors

• Koido Yoshimasa

Classifications

• C22C12/00 Primary

  Alloys based on antimony or bismuth · CPC title

• B22F3/10

  Sintering only · CPC title

• C22C1/05

  Mixtures of metal powder with non-metallic powder (C22C1/08 takes precedence) · CPC title

• C23C14/0623

  Sulfides, selenides or tellurides · CPC title

• C22C28/00

  Alloys based on a metal not provided for in groups C22C5/00 - C22C27/00 · CPC title