Mirror driving apparatus and method for manufacturing thereof

Patent metadata

Field	Value
Publication number	US-10852529-B2
Application number	US-201616065862-A
Country	US
Kind code	B2
Filing date	Dec 13, 2016
Priority date	Feb 17, 2016
Publication date	Dec 1, 2020
Grant date	Dec 1, 2020

Abstract

In a mirror driving apparatus, a pair of beam portions includes: a pair of first beams directly adjacent to a reflector to sandwich the reflector between the first beams; and a pair of second beams each coupled to one side of a corresponding one of the first beams, the one side being opposite to the reflector with respect to the corresponding one of the first beams. A plurality of electrodes are spaced from each other on a main surface of each of the first beams, a piezoelectric material being interposed between the main surface and the plurality of electrodes. The first beams are displaceable crosswise to the main surface in respective directions opposite to each other. The pair of second beams is displaceable in a direction connecting the first beams and the second beams, along the main surface of the second beams.

First claim

The invention claimed is:

1. A mirror driving apparatus comprising:
a reflector capable of reflecting incident light; and
a pair of beam portions adjacent to the reflector to sandwich the reflector between the beam portions as seen in plan view, wherein
the pair of beam portions includes:
a pair of first beams directly adjacent to the reflector to sandwich the reflector between the first beams; and
a pair of second beams each coupled to one side of a corresponding one of the first beams, the one side being opposite to the reflector with respect to the corresponding one of the first beams;

a plurality of electrodes are spaced from each other on a main surface of each of the pair of first beams, a piezoelectric material being interposed between the main surface and the plurality of electrodes,
the first beams of the pair of first beams are displaceable crosswise to the main surface in respective directions opposite to each other,
first boundary portions directly adjacent to the reflector and directly adjacent to the pair of first beams are displaceable crosswise to the main surface, and the pair of first beams is smaller in width than the reflector,
the pair of second beams is displaceable in a direction connecting the pair of first beams and the pair of second beams, along a main surface of the second beams,
respective voltages of opposite polarities are applicable to a first electrode and a second electrode of the plurality of electrodes, the first electrode being located at a smaller distance from the reflector than a distance between the second electrode and the reflector, the second electrode being adjacent to the first electrode,
the reflector is configured to be inclined about an axis by deformation of the piezoelectric material caused by the voltages, the axis being orthogonal to a line connecting the reflector and the first boundary portions between the reflector and the pair of first beams,
respective voltages identical in absolute value and opposite in polarity to each other are applied to the first electrode for one first beam of the pair of first beams and the first electrode for the other first beam of the pair of first beams, the one first beam being different from the other first beam,
respective voltages identical in absolute value and opposite in polarity to each other are applied to the second electrode for the one first beam of the pair of first beams and the second electrode for the other first beam of the pair of first beams,
a plurality of rows each including the pair of first beams and the pair of second beams are arranged, and
a first row and a second row that are included in the plurality of rows are arranged to cross each other as seen in plan view.

2. The mirror driving apparatus according to claim 1 , wherein
at the first boundary portions, the reflector is directly adjacent to the pair of first beams, and
the first boundary portions are displaceable following displacement of the pair of first beams.

3. A mirror driving apparatus comprising:
a reflector capable of reflecting incident light; and
a pair of beam portions adjacent to the reflector to sandwich the reflector between the beam portions as seen in plan view, wherein
the pair of beam portions includes:
a pair of first beams directly adjacent to the reflector to sandwich the reflector between the first beams; and
a pair of second beams each coupled to one side of a corresponding one of the first beams, the one side being opposite to the reflector with respect to the corresponding one of the first beams:

a plurality of electrodes are spaced from each other on a main surface of each of the pair of first beams, a piezoelectric material being interposed between the main surface and the plurality of electrodes,
the first beams of the pair of first beams are displaceable crosswise to the main surface in respective directions opposite to each other,
first boundary portions directly adjacent to the reflector and directly adjacent to the pair of first beams are displaceable crosswise to the main surface, and the pair of first beams is smaller in width than the reflector,
the pair of second beams is displaceable in a direction connecting the pair of first beams and the pair of second beams, along a main surface of the second beams,
respective voltages of opposite polarities are applicable to a first electrode and a second electrode of the plurality of electrodes, the first electrode being located at a smaller distance from the reflector than a distance between the second electrode and the reflector, the second electrode being adjacent to the first electrode,
the reflector is configured to be inclined about an axis by deformation of the piezoelectric material caused by the voltages, the axis being orthogonal to a line connecting the reflector and the first boundary portions between the reflector and the pair of first beams,
respective voltages identical in absolute value and opposite in polarity to each other are applied to the first electrode for one first beam of the pair of first beams and the first electrode for the other first beam of the pair of first beams, the one first beam being different from the other first beam,
respective voltages identical in absolute value and opposite in polarity to each other are applied to the second electrode for the one first beam of the pair of first beams and the second electrode for the other first beam of the pair of first beams,
a plurality of rows each including the pair of first beams and the pair of second beams are arranged, and
a first row and a second row that are included in the plurality of rows are arranged to cross each other as seen in plan view,
wherein the reflector is inclined by an electric field applied to the piezoelectric material to satisfy
θ1=α·θ2

wherein θ 1 is a central angle of an arc formed by a region overlapping the first electrode as seen in plan view as a result of voltage application to the first electrode, and θ 2 is a central angle of an arc formed by a region overlapping the second electrode as seen in plan view as a result of voltage application to the second electrode, and
a value of α is determined depending on a ratio of a dimension of the reflector to a dimension of a corresponding one of the pair of first beams, the value of a being determined as a coefficient minimizing an angle error under a dimension condition in a direction in which the reflector and the pair of first beams are arranged.

4. A method for manufacturing a mirror driving apparatus, comprising:
forming a reflector capable of reflecting incident light; and
forming a pair of beam portions adjacent to the reflector to sandwich the reflector between the beam portions as seen in plan view, wherein
the pair of beam portions includes:
a pair of first beams directly adjacent to the reflector to sandwich the reflector between the first beams; and
a pair of second beams each coupled to one side of a corresponding one of the first beams, the one side being opposite to the reflector with respect to the corresponding one of the first beams,

a plurality of electrodes are spaced from each other on a main surface of each of the pair of first beams, a piezoelectric material being interposed between the main surface and the plurality of electrodes,
the first beams of the pair of first beams are displaceable crosswise to the main surface in respective directions opposite to each other,
first boundary portions directly adjacent to the reflector and directly adjacent to the pair of first beams are displaceable crosswise to the main surface, and the pair of first beams is smaller in width than the reflector,
the pair of second beams is displaceable in a direction connecting the pair of first beams and the pair of second beams, along a main surface of the second beams,
respective

Assignees

• Mitsubishi Electric Corp

Inventors

• Ito Takahiko
• Konno Nobuaki
• Hirata Yoshiaki
• Yoshida Yukihisa

Classifications

• G02B26/0858

  the reflecting means being moved or deformed by piezoelectric means · CPC title

• G02B26/0841 Primary

  the reflecting element being moved or deformed by electrostatic means · CPC title

• B81B2201/042

  Micromirrors, not used as optical switches · CPC title

• B81B3/0035

  Constitution or structural means for controlling the movement of the flexible or deformable elements · CPC title

• G02B26/08

  for controlling the direction of light (in light guides G02B6/35) · CPC title