Systems and methods for monitoring and adjusting operation of a mover system
US-2024094718-A1 · Mar 21, 2024 · US
US10850932B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10850932-B2 |
| Application number | US-201515751386-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 11, 2015 |
| Priority date | Aug 11, 2015 |
| Publication date | Dec 1, 2020 |
| Grant date | Dec 1, 2020 |
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A positioning system has at least one positioning carriage which is variably mobile and positionable relative to a carriage support of the positioning system, whilst carrying out a positioning movement on a positioning plane defined by an xy cartesian co-ordinate system. The carriage support has at least one stator arrangement having a winding arrangement with an x-winding section for providing a magnetic x-travelling field, which can be moved in the direction of the x-axis of the xy co-ordinate system, and a y-winding section for providing a magnetic y-travelling field, which can be moved in the direction of the y-axis of the xy co-ordinate system. The positioning carriage is provided with a coupling arrangement which, during the positioning movement, magnetically interacts simultaneously with the x-travelling field and the y-travelling field.
Opening claim text (preview).
The invention claimed is: 1. A The positioning system comprising at least one positioning carriage which is variably movable and positionable relative to a carriage support of the positioning system, whilst carrying out a positioning movement on a positioning plane defined by an xy cartesian coordinate system, wherein the carriage support has at least one stator arrangement comprising a winding arrangement, which has an x-winding section for providing a magnetic x-travelling field, which can be moved in the direction of the x-axis of the xy coordinate system, and a y-winding section for providing a magnetic y-travelling field, which can be moved in the direction of the y-axis of the xy coordinate system, and wherein the positioning carriage is provided with a coupling arrangement, which, during the positioning movement, magnetically interacts simultaneously with the x-travelling field and the y-travelling field, and the positioning carriage can be driven to carry out a positioning movement in the direction of the x-axis of the xy coordinate system by the movement of the x-travelling field and to carry out a positioning movement in the direction of the y-axis of the xy coordinate system by the movement of the y-travelling field, and wherein the x-winding section and the y-winding section are arranged parallel to the positioning plane and take up, at least partially, the same xy region in the xy coordinate system, such that the x-travelling field and the y-travelling field overlap in this xy region, and wherein the x-winding section comprises a plurality of x-wire sections running in the direction of the y-axis and arranged one next to the other on an x-plane parallel to the positioning plane, the y-winding section comprises a plurality of y-wire sections running in the direction of the x-axis and arranged one next to the other on a y-plane parallel to the positioning plane, and the x-wire sections and the y-wire sections are arranged one over the other in the direction perpendicular to the positioning plane, such that, in the top view onto the xy coordinate system, a plurality of crossing points results between the x-wire sections and the y-wire sections, and wherein the xy region which is taken up by both the x-winding section and the y-winding section is greater than the xy region which is taken up only by the x-winding section, and is greater than the xy region which is taken up only by the y-winding section. 2. The positioning system according to claim 1 , wherein a plurality of x-planes and y-planes is provided, which are stacked alternately one over the other in the direction perpendicular to the positioning plane. 3. The positioning system according to claim 2 , wherein the x-wire sections are divided into different x-wire section groups respectively, x-wire sections of different x-wire section groups are arranged one next to the other on an x-plane, and this arrangement is repeated periodically along the direction of the x-axis, wherein two x-wire sections of the same x-wire section group are connected to each other at a side edge of the winding arrangement via a connecting section respectively, and the y-wire sections are divided into different y-wire section groups respectively, y-wire sections of different y-wire section groups are arranged one next to the other in a y-plane, and this arrangement is repeated periodically along the direction of the y-axis, wherein two y-wire sections of the same y-wire section group are connected to each other at a side edge of the winding arrangement via a connecting section respectively. 4. The positioning system according to claim 3 , wherein the connecting sections are bent upwards or downwards in the direction perpendicular to the positioning plane. 5. The positioning system according to claim 3 , wherein x-wire sections of the same x-wire section group of different x-planes are connected to one another, and y-wire sections of the same y-wire section group of different y-planes are connected to one another. 6. The positioning system according to claim 2 , wherein the x-wire sections of the same x-wire section group of all x-planes are connected to one another in series, such that they form a single continuous x-wire, and the y-wire sections of the same y-wire section group of all y-planes are connected to one another in series, such that they form a single continuous y-wire. 7. The positioning system according to claim 1 , wherein the coupling arrangement is a magnet arrangement, which has a plurality of magnetic poles distributed on a plane parallel to the positioning plane, said poles being placed on crossing points of x-grid lines and y-grid lines, which are at right angles to one another, of an imaginary cross grid, in such a way that magnetic poles placed on the same x-grid lines have, among one another, the same pole alignment, and magnetic poles placed on the same y-grid lines have, among one another, the same pole alignment, wherein the pole alignment of the magnetic poles alternate in the diagonal direction of the xy coordinate system. 8. The positioning system according to claim 1 , wherein the coupling arrangement is a superconductor arrangement. 9. The positioning system according to claim 8 , wherein the superconductor arrangement comprises a first group of superconductor sections in which magnetic field geometries of a first pole alignment are impressed respectively, and comprises a second group of superconductor sections in which magnetic field geometries of a second pole alignment opposite to the first pole alignment are impressed respectively, wherein the superconductor sections are distributed on a plane parallel to the positioning plane and are placed on crossing points of x-grid lines and y-grid lines, which are at right angles to one another, of an imaginary cross grid in such a way that superconductor sections placed on the same x-grid lines have, among one another, the same pole alignment, and superconductor sections placed on the same y-grid lines have, among one another, the same pole alignment, wherein the pole alignment of the superconductor sections alternate in the diagonal direction of the xy coordinate system. 10. The positioning system according to claim 1 , wherein the bearing device has an air bearing plate, which has a plurality of air outlet openings on the side facing towards the positioning carriage for providing an air bearing supporting the positioning carriage. 11. The positioning system according to claim 10 , wherein the carriage support has at least one winding chamber in which the winding arrangement is arranged, wherein the winding chamber is closed towards the positioning carriage by the air bearing plate and has a compressed air inlet on the side of the winding arrangement facing away from the air bearing plate, such that air bearing compressed air provided at the compressed air inlet must flow through the winding chamber and the winding arrangement in order to reach the air outlet openings. 12. A positioning system comprising at least one positioning carriage which is variably movable and positionable relative to a carriage support of the positioning system, whilst carrying out a positioning movement on a positioning plane defined by an xy cartesian coordinate system, wherein the carriage support has at least one stator arrangement comprising a winding arrangement, which has an x-winding section for providing a magnetic x-travelling field, which can be moved in the direction of the x-axis of the xy coordinate system, and a y-winding section for providing a magnetic y-travelling field, which can be moved in the direction of the y-axis of the xy coordinate system, and wherein the positioning carriage i
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