Data correction method, computer program for causing computer to perform data correction method, image processor, and scanning probe microscope

Patent metadata

Field	Value
Publication number	US-10846547-B2
Application number	US-201916239905-A
Country	US
Kind code	B2
Filing date	Jan 4, 2019
Priority date	Mar 20, 2018
Publication date	Nov 24, 2020
Grant date	Nov 24, 2020

Abstract

A data correction method for allowing any observer to satisfactorily perform height correction on an image is provided. Specifically, a data correction method for correcting height of a plurality of pieces of measurement data by using image data acquired by a scanning probe microscope is disclosed. In this data correction method, a computer extracts a reference plane region from the image data, selects three pieces of measurement data, from the pieces of measurement data, at three points in the extracted reference plane region as first to third reference point data, and performs height correction on the other pieces of measurement data on the assumption that the first to third reference point data have the same height.

First claim

What is claimed is:

1. A data correction method for correcting a plurality of pieces of measurement data measured by a scanning probe microscope and each indicating height of an observation target, the data correction method comprising:
extracting, by a computer, from image data acquired by the scanning probe microscope, pixels each satisfying the condition that a comparison result with an adjacent pixel is an edge as edge pixels;
extracting, by the computer, a reference plane region by dividing a plane of the image data into a plurality of regions based on the edge and extracting a region having a largest area of the regions as the reference plane region; and
correcting, by the computer, the height indicated by each piece of measurement data based on height information of the reference plane region.

2. The data correction method of claim 1 , wherein
the correcting includes selecting, from the pieces of measurement data, three pieces of measurement data at three points in the extracted reference plane region as first to third reference point data, and correcting the height of each piece of measurement data on an assumption that the first to third reference point data have a same height.

3. The data correction method of claim 1 , wherein
a horizontal position of each piece of measurement data is represented by an X-axis coordinate and a Y-axis coordinate, and the height indicated by each piece of measurement data is represented by a Z-axis coordinate,
the extracting the pixels includes extracting the edge based on a difference between a Z-axis coordinate of a pixel of interest and a Z-axis coordinate of a pixel adjacent to the pixel of interest in an XY-plane, and
the extracting the reference plane region includes dividing the XY-plane into the plurality of regions based on the extracted edge and extracting the region having the largest area of the plurality of regions as the reference plane region.

4. The data correction method of claim 1 , wherein
the correcting includes selecting, from the pieces of measurement data, four or more pieces of measurement data at four or more points in the extracted reference plane region as reference point data, and correcting the height indicated by each piece of measurement data on an assumption that the points selected as the reference point data are in a same XY-plane.

5. The data correction method of claim 1 , wherein
the image data is data of an image that is formed from an error signal.

6. The data correction method of claim 1 , wherein
the correcting includes correcting a Z coordinate of first measurement data of the pieces of measurement data based on a difference, at X and Y coordinates of the first measurement data, between a Z coordinate of a plane defined by first to third reference point data and the Z coordinate of the first measurement data.

7. A computer program product stored on a non-transitory computer readable medium for causing a computer to perform the data correction method of claim 1 .

8. An image processor configured to perform the data correction method of claim 1 .

9. A scanning probe microscope comprising the image processor of claim 8 .

10. A data correction method for correcting a plurality of pieces of measurement data measured by a scanning probe microscope and each indicating height of an observation target, the data correction method comprising:
extracting, by a computer, an edge from image data acquired by the scanning probe microscope;
extracting, by the computer, a reference plane region by defining at least part of a region other than the edge in the image data as the reference plane region; and
correcting, by the computer, the height indicated by each piece of measurement data based on height information of the reference plane region, wherein
a horizontal position of each piece of measurement data is represented by an X-axis coordinate and a Y-axis coordinate, and the height of each piece of measurement data is represented by a Z-axis coordinate,
the extracting the edge includes extracting the edge based on a difference between a Z-axis coordinate of a pixel of interest and a Z-axis coordinate of a pixel adjacent to the pixel of interest in an XY-plane, and
the extracting the reference plane region includes dividing the XY-plane into a plurality of regions based on the extracted edge and extracting a region having a largest area of the regions as the reference plane region.

11. The data correction method of claim 10 , wherein
the correcting includes selecting, from the pieces of measurement data, three pieces of measurement data at three points in the extracted reference plane region as first to third reference point data, and correcting the height of each piece of measurement data on an assumption that the first to third reference point data have a same height.

12. The data correction method of claim 10 , wherein
the correcting includes selecting, from the pieces of measurement data, four or more pieces of measurement data at four or more points in the extracted reference plane region as reference point data, and correcting the height indicated by each piece of measurement data on an assumption that the points selected as the reference point data are in a same XY-plane.

13. The data correction method of claim 10 , wherein
the image data is data of an image that is formed from an error signal.

14. The data correction method of claim 10 , wherein
the correcting includes correcting a Z coordinate of first measurement data of the pieces of measurement data based on a difference, at X and Y coordinates of the first measurement data, between a Z coordinate of a plane defined by first to third reference point data and the Z coordinate of the first measurement data.

15. A computer program product stored on a non-transitory computer readable medium for causing a computer to perform the data correction method of claim 10 .

16. An image processor configured to perform the data correction method of claim 10 .

17. A scanning probe microscope comprising the image processor of claim 16 .

Assignees

• Shimadzu Corp

Inventors

• Hirade Masato
• Yamasaki Kenji

Classifications

• G06V10/60

  relating to illumination properties, e.g. using a reflectance or lighting model · CPC title

• G06V10/44

  Local feature extraction by analysis of parts of the pattern, e.g. by detecting edges, contours, loops, corners, strokes or intersections; Connectivity analysis, e.g. of connected components · CPC title

• G06T2207/20021

  Dividing image into blocks, subimages or windows · CPC title

• G01Q60/26

  Friction force microscopy · CPC title

• G06T2207/10056

  Microscopic image · CPC title