Tuning-fork type quartz crystal vibrating element and piezoelectric device
US-2019165761-A1 · May 30, 2019 · US
US10845237B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-10845237-B2 |
| Application number | US-201715628736-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 21, 2017 |
| Priority date | Jul 18, 2016 |
| Publication date | Nov 24, 2020 |
| Grant date | Nov 24, 2020 |
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A vibration sensor, with a diaphragm that can be excited via a drive to vibrate, and a mechanical vibrator arranged at said diaphragm, with the mechanical vibrator comprising a cover with at least one closed interior chamber.
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We claim: 1. A vibration sensor comprising a diaphragm that can be excited to vibrate via a drive and a mechanical vibrator arranged at the diaphragm, wherein the mechanical vibrator comprises one or more paddles, wherein each such paddle comprises a cover, a closed interior chamber and a filler located within such closed interior chamber, such filler being arranged as a support structure comprising a plurality of ridges and hollow chambers between such ridges, wherein the cover and supporting structure propagates a vibrating frequency. 2. The vibration sensor, according to claim 1 , wherein the filler comprises reduced density compared to the cover. 3. The vibration sensor, according to claim 1 , wherein the support structure is designed in a repeating geometric pattern. 4. The vibration sensor, according to claim 1 , wherein the support structure is designed with a honey-comb like cross-section. 5. The vibration sensor, according to claim 1 , wherein the support structure comprises hollow chambers showing a round cross-section. 6. The vibration sensor, according to claim 1 , wherein the interior chamber is filled with a metal foam. 7. The vibration sensor, according to claim 1 , wherein the cover and/or the support structure show a wall thickness from 50 μm to 500 μm.
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